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Home > News > Modeling extreme nanoscale devices

June 9th, 2009

Modeling extreme nanoscale devices

Abstract:
Far from reaching its limits, micro-electromechanical systems (MEMS) technology has proved itself in applications ranging from car acceleration and pressure sensors to space-telescope shutters. MEMS devices, as well as nano-electromechanical system (NEMS) applications, currently approach nanometer scales, thus promising even greater versatility, including hybrid terahertz electronics, low-power memories, and sensors with record sensitivity. While NEMS devices have much potential, their engineering is entering a new territory full of surprises and paradoxes. Among the latter are van der Waals/Casimir (vdW/C) forces, quantum effects in the charge distribution (including but not limited to quantum capacitance, Coulomb blockade, and charge tunneling), and the breakdown of bulk elasticity theory.

Source:
spie.org

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