Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tokyo Electron (TEL) Announces New 300mm Scrubber Cleaning Tool, NS300+

Abstract:
Tokyo Electron Limited (TEL) (TOKYO:8035) today announced that the company has begun accepting orders for the NS300+, TEL's new 300mm scrubber cleaning tool. Following the success of the NS300, the new system delivers higher productivity and improved process performance with bevel cleaning capability demonstrating TEL's ongoing commitment to the continuous development of surface preparation technology.

Tokyo Electron (TEL) Announces New 300mm Scrubber Cleaning Tool, NS300+

Tokyo, Japan | Posted on December 1st, 2008

With the capability of both frontside and backside cleaning, the NS300+ doubles the throughput with an 8-chamber tool, while maintaining a footprint that is comparable to the previous 4-chamber model. Employing TEL's market-leading coater/developer LITHIUS Pro™ technology, the NS300+ offers a highly reliable wafer processing platform. TEL's competitive offering provides low cost of ownership with high throughput, 42% less water consumption and a 51% reduction in electricity usage.

The NS300+ enables higher process yields with new technology designed to remove defects from the front side, back side and bevel of the wafer. With continued scaling of device geometries, bevel defects are increasingly identified as yield limiters when they are displaced from the bevel to the active area of the wafer. To address this issue, the proven atomized spray and brush technology from the previous system has been enhanced with a mechanical brush and chemical-assisted bevel cleaning.

"The introduction of the NS300+ addresses our customers' needs for yield improvement through defectivity control and CoO. The high productivity platform is doubling throughput and introducing TEL cleaning technology to the bevel area of the wafer," said Masaaki Hata, vice president and general manager, TEL SPS BU.

####

About Tokyo Electron Limited
Tokyo Electron Ltd, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange.

For more information, please click here

Contacts:
Tokyo Electron Limited
Michelle Pesez
512-424-1757

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

No need in supercomputers: Russian scientists suggest a PC to solve complex problems tens of times faster than with massive supercomputers June 30th, 2016

Surprising qualities of insulator ring surfaces: Surface phenomena in ring-shaped topological insulators are just as controllable as those in spheres made of the same material June 30th, 2016

How cancer cells spread and squeeze through tiny blood vessels (video) June 30th, 2016

Oxford Instruments and Dresden High Magnetic Field Laboratory collaborate to develop HTS magnet technology components for high field superconducting magnet systems June 29th, 2016

Chip Technology

Surprising qualities of insulator ring surfaces: Surface phenomena in ring-shaped topological insulators are just as controllable as those in spheres made of the same material June 30th, 2016

How cancer cells spread and squeeze through tiny blood vessels (video) June 30th, 2016

New, better way to build circuits for world's first useful quantum computers June 28th, 2016

Soft decoupling of organic molecules on metal June 23rd, 2016

Announcements

No need in supercomputers: Russian scientists suggest a PC to solve complex problems tens of times faster than with massive supercomputers June 30th, 2016

Surprising qualities of insulator ring surfaces: Surface phenomena in ring-shaped topological insulators are just as controllable as those in spheres made of the same material June 30th, 2016

How cancer cells spread and squeeze through tiny blood vessels (video) June 30th, 2016

Oxford Instruments and Dresden High Magnetic Field Laboratory collaborate to develop HTS magnet technology components for high field superconducting magnet systems June 29th, 2016

Tools

How cancer cells spread and squeeze through tiny blood vessels (video) June 30th, 2016

Oxford Instruments and Dresden High Magnetic Field Laboratory collaborate to develop HTS magnet technology components for high field superconducting magnet systems June 29th, 2016

Texas A&M Chemist Says Trapped Electrons To Blame For Lack Of Battery Efficiency: Forget mousetraps — today’s scientists will get the cheese if they manage to build a better battery June 28th, 2016

FEI Launches Helios G4 DualBeam Series for Materials Science: The Helios G4 DualBeam Series features new capabilities to enable scientists and engineers to answer the most demanding and challenging scientific questions June 27th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic