Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Proximity Effect Correction software seamlessly integrates with Nanometer Pattern Generation Systems

SEM micrograph of 20nm lines, 50nm pitch that highlights very stable and dense HSQ structure using the optimal doses provided by the NanoMaker software.  HSQ resist thickness is 180nm.
SEM micrograph of 20nm lines, 50nm pitch that highlights very stable and dense HSQ structure using the optimal doses provided by the NanoMaker software. HSQ resist thickness is 180nm.

Abstract:
The NanoMaker Workbench software automatically generates a Proximity Effect Corrected runfile, compatible with NPGS systems, for SEM-based electron beam lithography.

Proximity Effect Correction software seamlessly integrates with Nanometer Pattern Generation Systems

North Billerica, MA | Posted on May 20th, 2009

The newly designed NanoMaker software has been successfully demonstrated at the Nanoscale Integration Laboratory, University of Texas at Dallas. The hardware platform included a Zeiss Supra 40 Field Emission Scanning Electron Microscope (SEM) with a NPGS 9.2 pattern generator.

The experiment consisted of fabricating 20nm and 25nm lines with 50nm and 100nm pitched arrays, respectively, separated by a large solid rectangle in the middle. The HSQ resist thickness on Si was 180nm. Before using the NanoMaker Proximity Effect Correction (PEC) software, many different doses were tried to fabricate the structure correctly without success. Upon using the NanoMaker PEC software, the optimal doses were automatically assigned, the data exported to the NPGS, and the device was successfully fabricated.

"Usually, it is difficult to fabricate dense nanolines with higher aspect ratios because of the proximity effect," states Professor Walter Hu, of the Nanoscale Integration Lab at UTD, "The preliminary NanoMaker results that show its ability to get down to uniform 20nm lines in width with 50nm pitch is remarkable."

Scanning Electron Microscopes are typically limited in acceleration voltage to 30kV. This is where proximity effects are dominant. For organizations that need to create dense nano-patterns with a SEM, the NanoMaker design and PEC software package adds tremendous value to existing NPGS systems.

Your browser may not support display of this image."We are grateful to Professor Walter Hu and his team for allowing us the opportunity to prove the power of the NanoMaker software," states Dr. Sergey Zaitsev, CTO of NanoMaker and Head of the Theoretical Department at the Institute of Microelectronics Technology - Russian Academy of Sciences (IMT RAS), "We look forward to a continued partnership with UTD and other research institutes interested in electron/ion beam fabrication of nanodevices and structures using the NanoMaker system."

####

About SEMTech Solutions, Inc.
NanoMaker is a powerful software/hardware system for SEM/FIB based lithography that is intended for state-of-the-art design and manufacturing of micro and nano electronic devices and structures. For more information on the NanoMaker software/hardware system, visit www.nanomaker.com, or contact our North American representative directly at SEMTech Solutions, (978) 663-9822, www.semtechsolutions.com.

About the Nanoscale Integration Laboratory at UTD:

The Nanoscale Integration Laboratory is focused on integrating nanoscale elements of electronics, chemistry, and biology. Such nano-bio-engineering fusion may provide rare opportunities to explore new science and applications. For more information visit the Nanoscale Integration Laboratory website at the University of Texas at Dallas.

For more information, please click here

Contacts:
Gary Brake, Marketing Manager
SEMTech Solutions, Inc.
(978) 663-9822 x235

Copyright © NanoMaker

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Simple attraction: Researchers control protein release from nanoparticles without encapsulation: U of T Engineering discovery stands to improve reliability and fabrication process for treatments to conditions such as spinal cord damage and stroke May 28th, 2016

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Doubling down on Schrödinger's cat May 27th, 2016

Deep Space Industries and SFL selected to provide satellites for HawkEye 360’s Pathfinder mission: The privately-funded space-based global wireless signal monitoring system will be developed by Deep Space Industries and UTIAS Space Flight Laboratory May 26th, 2016

Software

Los Alamos National Laboratory Expands Scope to Locus Technologies SaaS Contract: Los Alamos National Laboratory Adds Two New Applications to Locus SaaS Platform May 7th, 2016

The intermediates in a chemical reaction photographed 'red-handed' Researchers at the UPV/EHU-University of the Basque Country have for the first time succeeded in imaging all the steps in a complex organic reaction and have resolved the mechanisms that explain it May 4th, 2016

University of Illinois researchers create 1-step graphene patterning method April 27th, 2016

The reliability of material simulations put to test April 26th, 2016

Chip Technology

Gigantic ultrafast spin currents: Scientists from TU Wien (Vienna) are proposing a new method for creating extremely strong spin currents. They are essential for spintronics, a technology that could replace today's electronics May 25th, 2016

Diamonds closer to becoming ideal semiconductors: Researchers find new method for doping single crystals of diamond May 25th, 2016

Dartmouth team creates new method to control quantum systems May 24th, 2016

Attosecond physics: A switch for light-wave electronics May 24th, 2016

Announcements

Simple attraction: Researchers control protein release from nanoparticles without encapsulation: U of T Engineering discovery stands to improve reliability and fabrication process for treatments to conditions such as spinal cord damage and stroke May 28th, 2016

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Doubling down on Schrödinger's cat May 27th, 2016

Deep Space Industries and SFL selected to provide satellites for HawkEye 360’s Pathfinder mission: The privately-funded space-based global wireless signal monitoring system will be developed by Deep Space Industries and UTIAS Space Flight Laboratory May 26th, 2016

Tools

Scientists illuminate a hidden regulator in gene transcription: New super-resolution technique visualizes important role of short-lived enzyme clusters May 27th, 2016

Light can 'heal' defects in new solar cell materials: Defects in some new electronic materials can be removed by making ions move under illumination May 24th, 2016

More light on cancer: Scientists created nanoparticles to highlight cancer cells May 21st, 2016

Nanotubes are beacons in cancer-imaging technique: Rice University researchers use spectral triangulation to pinpoint location of tumors May 21st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic