Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Tokyo Electron (TEL) Introduces a New 300mm Plasma Treatment Reactor, TriasŪ SPAi

Abstract:
Tokyo Electron (TEL) (TOKYO:8035) today announced that the company will begin receiving orders for the TriasŪ SPAi beginning January, 2009. The new chamber is a 300mm single-wafer tool for oxidation or nitridation.

Tokyo Electron (TEL) Introduces a New 300mm Plasma Treatment Reactor, TriasŪ SPAi

Tokyo, Japan | Posted on December 1st, 2008

TEL developed the TriasŪ SPAi to reduce greenhouse gas emissions and improve COO through a smaller footprint and higher throughput. It is based on TEL's popular TriasŪ SPA, a low temperature plasma nitridation/oxidation process module installed at major DRAM, Flash and Logic customers worldwide. The TriasŪ SPA creates a high-density, low-electron temperature plasma enabling damage-free processing in advanced radical oxidation and nitridation applications.

Takeshi Okubo, General Manager for TEL's Single Wafer Deposition Business Unit, said, "The Trias SPAi demonstrates TEL's commitment to delivering greener technology. We have worked diligently to reduce the tool's electrical power consumption and CO2 emissions. Our design team has also reduced its footprint, thus reducing the environmental impact at our customer's site. We were able to make these environmentally-conscious advances while still improving the tool's overall productivity."

The tool will be used in a variety of applications, such as oxidation, nitridation, post treatment and refinement in the FEOL (Front end of Line) area.

*Trias is a trademark of Tokyo Electron Limited in Japan and/or other countries

####

About Tokyo Electron Limited
Tokyo Electron Ltd., established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange.

For more information, please click here

Contacts:
Tokyo Electron Ltd.
Michelle Pesez
512-424-1757

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Stanford team achieves 'holy grail' of battery design: A stable lithium anode - Engineers use carbon nanospheres to protect lithium from the reactive and expansive problems that have restricted its use as an anode July 27th, 2014

Iranian Scientists Produce Reusable Nanoadsorbent to Detect Sulfamide in Chicken July 27th, 2014

Breakthrough laser experiment reveals liquid-like motion of atoms in an ultra-cold cluster: University of Leicester research team unlocks insights into creation of new nano-materials July 25th, 2014

Scientists Test Nanoparticle "Alarm Clock" to Awaken Immune Systems Put to Sleep by Cancer July 25th, 2014

Chip Technology

A*STAR and industry form S$200M semiconductor R&D July 25th, 2014

A Crystal Wedding in the Nanocosmos July 23rd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

Penn Study: Understanding Graphene’s Electrical Properties on an Atomic Level July 22nd, 2014

Announcements

Stanford team achieves 'holy grail' of battery design: A stable lithium anode - Engineers use carbon nanospheres to protect lithium from the reactive and expansive problems that have restricted its use as an anode July 27th, 2014

Iranian Scientists Produce Reusable Nanoadsorbent to Detect Sulfamide in Chicken July 27th, 2014

Breakthrough laser experiment reveals liquid-like motion of atoms in an ultra-cold cluster: University of Leicester research team unlocks insights into creation of new nano-materials July 25th, 2014

Scientists Test Nanoparticle "Alarm Clock" to Awaken Immune Systems Put to Sleep by Cancer July 25th, 2014

Tools

Malvern Instruments completes acquisition of MicroCal and announces purchase of Archimedes product from Affinity Biosensors July 25th, 2014

Hysitron is Awarded TWO R&D 100 Awards for Highly Innovative Technology Developments in the Areas of Extreme Environments and Biological Mechanical Property Testing July 23rd, 2014

The Hiden EQP Plasma Diagnostic with on-board MCA July 22nd, 2014

Nanometrics Announces Upcoming Investor Events July 22nd, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE