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Home > Press > ETH Zurich orders AIXTRON 4-inch Black Magic tool for CNT nanofluidics

AIXTRON AG today announced a previous order for one Black Magic CNT (carbon nanotube) deposition system from ETH Zurich, a leading Institute in Switzerland. The system, in a 1x4 inch wafer configuration, is installed at the Department of Mechanical and Process Engineering.

ETH Zurich orders AIXTRON 4-inch Black Magic tool for CNT nanofluidics

Aachen, Germany | Posted on May 5th, 2010

Professor Hyung Gyu Park, Head of the Nanoscience for Energy Technology and Sustainability group comments: "Having evaluated several CNT tools, we found that the AIXTRON Black Magic system was the best overall in terms of uniformity and process control for wafer-scale growth of single wall carbon nanotubes. The system interface is user friendly and the reactor uses growth technology that has been proven in many labs as well as industry. We are extremely pleased with the system and it has consistently produced high quality, vertically aligned single wall carbon nanotubes which is exactly what we require. We are integrating these nanotubes into novel devices on a wafer-scale."

Professor Park joined ETH Zurich in April, 2009, as an Assistant Professor of Energy Technology in the Department of Mechanical and Process Engineering and his distinguished career has included work on mass transport in carbon nanotubes. In particular, his CNT research became a cover article of the journal Science, an article that has been one of the most frequently cited chemistry articles in this journal. His research program in ETH Zurich involves fundamental nanoscience of energy technology applications using various CNT-nanofluidic platforms and other nanostructures to study basic properties of transport under extreme confinement commensurable with transporting molecules' own sizes. Future applications cover solar energy harvesting and fuel cells as well as highly sensitive, non-destructive sensors.

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Additional Information

For additional information about factors that could affect our future financial and operating results, see our filings with the Securities and Exchange Commission, including the Registration Statement on Form F-4 (Regis.No. 333-122624) filed with the Commission on February 8, 2005 and available at the Commission's website at


AIXTRON AG is a leading provider of deposition equipment to the semiconductor industry. The Company's technology solutions are used by a diverse range of customers worldwide to build advanced components for electronic and opto-electronic applications based on compound, silicon, or organic semiconductor materials and more recently carbon nanostructures. Such components are used in display technology, signal and lighting technology, fiber communication networks, wireless and cell telephony applications, optical and electronic data storage, computer technology as well as a wide range of other high-tech applications. AIXTRON AG’s securities are listed on the Frankfurt Stock Exchange and, in form of American Depositary Shares (ADS), on the Global Market of the NASDAQ Stock Market, and are included in the TecDAX index, the NASDAQ Composite Index, the MSCI World Small Cap Index, the Nature Stock Index (NAI) and the Dow Jones Stoxx 600. Founded in 1983, the Company is headquartered in Herzogenrath, Germany.

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