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Home > Press > Picosun introduces revolutionary sealed precursor cartridge

Picosun Oy, Finland-based global manufacturer of state-of-the-art Atomic Layer Deposition (ALD) systems today introduced a novel sealed precursor cartridge which will revolutionize precursor handling and lower the running costs of ALD systems significantly.

Picosun introduces revolutionary sealed precursor cartridge

Espoo, Finland | Posted on January 29th, 2010

The new sealed cartridge adds to the already incomparable qualities of Picosolid™ Booster. It also yet again underlines how unique the modular end expandable design of Picosun's SUNALE™ family of ALD systems is: This new feature fits seamlessly into the structures of any and all existing SUNALE™ reactors equipped with a Picosolid™ Booster.

"Our new sealed cartridge never needs to leave a glove box with its lid open, nor does it need to be opened when removed from the ALD apparatus", explains Juhana Kostamo, Managing Director of Picosun. "Exposure to oxygen and/or moisture can and does corrupt precursors. Our new cartridge does not only protect the precursor as such, but also ensures that the probability of corrupting the results of long test series through unnecessary exposure of a precursor chemical to the elements of air truly and finally becomes a thing of the past."

It is a well known fact that exposure to air can turn a precursor useless by changing its qualities so that it no longer vaporizes properly in the ALD process. Especially many of the new metal-organic precursors are worth a lot of money even in small quantities. Picosun's new sealed cartridge will guarantee that valuable precursors are wasted no more due to unintentional mishaps in cartridge handling.

Due to the novel cartridge and source construction precursors can be vaporized at minimum source temperature, which clearly extends useful lifetime of thermally sensitive chemicals.

Picosun has already before introduced the idea of small, easily changeable cartridges. This concept has been welcomed by all tired of endlessly cleaning precursor sources before changing chemicals from one to the other. Picosun's concept has also been a dream come true for scientists lining up to use their slots of the ALD tool time.

Without any problems, Picosun's new sealed cartridges with various chemicals can all be stored on a shelf in a glove box with no risk of contamination neither to any of the chemicals nor to the glove box itself.

First Picosun customers have already received their sealed cartridges.


About Picosun Oy
Picosun develops and manufactures Atomic Layer Deposition (ALD) reactors for micro- and nanotechnology applications. Picosun represents continuity to over three decades of ALD reactor manufacturing in Finland. Picosun is based in Espoo, Finland and has its US headquarters in Detroit, Michigan. SUNALE™ ALD process tools are installed in various universities, research institutes and companies across Europe, USA and Asia.

Dr Tuomo Suntola, inventor of ALD technology, is Member of the Board of Directors of Picosun. World’s most experienced ALD reactor designer Sven Lindfors is Picosun´s Chief Technology Officer and founder of the company. Picosun Oy is a part of Stephen Industries.

For more information, please click here

Mr. Juhana Kostamo
Phone: +358 50 321 1955
Fax: +358 20 722 7012

Copyright © Picosun Oy

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