Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > SEMATECH and Shin-Etsu Chemical Company Partner at the UAlbany NanoCollege to Develop Resist Materials for 22 nm Patterning Technologies and Beyond

Abstract:
Collaboration will demonstrate new EUV materials at Resist Materials and Development Center at CNSE's Albany NanoTech

SEMATECH and Shin-Etsu Chemical Company Partner at the UAlbany NanoCollege to Develop Resist Materials for 22 nm Patterning Technologies and Beyond

Albany, NY | Posted on August 31st, 2009

SEMATECH, a global consortium of chipmakers, and Shin-Etsu Chemical Co., Ltd., one of the world's largest suppliers of semiconductor materials, announced today that Shin-Etsu has joined SEMATECH's Resist Materials and Development Center (RMDC) at the College of Nanoscale Science and Engineering's (CNSE) Albany NanoTech Complex.

As a Resist member of SEMATECH's lithography program, Shin-Etsu will team with researchers at SEMATECH to develop and demonstrate advanced EUV photoresist for use at the 22 nm node and beyond.

"Partnering with resist suppliers such as Shin-Etsu will accelerate our progress in tackling key challenges - such as resolution, line-width roughness, and pattern collapse - in the critical area of advanced imaging," said Bryan Rice, director of Lithography at SEMATECH. "We are pleased to welcome Shin-Etsu to SEMATECH's RMDC, where it will partner with dozens of researchers representing universities and companies from around the world united in advancing resist process development."

"The cutting-edge research and development that is necessary for the commercialization of EUVL technology will be further enhanced by the addition of Shin-Etsu," said Richard Brilla, CNSE Vice President for Strategy, Alliances and Consortia. "This new partnership will build on the world-class capabilities at the UAlbany NanoCollege in support of the advanced technology needs of our global corporate partners and the nanoelectronics industry."

The collaboration will be based on SEMATECH's extensive network of hardware and research expertise, semiconductor experience, and highly respected market leadership and on Shin-Etsu's proven, industry-leading semiconductor specialty materials. SEMATECH's RMDC will provide access to two micro-exposure tools (METs) located at the University at Albany's College of Nanoscale Science and Engineering and University of California at Berkeley, as well as several metrology tools.

For several years SEMATECH has maintained a world-class exposure capability for materials development. The RMDC brings together leading resist and materials suppliers and a large portfolio of resist research projects employing academic and industry researchers from around the world. Together, the RMDC provides the hardware and research expertise to develop EUV resist processes meeting the stringent resolution, line-width roughness, and sensitivity specifications needed for continued progress in manufacturing.

####

About SEMATECH
For over 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

About Shin-Etsu:
Shin-Etsu Chemical Co., Ltd., the Tokyo based chemical company, is the world’s largest supplier of semiconductor materials, semiconductor silicon, PVC resin, synthetic quartz glass and methylcellulose and is a major producer of materials including silicones and rare earth magnet. The company’s home page on the World Wide Web is located at www.shinetsu.co.jp.

About CNSE:

The UAlbany CNSE is the first college in the world dedicated to education, research, development, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. CNSE’s Albany NanoTech Complex is the most advanced research enterprise of its kind at any university in the world. With over $5 billion in high-tech investments, the 800,000-square-foot complex attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 80,000 square feet of Class 1 capable cleanrooms. More than 2,500 scientists, researchers, engineers, students, and faculty work on site at CNSE’s Albany NanoTech, from companies including IBM, AMD, GlobalFoundries, SEMATECH, Toshiba, Applied Materials, Tokyo Electron, ASML, Novellus Systems, Vistec Lithography and Atotech. For more information, visit www.cnse.albany.edu.

For more information, please click here

Contacts:
Erica McGill
SEMATECH | Media Relations
o: 518-649-1041 | m: 518-487-8256

Copyright © SEMATECH

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Dolomite to launch Meros TCU-100 temperature controller at Lab-on-a-Chip & Microarray World Congress September 15th, 2014

Fonon at Cutting-Edge of 3D Military Printing: Live-Combat Scenarios Could See a Decisive Advantage with 3D Printing September 15th, 2014

Rice rolls 'neat' nanotube fibers: Rice University researchers' acid-free approach leads to strong conductive carbon threads September 15th, 2014

Simple, Cost-Effective Method Proposed for Synthesizing Zinc Oxide Nanopigments September 15th, 2014

Chip Technology

UT Arlington research uses nanotechnology to help cool electrons with no external sources September 11th, 2014

Excitonic Dark States Shed Light on TMDC Atomic Layers: Berkeley Lab Discovery Holds Promise for Nanoelectronic and Photonic Applications September 11th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

Development of Algorithm for Accurate Calculation of Average Distance Travelled by Low-Speed Electrons without Energy Loss that Are Sensitive to Surface Structure September 11th, 2014

Announcements

Dolomite to launch Meros TCU-100 temperature controller at Lab-on-a-Chip & Microarray World Congress September 15th, 2014

Fonon at Cutting-Edge of 3D Military Printing: Live-Combat Scenarios Could See a Decisive Advantage with 3D Printing September 15th, 2014

Rice rolls 'neat' nanotube fibers: Rice University researchers' acid-free approach leads to strong conductive carbon threads September 15th, 2014

Simple, Cost-Effective Method Proposed for Synthesizing Zinc Oxide Nanopigments September 15th, 2014

Alliances/Partnerships/Distributorships

NEI Corporation and PneumatiCoat Technologies Sign Agreement to Jointly Develop and Market New Materials for Lithium-ion Batteries September 12th, 2014

Handheld scanner could make brain tumor removal more complete, reducing recurrence September 3rd, 2014

Leading European communications companies and research organizations have launched an EU project developing the future 5th Generation cellular mobile networks August 28th, 2014

JPK expands availability of instrumentation in the USA – appointing new distributors – launched a new web site to support the US market - AFM now available to US users August 26th, 2014

Research partnerships

Elusive Quantum Transformations Found Near Absolute Zero: Brookhaven Lab and Stony Brook University researchers measured the quantum fluctuations behind a novel magnetic material's ultra-cold ferromagnetic phase transition September 15th, 2014

NEI Corporation and PneumatiCoat Technologies Sign Agreement to Jointly Develop and Market New Materials for Lithium-ion Batteries September 12th, 2014

Advanced Light Source Sets Microscopy Record| Berkeley Lab Researchers Achieve Highest Resolution Ever with X-ray Microscopy September 11th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE