Nanotechnology Now

Our NanoNews Digest Sponsors
Heifer International



Home > Press > Canadian research centre orders tools

Abstract:
Oxford Instruments Plasma Technology (OIPT), leader in systems for etch, deposition and growth, has recently received a multi-system order from the University of Waterloo, Ontario, Canada for installation in their new cleanroom facility.

Canadian research centre orders tools

UK | Posted on May 5th, 2010

The process tools ordered are OIPT's System100 ICP & System133 PECVD, and a FlexAL PECVD/ALD Cluster tool, with multi-wafer batch capability and the potential for providing a number of process applications.

OIPT tools offer powerful stand alone and clusterable process modules, enabling a wide range of applications, and the University of Waterloo will be implementing the systems for multiple process techniques. These include Bosch, Cryo silicon etch, Compound Semiconductor, Metal etch, and PECVD. In addition, one of the tools will be clustered to offer ALD process capability, to deposit Al2O3 conformal coating.

The equipment will be housed in the cleanroom at the Mike and Ophelia Lazaridis Quantum-Nano Centre, a new state-of-the-art building now under construction at the heart of the University of Waterloo campus. The facility, slated for completion in 2011, will be shared between the Institute for Quantum Computing and the Waterloo Institute of Nanotechnology.

The purchase of equipment is made possible by the generous support IQC receives from the Canada Foundation for Innovation, the Ontario Research Fund, the University of Waterloo, and the namesakes of the new building, Mike and Ophelia Lazaridis.

Oxford Instruments pursues responsible development and deeper understanding of the world through science and technology, and this order for another new University research facility is testament to that commitment.

####

About Oxford Instruments
Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. We provide high technology tools and systems for industrial and research markets, based on our ability to analyse and manipulate matter at the smallest scale.

For more information, please click here

Contacts:
Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK

Company Secretary
Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK Tel: +44 (0)1865 393200

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Researchers develop artificial building blocks of life March 8th, 2024

How surface roughness influences the adhesion of soft materials: Research team discovers universal mechanism that leads to adhesion hysteresis in soft materials March 8th, 2024

Two-dimensional bimetallic selenium-containing metal-organic frameworks and their calcinated derivatives as electrocatalysts for overall water splitting March 8th, 2024

Curcumin nanoemulsion is tested for treatment of intestinal inflammation: A formulation developed by Brazilian researchers proved effective in tests involving mice March 8th, 2024

Laboratories

A battery’s hopping ions remember where they’ve been: Seen in atomic detail, the seemingly smooth flow of ions through a battery’s electrolyte is surprisingly complicated February 16th, 2024

NRL discovers two-dimensional waveguides February 16th, 2024

Catalytic combo converts CO2 to solid carbon nanofibers: Tandem electrocatalytic-thermocatalytic conversion could help offset emissions of potent greenhouse gas by locking carbon away in a useful material January 12th, 2024

Three-pronged approach discerns qualities of quantum spin liquids November 17th, 2023

Govt.-Legislation/Regulation/Funding/Policy

What heat can tell us about battery chemistry: using the Peltier effect to study lithium-ion cells March 8th, 2024

Researchers’ approach may protect quantum computers from attacks March 8th, 2024

The Access to Advanced Health Institute receives up to $12.7 million to develop novel nanoalum adjuvant formulation for better protection against tuberculosis and pandemic influenza March 8th, 2024

Optically trapped quantum droplets of light can bind together to form macroscopic complexes March 8th, 2024

Academic/Education

Rice University launches Rice Synthetic Biology Institute to improve lives January 12th, 2024

Multi-institution, $4.6 million NSF grant to fund nanotechnology training September 9th, 2022

National Space Society Helps Fund Expanding Frontier’s Brownsville Summer Entrepreneur Academy: National Space Society and Club for the Future to Support Youth Development Program in South Texas June 24th, 2022

How a physicist aims to reduce the noise in quantum computing: NAU assistant professor Ryan Behunin received an NSF CAREER grant to study how to reduce the noise produced in the process of quantum computing, which will make it better and more practical April 1st, 2022

Announcements

What heat can tell us about battery chemistry: using the Peltier effect to study lithium-ion cells March 8th, 2024

Curcumin nanoemulsion is tested for treatment of intestinal inflammation: A formulation developed by Brazilian researchers proved effective in tests involving mice March 8th, 2024

The Access to Advanced Health Institute receives up to $12.7 million to develop novel nanoalum adjuvant formulation for better protection against tuberculosis and pandemic influenza March 8th, 2024

Nanoscale CL thermometry with lanthanide-doped heavy-metal oxide in TEM March 8th, 2024

Tools

First direct imaging of small noble gas clusters at room temperature: Novel opportunities in quantum technology and condensed matter physics opened by noble gas atoms confined between graphene layers January 12th, 2024

New laser setup probes metamaterial structures with ultrafast pulses: The technique could speed up the development of acoustic lenses, impact-resistant films, and other futuristic materials November 17th, 2023

Ferroelectrically modulate the Fermi level of graphene oxide to enhance SERS response November 3rd, 2023

The USTC realizes In situ electron paramagnetic resonance spectroscopy using single nanodiamond sensors November 3rd, 2023

New-Contracts/Sales/Customers

Bruker Light-Sheet Microscopes at Major Comprehensive Cancer Center: New Advanced Imaging Center Powered by Two MuVi and LCS SPIM Microscopes March 25th, 2021

Arrowhead Pharmaceuticals Announces Closing of Agreement with Takeda November 27th, 2020

Veeco Announces Aledia Order of 300mm MOCVD Equipment for microLED Displays: Propel™ Platform First 300mm System with EFEM Designed for Advanced Display Applications October 20th, 2020

GREENWAVES TECHNOLOGIES Announces Next Generation GAP9 Hearables Platform Using GLOBALFOUNDRIES 22FDX Solution October 16th, 2020

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project