Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Canadian research centre orders tools

Abstract:
Oxford Instruments Plasma Technology (OIPT), leader in systems for etch, deposition and growth, has recently received a multi-system order from the University of Waterloo, Ontario, Canada for installation in their new cleanroom facility.

Canadian research centre orders tools

UK | Posted on May 5th, 2010

The process tools ordered are OIPT's System100 ICP & System133 PECVD, and a FlexAL PECVD/ALD Cluster tool, with multi-wafer batch capability and the potential for providing a number of process applications.

OIPT tools offer powerful stand alone and clusterable process modules, enabling a wide range of applications, and the University of Waterloo will be implementing the systems for multiple process techniques. These include Bosch, Cryo silicon etch, Compound Semiconductor, Metal etch, and PECVD. In addition, one of the tools will be clustered to offer ALD process capability, to deposit Al2O3 conformal coating.

The equipment will be housed in the cleanroom at the Mike and Ophelia Lazaridis Quantum-Nano Centre, a new state-of-the-art building now under construction at the heart of the University of Waterloo campus. The facility, slated for completion in 2011, will be shared between the Institute for Quantum Computing and the Waterloo Institute of Nanotechnology.

The purchase of equipment is made possible by the generous support IQC receives from the Canada Foundation for Innovation, the Ontario Research Fund, the University of Waterloo, and the namesakes of the new building, Mike and Ophelia Lazaridis.

Oxford Instruments pursues responsible development and deeper understanding of the world through science and technology, and this order for another new University research facility is testament to that commitment.

####

About Oxford Instruments
Oxford Instruments aims to pursue responsible development and deeper understanding of our world through science and technology. We provide high technology tools and systems for industrial and research markets, based on our ability to analyse and manipulate matter at the smallest scale.

For more information, please click here

Contacts:
Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK

Company Secretary
Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK Tel: +44 (0)1865 393200

Copyright © Oxford Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Harris & Harris Group Portfolio Company, AgBiome, Announces Partnership to Accelerate the Discovery of Next Generation Insect-Resistant Crops July 1st, 2015

Bruker Introduces Second-Generation Inspire Nanochemical Imaging Solution: Featuring Unique PeakForce IR and IR EasyAlign Technology July 1st, 2015

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

Samsung's New Graphene Technology Will Double Life Of Your Lithium-Ion Battery July 1st, 2015

Laboratories

X-rays and electrons join forces to map catalytic reactions in real-time: New technique combines electron microscopy and synchrotron X-rays to track chemical reactions under real operating conditions June 29th, 2015

Helium 'balloons' offer new path to control complex materials June 27th, 2015

Opening a new route to photonics Berkeley lab researchers find way to control light in densely packed nanowaveguides June 27th, 2015

Silica 'spiky screws' could enhance industrial coatings, additive manufacturing June 24th, 2015

Govt.-Legislation/Regulation/Funding/Policy

Proposed TSCA Nanomaterial Rule ‘Premature’, Says Former EPA Toxicologist July 1st, 2015

Carnegie Mellon chemists characterize 3-D macroporous hydrogels: Methods will allow researchers to develop new 'smart' materials June 30th, 2015

Graphene flexes its electronic muscles: Rice-led researchers calculate electrical properties of carbon cones, other shapes June 30th, 2015

X-rays and electrons join forces to map catalytic reactions in real-time: New technique combines electron microscopy and synchrotron X-rays to track chemical reactions under real operating conditions June 29th, 2015

Academic/Education

Oxford Instruments’ TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

Rice University boots up powerful microscopes: New electron microscopes will capture images at subnanometer resolution June 29th, 2015

Six top Catalan research centres constitute ‘The Barcelona Institute of Science and Technology’ to pursue a joint scientific endeavour June 27th, 2015

Lancaster University revolutionary quantum technology research receives funding boost June 22nd, 2015

Announcements

Leti Announces Launch of First European Nanomedicine Characterisation Laboratory: Project Combines Expertise of 9 Partners in 8 Countries to Foster Nanomedicine Innovation and Facilitate Regulatory Approval July 1st, 2015

Bruker Introduces Second-Generation Inspire Nanochemical Imaging Solution: Featuring Unique PeakForce IR and IR EasyAlign Technology July 1st, 2015

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

Samsung's New Graphene Technology Will Double Life Of Your Lithium-Ion Battery July 1st, 2015

Tools

Bruker Introduces Second-Generation Inspire Nanochemical Imaging Solution: Featuring Unique PeakForce IR and IR EasyAlign Technology July 1st, 2015

Compact, Low Cost, Accurate: Mini Positioning Stages, by PI June 30th, 2015

Carnegie Mellon chemists characterize 3-D macroporous hydrogels: Methods will allow researchers to develop new 'smart' materials June 30th, 2015

Oxford Instruments’ TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

New-Contracts/Sales/Customers

Oxford Instruments’ TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

Centre for Process Innovation pilots Beneq’s breakthrough roll-to-roll ALD system for moisture barrier films June 3rd, 2015

Argonne chooses Beneq’s TFS 500 Atomic Layer Deposition System: Modularity and flexibility make for a natural choice May 14th, 2015

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project