Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Tokyo Electron (TEL) Announces New 300mm Scrubber Cleaning Tool, NS300+

Abstract:
Tokyo Electron Limited (TEL) (TOKYO:8035) today announced that the company has begun accepting orders for the NS300+, TEL's new 300mm scrubber cleaning tool. Following the success of the NS300, the new system delivers higher productivity and improved process performance with bevel cleaning capability demonstrating TEL's ongoing commitment to the continuous development of surface preparation technology.

Tokyo Electron (TEL) Announces New 300mm Scrubber Cleaning Tool, NS300+

Tokyo, Japan | Posted on December 1st, 2008

With the capability of both frontside and backside cleaning, the NS300+ doubles the throughput with an 8-chamber tool, while maintaining a footprint that is comparable to the previous 4-chamber model. Employing TEL's market-leading coater/developer LITHIUS Pro™ technology, the NS300+ offers a highly reliable wafer processing platform. TEL's competitive offering provides low cost of ownership with high throughput, 42% less water consumption and a 51% reduction in electricity usage.

The NS300+ enables higher process yields with new technology designed to remove defects from the front side, back side and bevel of the wafer. With continued scaling of device geometries, bevel defects are increasingly identified as yield limiters when they are displaced from the bevel to the active area of the wafer. To address this issue, the proven atomized spray and brush technology from the previous system has been enhanced with a mechanical brush and chemical-assisted bevel cleaning.

"The introduction of the NS300+ addresses our customers' needs for yield improvement through defectivity control and CoO. The high productivity platform is doubling throughput and introducing TEL cleaning technology to the bevel area of the wafer," said Masaaki Hata, vice president and general manager, TEL SPS BU.

####

About Tokyo Electron Limited
Tokyo Electron Ltd, established in 1963, is a leading supplier of innovative semiconductor and FPD production equipment worldwide. In Japan, TEL also distributes computer network related products and electronic components of global leading suppliers. To support this diverse product base, TEL is strategically located around the world. TEL is a publicly held company listed on the Tokyo Stock Exchange.

For more information, please click here

Contacts:
Tokyo Electron Limited
Michelle Pesez
512-424-1757

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Quantum twisted Loong confirms the physical reality of wavefunctions September 23rd, 2017

Application of air-sensitive semiconductors in nanoelectronics: 2-D semiconductor gallium selenide in encapsulated nanoelectronic devices September 22nd, 2017

Researchers set time limit for ultrafast perovskite solar cells September 22nd, 2017

DNA triggers shape-shifting in hydrogels, opening a new way to make 'soft robots' September 21st, 2017

Chip Technology

Application of air-sensitive semiconductors in nanoelectronics: 2-D semiconductor gallium selenide in encapsulated nanoelectronic devices September 22nd, 2017

Physicists develop new recipes for design of fast single-photon gun Physicists develop high-speed single-photon sources for quantum computers of the future September 21st, 2017

GLOBALFOUNDRIES Delivers 8SW RF SOI Technology for Next-Generation Mobile and 5G Applications: Advanced 8SW 300mm SOI technology enables cost-effective, high-performance RF front-end modules for 4G LTE mobile and sub-6GHz 5G applications September 20th, 2017

GLOBALFOUNDRIES Unveils Vision and Roadmap for Next-Generation 5G Applications: Technology platforms are uniquely positioned to enable a new era of ‘connected intelligence’ with the transition to 5G September 20th, 2017

Announcements

Quantum twisted Loong confirms the physical reality of wavefunctions September 23rd, 2017

Application of air-sensitive semiconductors in nanoelectronics: 2-D semiconductor gallium selenide in encapsulated nanoelectronic devices September 22nd, 2017

Researchers set time limit for ultrafast perovskite solar cells September 22nd, 2017

DNA triggers shape-shifting in hydrogels, opening a new way to make 'soft robots' September 21st, 2017

Tools

Graphene based terahertz absorbers: Printable graphene inks enable ultrafast lasers in the terahertz range September 13th, 2017

Chemical hot spots: Scanning tunneling microscopy measurements identify active sites on catalyst surfaces September 7th, 2017

Phenom-World selects Deben to supply a tensile stage as an accessory to their range of desktop SEMs August 29th, 2017

New results reveal high tunability of 2-D material: Berkeley Lab-led team also provides most precise band gap measurement yet for hotly studied monolayer moly sulfide August 26th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project