Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > CEA-Letiís Hybrid Metrology Project Targets Better R&D Cycle Times and Yields at Sub-28nm Nodes

Abstract:
The continuous shrinkage of IC feature dimensions has made measurement uncertainty one of the key factors to be controlled to guarantee sufficient production yield.

Leti's Hybrid Metrology Project has shown noteworthy results in reducing measurement uncertainty at sub-28nm nodes using the Deep Trench Mode. While traditionally used for height measurement, it has been extended for some applications to reach nanometer-scale accuracy of CD measurements employing certain optimized scan parameters.

These results are a big advancement for both equipment companies and chipmakers. The Hybrid Metrology Project aims at developing all methodology and infrastructure needed to introduce hybrid metrology into high-volume manufacturing.

Research Results Presented at SPIE Advanced Lithography Conference.

CEA-Letiís Hybrid Metrology Project Targets Better R&D Cycle Times and Yields at Sub-28nm Nodes

Grenoble, France | Posted on April 1st, 2010

CEA-Leti, a leading global research center committed to creating and commercializing innovation in micro- and nanotechnologies, said today that its Hybrid Metrology Project has developed a way to reduce measurement uncertainty in the sub-28nm nodes.

The continuous shrinkage of IC feature dimensions has made measurement uncertainty one of the key factors to be controlled to guarantee sufficient production yield. Researchers are challenged to get accurate measurements of sub-40nm dense trenches and contact holes coming from 193-immersion lithography or e-beam lithography.

Top-down CD-SEM cannot provide profile information. Moreover, electron-material interaction (i.e., proximity effect, resist shrinkage phenomenon) leads to significant CD bias in the final measurements.

The Hybrid Metrology Project has shown noteworthy results in reducing measurement uncertainty at sub-28nm nodes using an alternative 3D-AFM (atomic force microscope) mode for CD measurement, the Deep Trench Mode. While traditionally this mode has been used for height measurement, it can be extended for certain applications to reach nanometer-scale accuracy of CD measurements employing certain optimized scan parameters.

The project's research findings, which were presented at the SPIE Advanced Lithography Conference in San Jose, Calif., in February, also show significant limitations to aggressive trench-dimension measurements using the conventional 3D-AFM CD mode.

Hybrid metrology is related to the reference CD metrology feedback loop in conventional CD metrology process control that is mostly done by CD-SEM and scatterometry in fabs. Reference metrology is a means of accelerating R&D and cutting production costs, compared to CD-SEM and scatterometry techniques, through finer process window definition.

"The Hybrid Metrology Project puts CEA-Leti in a unique position of being able to help both equipment companies and chipmakers," said Laurent Malier, CEO of CEA-Leti. "We anticipate helping equipment makers develop a CD metrology production tool dedicated to hybrid metrology that will reduce R&D cycle time and improve production yield for manufacturers."

Project leader Johann Foucher, who presented the SPIE paper, said CD hybrid metrology potentially could be introduced in high-volume manufacturing for sub-28nm nodes. That would require hybrid metrology tools and software that will simplify the communication and optimization of complementary techniques to obtain a relevant and low-cost CD metrology configuration.

This hybrid metrology platform would facilitate and optimize data exchange between reference and production techniques. It decreases the number of measurement iterations as a function of accuracy control because it prevents introduction of residual errors due to poor accuracy of the initial production CD metrology technique.

CEA-Leti researchers found that by using a reference in-line CD technique such as CD-AFM, it is possible to replace most cross-section images currently done by scanning electron microscopy or transmission electron microscopy. The result is faster R&D cycle time for any kind of process control (lithography and etching).

For yield production, the final result is the same as for R&D because the accuracy lowers the total-measurement-uncertainty parameter and guarantees better CD uniformity and process window definition on a full wafer. The fabricated devices would have fewer performance variations from die to die, wafer to wafer and lot to lot, which results in higher production yield.

The Hybrid Metrology Project intends to develop all methodology and infrastructure needed to introduce hybrid metrology into high-volume manufacturing. It has already explored very advanced 3D-AFM tips that have been used with the enhanced Deep Trench Mode parameters, and ways of pushing the limits of 3D-AFM technology for measuring tight dimensions that could extend its capability for future nodes.

####

About CEA-Leti
CEA is a French public research and technology organization, with activities in
three main areas: energy, technologies for information and healthcare, and defence and security. Within CEA, the Laboratory for Electronics & Information Technology (CEA-Leti) works with companies in order to increase their competitiveness through technological innovation and transfers. Leti is focused on micro and nanotechnologies and their applications, from wireless devices and systems, to biology and healthcare or photonics. Nanoelectronics and microsystems (MEMS) are at the core of its activities. As a major player in the MINATEC excellence centre, Leti operates 8,000-m≤ state-of-the-art clean rooms, on a 24/7 schedule, on 200mm and 300mm wafer standards. With 1,200 employees, Leti trains more than 150 Ph.D. students and hosts 200 assignees from partner companies. Strongly committed to the creation of value for the industry, Leti puts a strong emphasis on intellectual property and owns more than 1,400 patent families. In 2008, contractual income covered more than 75 percent of its budget worth 205 MÄ.

For more information, please click here

Contacts:
Technical Contact:

CEA-Leti
Johann Foucher
+33 4 38 78 49 18


Press Contacts:

CEA-Leti
Thierry Bosc
+33 4 38 78 31 95


Agency
Sarah-Lyle Dampoux
+33 1 58 18 59 30

Copyright © CEA-Leti

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Get ready for NanoDays! March 5th, 2015

American Chemical Society Presidential Symposia: nanoscience, international chemistry March 5th, 2015

CiQUS researchers obtain high-quality perovskites over large areas by a chemical method March 4th, 2015

Arrowhead to Present at 2015 Barclays Global Healthcare Conference March 4th, 2015

Chip Technology

Experiment and theory unite at last in debate over microbial nanowires: New model and experiments settle debate over metallic-like conductivity of microbial nanowires in bacterium March 4th, 2015

Magnetic vortices in nanodisks reveal information: Researchers from Dresden and JŁlich use microwaves to read out information from smallest storage devices March 4th, 2015

Cambrios and Heraeus Jointly Create New, High-Conductivity Transparent Conductors: Two Companies' Combined Products Dramatically Extend Flexible Substrate Capabilities for Next-Generation Mass-Market Technology Products March 3rd, 2015

The taming of magnetic vortices: Unified theory for skyrmion-materials March 3rd, 2015

Nanoelectronics

New nanowire structure absorbs light efficiently: Dual-type nanowire arrays can be used in applications such as LEDs and solar cells February 25th, 2015

Ultra-thin nanowires can trap electron 'twisters' that disrupt superconductors February 24th, 2015

Improved fire detection with new ultra-sensitive, ultraviolet light sensor February 17th, 2015

Nanotechnology facility planned in Lund, Sweden: A production facility for start-ups in the field of nanotechnology may be built in the Science Village in Lund, a world-class research and innovation village that is also home to ESS, the European Spallation Source February 15th, 2015

Announcements

Get ready for NanoDays! March 5th, 2015

American Chemical Society Presidential Symposia: nanoscience, international chemistry March 5th, 2015

CiQUS researchers obtain high-quality perovskites over large areas by a chemical method March 4th, 2015

Arrowhead to Present at 2015 Barclays Global Healthcare Conference March 4th, 2015

Events/Classes

Get ready for NanoDays! March 5th, 2015

American Chemical Society Presidential Symposia: nanoscience, international chemistry March 5th, 2015

Arrowhead to Present at 2015 Barclays Global Healthcare Conference March 4th, 2015

Cambrios and Heraeus Jointly Create New, High-Conductivity Transparent Conductors: Two Companies' Combined Products Dramatically Extend Flexible Substrate Capabilities for Next-Generation Mass-Market Technology Products March 3rd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE