Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Tokyo Electron (TEL) Announces New 300mm Scrubber Cleaning Tool, NS300+

Abstract:
Tokyo Electron Limited (TEL) (TOKYO:8035) today announced that the company has begun accepting orders for the NS300+, TEL's new 300mm scrubber cleaning tool. Following the success of the NS300, the new system delivers higher productivity and improved process performance with bevel cleaning capability demonstrating TEL's ongoing commitment to the continuous development of surface preparation technology.

Tokyo Electron (TEL) Announces New 300mm Scrubber Cleaning Tool, NS300+

Tokyo, Japan | Posted on December 1st, 2008

With the capability of both frontside and backside cleaning, the NS300+ doubles the throughput with an 8-chamber tool, while maintaining a footprint that is comparable to the previous 4-chamber model. Employing TEL's market-leading coater/developer LITHIUS Pro™ technology, the NS300+ offers a highly reliable wafer processing platform. TEL's competitive offering provides low cost of ownership with high throughput, 42% less water consumption and a 51% reduction in electricity usage.

The NS300+ enables higher process yields with new technology designed to remove defects from the front side, back side and bevel of the wafer. With continued scaling of device geometries, bevel defects are increasingly identified as yield limiters when they are displaced from the bevel to the active area of the wafer. To address this issue, the proven atomized spray and brush technology from the previous system has been enhanced with a mechanical brush and chemical-assisted bevel cleaning.

"The introduction of the NS300+ addresses our customers' needs for yield improvement through defectivity control and CoO. The high productivity platform is doubling throughput and introducing TEL cleaning technology to the bevel area of the wafer," said Masaaki Hata, vice president and general manager, TEL SPS BU.

####

About Tokyo Electron Limited
Tokyo Electron Ltd, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange.

For more information, please click here

Contacts:
Tokyo Electron Limited
Michelle Pesez
512-424-1757

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Instant-start computers possible with new breakthrough December 19th, 2014

Aculon Hires New Business Development Director December 19th, 2014

Chip Technology

Instant-start computers possible with new breakthrough December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

Pb islands in a sea of graphene magnetise the material of the future December 16th, 2014

Stanford team combines logic, memory to build a 'high-rise' chip: Today circuit cards are laid out like single-story towns; Futuristic architecture builds layers of logic and memory into skyscraper chips that would be smaller, faster, cheaper -- and taller December 15th, 2014

Announcements

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Instant-start computers possible with new breakthrough December 19th, 2014

Aculon Hires New Business Development Director December 19th, 2014

Tools

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

ORNL microscopy pencils patterns in polymers at the nanoscale December 17th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE