Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > JSR Joins SEMATECH’s Resist Center at UAlbany NanoCollege

Abstract:
Collaboration to provide cost-effective semiconductor materials for 22nm nodes

JSR Joins SEMATECH’s Resist Center at UAlbany NanoCollege

Albany, NY and Tokyo, Japan | Posted on May 11th, 2010

SEMATECH, a global consortium of chipmakers, and JSR Corporation, an advanced materials supplier to chip-makers and others, and its U.S. operation, JSR Micro, Inc. announced today that it has become the newest member of SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering (CNSE) of the University at Albany.

JSR will collaborate with SEMATECH engineers on key resist issues in extreme ultraviolet (EUV) lithography. Focus areas will include:

· Working to reduce or eliminate line edge roughness (LER) in lithographic images below 22 nm

· Discovering ultimate resolution of newly formulated photoresists

· Testing various imaging materials for EUV sensitivity

SEMATECH and JSR have partnered previously in several technology development programs, including 300 mm test wafers, low-k films, and advanced resists, including double exposure materials.

"We have a successful history of partnership with SEMATECH and we are excited to continue that history in the field of EUV," said Hozumi Sato, managing director of JSR Corporation, responsible for the Research and Development. "Combining resources to create next generation of EUV materials is not only good for JSR and SEMATECH, but will benefit the industry as a whole."

"We're looking forward to working with JSR in our mutual effort to develop leading‑edge resists and materials, and accelerate process availability for EUV pilot line manufacturing," said John Warlaumont, vice president of Advanced Technology at SEMATECH. "Our successful experience in our previous partnerships will contribute greatly to RMDC's effectiveness."

"The addition of JSR to the roster of global companies at CNSE's Albany NanoTech Complex will further enhance the SEMATECH-CNSE partnership in driving leading-edge nanoelectronics innovations," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "This collaboration is enabling advances in a host of technologies, including EUV lithography, which are critical to industry."

At the RMDC, leading resist and materials suppliers participate in focused, cooperative R&D with SEMATECH member companies. Together, the RMDC provides the hardware and research expertise required by materials suppliers and member companies to develop EUV resist processes that meet the stringent resolution, linewidth roughness, and sensitivity specifications needed for EUV insertion at member companies.

####

About SEMATECH
For over 20 years, SEMATECH® (www.sematech.org), the international consortium of leading semiconductor manufacturers, has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

About JSR Corporation
Tokyo based JSR Corporation is an advanced manufacturer in polymer chemistry, it operates a wide range of global businesses ranging from the petrochemical business, including the manufacture of synthetic rubber, to the cutting-edge information and electronic materials business, including the manufacture of semiconductor materials and liquid crystal display materials. For more information, visit www.jsr.co.jp.

About CNSE
The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5.5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE’s Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech. For more information, visit www.cnse.albany.edu.

For more information, please click here

Contacts:
SEMATECH
Erica McGill, 518-649-1041


JSR Corporation (Japan)
Yoshiko Takeda, 81-3-6218-3517


CNSE
Steve Janack, 518-956-7322


JSR Micro, Inc. (US)
Missy Bindseil, 408-543-8945

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Imaging electric charge propagating along microbial nanowires October 20th, 2014

Design of micro and nanoparticles to improve treatments for Alzheimers and Parkinsons: At the Faculty of Pharmacy of the UPV/EHU-University of the Basque Country encapsulation techniques are being developed to deliver correctly and effectively certain drugs October 20th, 2014

Physicists build reversible laser tractor beam October 20th, 2014

Removal of Limitations of Composites at Superheat Temperatures October 20th, 2014

Academic/Education

First Canada Excellence Research Chair gets $10 million from the federal government for oilsands research at the University of Calgary: Federal government announces prestigious research chair to study improving oil production efficiency October 19th, 2014

Raytheon, UMass Lowell open on-campus research institute: Industry leader’s researchers to collaborate with faculty, students to move key technologies forward through first-of-its-kind partnership October 11th, 2014

SUNY Colleges of Nanoscale Science and Engineering and National Institute for Occupational Safety and Health Announce Expanded Partnership October 2nd, 2014

Yale University and Leica Microsystems Partner to Establish Microscopy Center of Excellence: Yale Welcomes Scientists to Participate in Core Facility Opening and Super- Resolution Workshops October 20 Through 31, 2014 September 30th, 2014

Chip Technology

Crystallizing the DNA nanotechnology dream: Scientists have designed the first large DNA crystals with precisely prescribed depths and complex 3D features, which could create revolutionary nanodevices October 20th, 2014

Imaging electric charge propagating along microbial nanowires October 20th, 2014

Superconducting circuits, simplified: New circuit design could unlock the power of experimental superconducting computer chips October 18th, 2014

3DXNano™ ESD Carbon Nanotube 3D Printing Filament - optimized for demanding 3D printing applications in the semi-con and electronics industry October 16th, 2014

Nanoelectronics

Crystallizing the DNA nanotechnology dream: Scientists have designed the first large DNA crystals with precisely prescribed depths and complex 3D features, which could create revolutionary nanodevices October 20th, 2014

Imaging electric charge propagating along microbial nanowires October 20th, 2014

Future computers could be built from magnetic 'tornadoes' October 14th, 2014

Aledia’s Nanowire LED Technology Endorsed By 2014 Physics Nobel Prize Winner: Hiroshi Amano Serves on Company’s Scientific Advisory Board October 13th, 2014

Announcements

Imaging electric charge propagating along microbial nanowires October 20th, 2014

Design of micro and nanoparticles to improve treatments for Alzheimers and Parkinsons: At the Faculty of Pharmacy of the UPV/EHU-University of the Basque Country encapsulation techniques are being developed to deliver correctly and effectively certain drugs October 20th, 2014

Physicists build reversible laser tractor beam October 20th, 2014

Removal of Limitations of Composites at Superheat Temperatures October 20th, 2014

Research partnerships

Crystallizing the DNA nanotechnology dream: Scientists have designed the first large DNA crystals with precisely prescribed depths and complex 3D features, which could create revolutionary nanodevices October 20th, 2014

IRLYNX and CEA-Leti to Streamline New CMOS-based Infrared Sensing Modules Dedicated to Human-activities Characterization October 15th, 2014

Scientists Map Key Moment in Assembly of DNA-Splitting Molecular Machine: Crucial steps and surprising structures revealed in the genesis of the enzyme that divides the DNA double helix during cell replication October 15th, 2014

Unique catalysts for hydrogen fuel cells synthesized in ordinary kitchen microwave oven October 14th, 2014

NanoNews-Digest
The latest news from around the world, FREE





  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE