Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > University of Michigan's Lurie Nanofabrication Facility Selects EV Group Wafer Bonding Systems for Advanced MEMS Research

Abstract:
Strategic Win Secured Given Superior Technology Advantages, Strong Customer Support and Affordability for University MEMS Research

University of Michigan's Lurie Nanofabrication Facility Selects EV Group Wafer Bonding Systems for Advanced MEMS Research

St. Florian, Austria | Posted on March 2nd, 2010

EV Group (EVG), a leading supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, today announced that it has shipped two wafer bonding systems to the University of Michigan's Lurie Nanofabrication Facility (LNF)—a leading center for MEMS and microsystems research and an integral member of the National Nanotechnology Infrastructure Network (NNIN), which is supported by the National Science Foundation. With a wafer bonder and aligner already installed at the facility, these new systems will increase the level of the university's overall MEMS research efforts by providing high-force wafer bonding capabilities. This order marks a strategic win for EVG as it poises the company for a long-term relationship with another major university with a strong MEMS research focus—and further expands EVG's overall presence in the university R&D arena.

Selected for their repeatability, reliability and technical support network, the bonding systems—an EVG 520IS and an EVG510—are undergoing installation at the customer site with completion targeted for Q1 this year. The wafer bonders will be used for a wide-range of MEMS-related research in fields such as biomedical, environmental, and optoelectronics. Both systems offer unique high-force bonding capabilities that would enable metal-to-metal bonding and specifically allow triple stack anodic bonding, for instance. The flexibility in force, as well as bonding form (e.g., anodic, eutectic, polymer, thermo-compression, and direct) that the systems offer will expand the research facility's processing capabilities.

"As a member of NNIN, we are always looking for the most advanced technical processing capabilities— not only for our own research efforts, but also in the interest of other research groups dedicated to advancing MEMS technology," said Professor Ken Wise of the University of Michigan and Director of the Lurie Nanofabrication Facility. "Following thorough evaluation of a number of wafer bonding systems, we selected EVG's bonding solutions for their superior technology capabilities. The combination of EVG's demo results, strong support network and the affordability of their system were all critical to our decision."

Steven Dwyer, Vice President and General Manager of EV Group North America, noted, "University of Michigan's Lurie Nanofabrication Facility is a stellar university research organization and we are thrilled that our systems were selected over the competition. The LNF has demonstrated the utmost confidence in our technology and technical support capabilities, which is testament to the strength of our solutions as well as our customer support team. We look forward to a long-term collaborative partnership with the LNF."

####

About EVGroup
EV Group (EVG) is a world leader in wafer-processing solutions for semiconductor, MEMS and nanotechnology applications. Through close collaboration with its global customers, the company implements its flexible manufacturing model to develop reliable, high-quality, low-cost-of-ownership systems that are easily integrated into customers' fab lines. Key products include wafer bonding, lithography/nanoimprint lithography (NIL) and metrology equipment, as well as photoresist coaters, cleaners and inspection systems.

In addition to its dominant share of the market for wafer bonders, EVG holds a leading position in NIL and lithography for advanced packaging and MEMS. Along these lines, the company co-founded the EMC- 3D consortium in 2006 to create and help drive implementation of a cost-effective through-silicon via (TSV) process for major ICs and MEMS/sensors. Other target semiconductor-related markets include silicon-on-insulator (SOI), compound semiconductor and silicon-based power-device solutions.

Founded in 1980, EVG is headquartered in St. Florian, Austria, and operates via a global customer support network, with subsidiaries in Tempe, Ariz.; Albany, N.Y.; Yokohama and Fukuoka, Japan; Seoul, Korea and Chung-Li, Taiwan. The company's unique Triple i-approach (invent - innovate - implement) is supported by a vertical integration, allowing EVG to respond quickly to new technology developments, apply the technology to manufacturing challenges and expedite device manufacturing in high volume. More information is available at www.EVGroup.com.

For more information, please click here

Copyright © EVGroup

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

New research project supports internationalisation in nano-research: Launch of new “Baltic Sea Network” November 22nd, 2014

3rd Iran-Proposed Nano Standard Approved by International Standard Organization November 22nd, 2014

NMTI announces breakthrough solutions for HAMR nanoantenna for next-generation ultra-high density magnetic storage November 21st, 2014

Canatu Launches CNB In-Mold Film for Transparent Touch on 3D Surfaces –in Cars, Household Appliances, Wearables, Portables November 20th, 2014

Academic/Education

SUNY Poly Student Awarded Fellowship with the U.S. Department of Energy's Postgraduate Research Program: Ph.D. Candidate Accepts Postmaster's Appointment To Conduct Research At Albany NanoTech Complex November 13th, 2014

SUNY Polytechnic Institute Hosts Massive Crowd of More Than 3,000 People Who Attended Community Day Activities Across New York State: CNSE’s ‘NANOvember’ kickoff event highlights New York State’s growing high-tech sector with open house events in Albany, Utica, and Rochester November 3rd, 2014

SUNY Polytechnic Institute Invites the Public to Attend its Popular Statewide 'NANOvember' Series of Outreach and Educational Events October 23rd, 2014

First Canada Excellence Research Chair gets $10 million from the federal government for oilsands research at the University of Calgary: Federal government announces prestigious research chair to study improving oil production efficiency October 19th, 2014

Chip Technology

Nanometrics Announces Upcoming Investor Events November 19th, 2014

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

Researchers create & control spin waves, lifting prospects for enhanced info processing November 17th, 2014

VDMA Electronics Production Equipment: Growth track for 2014 and 2015 confirmed: Business climate survey shows robust industry sector November 14th, 2014

Nanoelectronics

Leti Will Present 17 Papers at 2014 IEDM; the Highest-ever Total Includes Four Invited Papers: Institute also Will Present its Latest Results in Key Technologies and Its Roadmap for Silicon Nano-technologies at Workshop November 13th, 2014

Breakthrough in molecular electronics paves the way for DNA-based computer circuits in the future: DNA-based programmable circuits could be more sophisticated, cheaper and simpler to make October 27th, 2014

NIST offers electronics industry 2 ways to snoop on self-organizing molecules October 22nd, 2014

Materials for the next generation of electronics and photovoltaics: MacArthur Fellow develops new uses for carbon nanotubes October 21st, 2014

Announcements

New research project supports internationalisation in nano-research: Launch of new “Baltic Sea Network” November 22nd, 2014

3rd Iran-Proposed Nano Standard Approved by International Standard Organization November 22nd, 2014

NMTI announces breakthrough solutions for HAMR nanoantenna for next-generation ultra-high density magnetic storage November 21st, 2014

Nano Sorbents Able to Remove Pollutions Caused by Oil Derivatives November 20th, 2014

Tools

Leica Microsystems Presents Universal Hybrid Detector for Single Molecule Detection and Imaging at SfN and ASCB: Leica HyD SMD - the Optimal Detector for Precise and Reliable SMD data November 20th, 2014

Nanometrics Announces Upcoming Investor Events November 19th, 2014

Two sensors in one: Nanoparticles that enable both MRI and fluorescent imaging could monitor cancer, other diseases November 18th, 2014

Field-emission plug-and-play solution for microwave electron guns: To simplify the electron emission mechanism involved in microwave electron guns, a team of researchers has created and demonstrated a field-emission plug-and-play solution based on ultrananocrystalline diamond November 18th, 2014

New-Contracts/Sales/Customers

Tesla NanoCoatings Increasing Use of SouthWest NanoTechnologies Carbon Nanotubes (CNTs) for its Infrastructure Coatings and Paints: High Quality SMW™ Specialty Multi-wall Carbon Nanotubes Incorporated into Teslan®-brand coatings used by Transportation, Oil and Gas Companies November 19th, 2014

Artificial retina could someday help restore vision November 12th, 2014

Lomiko Signs Licensing Agreement to Produce and Supply Power Converter Systems to E-Commerce Customers October 29th, 2014

Haydale Secures Exclusive Development and Supply Agreement with Tantec A/S: New reactors to be built and commissioned by Tantec A/S represent another step forward towards the commercialisation of graphene October 24th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More












ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE