Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > IMEC builds reliable 11 megapixel micro-mirror array for high-end industrial applications

Top view of individual mirrors and hinges
Top view of individual mirrors and hinges

Abstract:
At today's IEEE International Electron Devices Meeting, IMEC presents a monolithically integrated 11 megapixel micro-mirror array for high-end industrial applications, a world's first both in terms of pixel density and reliability. Each mirror in the array is 8μm x 8μm and can be individually tilted by the high-speed integrated CMOS circuitry underneath the array. This device fits in IMEC's CMORE initiative, which offers cost-effective solutions for continued system scaling, not by shrinking CMOS but by focusing on monolithic co-integration of heterogeneous technology.

IMEC builds reliable 11 megapixel micro-mirror array for high-end industrial applications

San Francisco, CA | Posted on December 16th, 2008

IMEC's 10cm² 11 megapixel mirror array has a pixel density that is almost double that of comparable state-of-the-art micro-mirrors. And IMEC has demonstrated that its mirrors show no creep and meet a 1012 cycles mechanical lifetime. Integrated micro-mirror arrays such as this one, are used in, for example, video projection or lithography mask writers.

IMEC fabricated the 8µm mirrors on top of foundry high-voltage 0.18µm CMOS 200mm wafers with 6 interconnect levels. The array was built using IMEC's proprietary SiGe-based MEMS platform, meeting the mirror's mechanical reliability requirements, device flatness, and compatibility with high-speed CMOS. Poly-SiGe was chosen as structural material for the mirrors, instead of Al. Poly-SiGe solves many of the reliability issues of Al-based mirrors, and it is compatible with above CMOS processing, allowing a smooth integration with the CMOS chip below.

IMEC's CMORE initiative offers cost-effective solutions for monolithic co-integration of heterogeneous technologies. The services offered range from development-on-demand, over prototyping, to low-volume production. These services profit from the expertise in many research areas available at IMEC. The CMORE solutions are implemented in IMEC's 200mm fab with advanced packaging capabilities, such as 3D integration. The two process platforms involved are a 0.13µm CMOS process and a versatile SiGe above-IC MEMS process. On customer demand, the CMORE solution can be migrated to IMEC's 300mm fab.

####

About IMEC
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, offices in the US, China and Taiwan, and representatives in Japan. Its staff of more than 1650 people includes more than 500 industrial residents and guest researchers. In 2007, its revenue (P&L) was EUR 244.5 million.

IMEC’s More Moore research aims at semiconductor scaling towards sub-32nm nodes. With its More than Moore research, IMEC looks into technologies for nomadic embedded systems, wireless autonomous transducer solutions, biomedical electronics, photovoltaics, organic electronics and GaN power electronics.

IMEC’s research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network worldwide position IMEC as a key partner for shaping technologies for future systems.

For more information, please click here

Contacts:
Jan Provoost
IMEC External Communications
T: +32 16 28 14 34

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Scientific breakthrough in rechargeable batteries: Researchers from Singapore and Québec Team Up to Develop Next-Generation Materials to Power Electronic Devices and Electric Vehicles February 28th, 2015

First detailed microscopy evidence of bacteria at the lower size limit of life: Berkeley Lab research provides comprehensive description of ultra-small bacteria February 28th, 2015

Leti to Offer Updates on Silicon Photonics Successes at OFC in LA February 27th, 2015

Moving molecule writes letters: Caging of molecules allows investigation of equilibrium thermodynamics February 27th, 2015

Chip Technology

New nanowire structure absorbs light efficiently: Dual-type nanowire arrays can be used in applications such as LEDs and solar cells February 25th, 2015

SUNY Poly CNSE Researchers and Corporate Partners to Present Forty Papers at Globally Recognized Lithography Conference: SUNY Poly CNSE Research Group Awarded Both ‘Best Research Paper’ and ‘Best Research Poster’ at SPIE Advanced Lithography 2015 forum February 25th, 2015

Ultra-thin nanowires can trap electron 'twisters' that disrupt superconductors February 24th, 2015

Silicon Catalyst Announces Partnership With imec to Support Semiconductor Start-Ups February 23rd, 2015

Announcements

Scientific breakthrough in rechargeable batteries: Researchers from Singapore and Québec Team Up to Develop Next-Generation Materials to Power Electronic Devices and Electric Vehicles February 28th, 2015

First detailed microscopy evidence of bacteria at the lower size limit of life: Berkeley Lab research provides comprehensive description of ultra-small bacteria February 28th, 2015

Leti to Offer Updates on Silicon Photonics Successes at OFC in LA February 27th, 2015

Moving molecule writes letters: Caging of molecules allows investigation of equilibrium thermodynamics February 27th, 2015

Tools

Hiden CATLAB Microreactor System at ARABLAB 2015 | Visit us on Booth 1011 February 26th, 2015

Renishaw and Bruker team up for a workshop on TERS and co-localised AFM Raman February 26th, 2015

Maximum Precision in 3D Printing: New complete solution makes additive manufacturing standard for microfabrication February 26th, 2015

Real-time observation of bond formation by using femtosecond X-ray liquidography February 26th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE