Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Canadian research centre orders tools

Abstract:
Oxford Instruments Plasma Technology (OIPT), leader in systems for etch, deposition and growth, has recently received a multi-system order from the University of Waterloo, Ontario, Canada for installation in their new cleanroom facility.

Canadian research centre orders tools

UK | Posted on May 5th, 2010

The process tools ordered are OIPT's System100 ICP & System133 PECVD, and a FlexAL PECVD/ALD Cluster tool, with multi-wafer batch capability and the potential for providing a number of process applications.

OIPT tools offer powerful stand alone and clusterable process modules, enabling a wide range of applications, and the University of Waterloo will be implementing the systems for multiple process techniques. These include Bosch, Cryo silicon etch, Compound Semiconductor, Metal etch, and PECVD. In addition, one of the tools will be clustered to offer ALD process capability, to deposit Al2O3 conformal coating.

The equipment will be housed in the cleanroom at the Mike and Ophelia Lazaridis Quantum-Nano Centre, a new state-of-the-art building now under construction at the heart of the University of Waterloo campus. The facility, slated for completion in 2011, will be shared between the Institute for Quantum Computing and the Waterloo Institute of Nanotechnology.

The purchase of equipment is made possible by the generous support IQC receives from the Canada Foundation for Innovation, the Ontario Research Fund, the University of Waterloo, and the namesakes of the new building, Mike and Ophelia Lazaridis.

Oxford Instruments pursues responsible development and deeper understanding of the world through science and technology, and this order for another new University research facility is testament to that commitment.

####

About Oxford Instruments
Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. We provide high technology tools and systems for industrial and research markets, based on our ability to analyse and manipulate matter at the smallest scale.

For more information, please click here

Contacts:
Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK

Company Secretary
Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK Tel: +44 (0)1865 393200

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

MRI, on a molecular scale: Researchers develop system that could one day peer into the atomic structure of individual molecules April 20th, 2014

Iranian Researchers Present New Model to Strengthen Superconductivity at Higher Temperatures April 19th, 2014

Iranian Researchers Produce New Anti-Cancer Drug from Turmeric April 19th, 2014

Innovative strategy to facilitate organ repair April 18th, 2014

Laboratories

Scientists Capture Ultrafast Snapshots of Light-Driven Superconductivity: X-rays reveal how rapidly vanishing 'charge stripes' may be behind laser-induced high-temperature superconductivity April 16th, 2014

'Life Redesigned: The Emergence of Synthetic Biology' Lecture at Brookhaven Lab on Wednesday, April 30: Biomedical Engineer James Collins to Speak for BSA Distinguished Lecture Series April 16th, 2014

Relieving electric vehicle range anxiety with improved batteries: Lithium-sulfur batteries last longer with nanomaterial-packed cathode April 16th, 2014

Energy Research Facility Construction Project at Brookhaven Lab Wins U.S. Energy Secretary's Achievement Award April 16th, 2014

Govt.-Legislation/Regulation/Funding/Policy

'Exotic' material is like a switch when super thin April 18th, 2014

Innovative strategy to facilitate organ repair April 18th, 2014

Novel stapled peptide nanoparticle combination prevents RSV infection, study finds April 17th, 2014

INSCX™ exchange to present Exchange trade reporting mechanism for engineered nanomaterials (NMs) to UK regulation agencies, insurers and upstream/downstream users April 17th, 2014

Academic/Education

Director Wally Pfister joins UC Berkeley neuroengineers to discuss the science behind ‘Transcendence’ April 7th, 2014

First annual science week highlights STEM pipeline and partnerships: UB, SUNY Buffalo State and ECC team up with the City of Buffalo and its schools for April 7-11 events April 3rd, 2014

Global 450 consortium announces new general manager of internal operations: TSMC’s Cheng-Chung Chien Receives Unanimous Support, Brings History of Innovation and Efficiency to Global Consortium of Companies Driving Industry Transition to 450mm Wafer Technology March 26th, 2014

NanoTecNexus to Host "Chemistry of Wine" Fundraiser in Support of STEM Education - Collaborations Key to Success - March 20th, 2014

Announcements

MRI, on a molecular scale: Researchers develop system that could one day peer into the atomic structure of individual molecules April 20th, 2014

Iranian Researchers Present New Model to Strengthen Superconductivity at Higher Temperatures April 19th, 2014

Iranian Researchers Produce New Anti-Cancer Drug from Turmeric April 19th, 2014

Innovative strategy to facilitate organ repair April 18th, 2014

Tools

MRI, on a molecular scale: Researchers develop system that could one day peer into the atomic structure of individual molecules April 20th, 2014

Oxford Instruments Asylum Research Introduces the MFP-3D InfinityTM AFM Featuring Powerful New Capabilities and Stunning High Performance April 18th, 2014

More effective kidney stone treatment, from the macroscopic to the nanoscale April 17th, 2014

Aerotech X-Y ball-screw stage for economical high performance Planar positioning April 16th, 2014

New-Contracts/Sales/Customers

Industrial Nanotech, Inc. Lands First Major Order from Pemex, Mexico’s State-Owned Oil and Gas Company April 14th, 2014

TED Selects Nanotech for Branding and Security on 30th Anniversary Conferences: Nanotech and TED collaborate to create a custom security feature using nano-imaging March 17th, 2014

Simon Fraser University Completes Installation of Electron Microscopes from FEI: SFU’s new multi-million-dollar Centre for Soft Materials now offers the most advanced suite of microscopes in Western Canada March 11th, 2014

Arrowhead Receives Regulatory Approval to Begin Phase 2a Trial of Chronic Hepatitis B Candidate ARC-520 March 3rd, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE