Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > IMEC builds reliable 11 megapixel micro-mirror array for high-end industrial applications

Top view of individual mirrors and hinges
Top view of individual mirrors and hinges

Abstract:
At today's IEEE International Electron Devices Meeting, IMEC presents a monolithically integrated 11 megapixel micro-mirror array for high-end industrial applications, a world's first both in terms of pixel density and reliability. Each mirror in the array is 8μm x 8μm and can be individually tilted by the high-speed integrated CMOS circuitry underneath the array. This device fits in IMEC's CMORE initiative, which offers cost-effective solutions for continued system scaling, not by shrinking CMOS but by focusing on monolithic co-integration of heterogeneous technology.

IMEC builds reliable 11 megapixel micro-mirror array for high-end industrial applications

San Francisco, CA | Posted on December 16th, 2008

IMEC's 10cm˛ 11 megapixel mirror array has a pixel density that is almost double that of comparable state-of-the-art micro-mirrors. And IMEC has demonstrated that its mirrors show no creep and meet a 1012 cycles mechanical lifetime. Integrated micro-mirror arrays such as this one, are used in, for example, video projection or lithography mask writers.

IMEC fabricated the 8µm mirrors on top of foundry high-voltage 0.18µm CMOS 200mm wafers with 6 interconnect levels. The array was built using IMEC's proprietary SiGe-based MEMS platform, meeting the mirror's mechanical reliability requirements, device flatness, and compatibility with high-speed CMOS. Poly-SiGe was chosen as structural material for the mirrors, instead of Al. Poly-SiGe solves many of the reliability issues of Al-based mirrors, and it is compatible with above CMOS processing, allowing a smooth integration with the CMOS chip below.

IMEC's CMORE initiative offers cost-effective solutions for monolithic co-integration of heterogeneous technologies. The services offered range from development-on-demand, over prototyping, to low-volume production. These services profit from the expertise in many research areas available at IMEC. The CMORE solutions are implemented in IMEC's 200mm fab with advanced packaging capabilities, such as 3D integration. The two process platforms involved are a 0.13µm CMOS process and a versatile SiGe above-IC MEMS process. On customer demand, the CMORE solution can be migrated to IMEC's 300mm fab.

####

About IMEC
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, offices in the US, China and Taiwan, and representatives in Japan. Its staff of more than 1650 people includes more than 500 industrial residents and guest researchers. In 2007, its revenue (P&L) was EUR 244.5 million.

IMEC’s More Moore research aims at semiconductor scaling towards sub-32nm nodes. With its More than Moore research, IMEC looks into technologies for nomadic embedded systems, wireless autonomous transducer solutions, biomedical electronics, photovoltaics, organic electronics and GaN power electronics.

IMEC’s research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network worldwide position IMEC as a key partner for shaping technologies for future systems.

For more information, please click here

Contacts:
Jan Provoost
IMEC External Communications
T: +32 16 28 14 34

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Nanotubes help healing hearts keep the beat: Rice University, Texas Children’s Hospital patch for defects enhances electrical connections between cells September 23rd, 2014

Immune system is key ally in cyberwar against cancer: Rice University study yields new two-step strategy for weakening cancer September 23rd, 2014

Los Alamos Researchers Uncover New Properties in Nanocomposite Oxide Ceramics for Reactor Fuel, Fast-Ion Conductors: Misfit dislocations are key to transport properties across material interfaces September 23rd, 2014

Chip Technology

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Twisted graphene chills out: When two sheets of graphene are stacked in a special way, it is possible to cool down the graphene with a laser instead of heating it up, University of Manchester researchers have shown September 22nd, 2014

SouthWest NanoTechnologies (SWeNT) Receives NIST Small Business Innovation Research (SBIR) Phase 1 Award to Produce Greater than 99% Semiconducting Single-Wall Carbon Nanotubes September 19th, 2014

Toward optical chips: A promising light source for optoelectronic chips can be tuned to different frequencies September 19th, 2014

Announcements

Future flexible electronics based on carbon nanotubes: Study in Applied Physics Letters show how to improve nanotube transistor and circuit performance with fluoropolymers September 23rd, 2014

Nanotubes help healing hearts keep the beat: Rice University, Texas Children’s Hospital patch for defects enhances electrical connections between cells September 23rd, 2014

Immune system is key ally in cyberwar against cancer: Rice University study yields new two-step strategy for weakening cancer September 23rd, 2014

Los Alamos Researchers Uncover New Properties in Nanocomposite Oxide Ceramics for Reactor Fuel, Fast-Ion Conductors: Misfit dislocations are key to transport properties across material interfaces September 23rd, 2014

Tools

IEEE International Electron Devices Meeting To Celebrate 60th Anniversary as The Leading Technical Conference for Advanced Semiconductor Devices September 18th, 2014

FEI Opens New Technology Center in Czech Republic: FEI expands its presence in Brno with the opening of a new, larger facility September 18th, 2014

New NPZ100-403 Piezo Stage from nPoint Inc. September 17th, 2014

Researchers Create World’s Largest DNA Origami September 11th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE