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Home > Press > Vistec GaAs litho tool finds new applications in Toronto

Abstract:
Versatile instrument widely found in GaAs semiconductor fabs will be used to make optoelectronic devices, biosensors and photonic crystals at Canada's Emerging Communications Technology Institute.

Vistec GaAs litho tool finds new applications in Toronto

TORONTO, ON, Canada | Posted on November 25th, 2008

Vistec Lithography Inc. announced that one of its Vistec EBPG5000plus was accepted by the University of Toronto (UofT). The Gaussian Beam Lithography System will offer a wide range of application areas for the Faculty of Applied Science and Engineering and the Emerging Communications Technology Institute at the Canadian University (ECTI).

The new EBPG5000plus system has been installed in the Wallberg Building at St. George Campus, in downtown Toronto. Vistec's EBPG5000plus excels through its flexibility and excellent lithography performance - a perfect fit for the variety of applications required by the University.

"This facility is the first one of its kind in the province of Ontario and Western Canada. The possibilities to grow out of this initiative dedicated to the field of nanoscale science and engineering are almost limitless. This unique facility could be the convergence point for researchers from a number of science and engineering disciplines - demonstrating the versatility of the EBPG5000plus technology and also the multidisciplinary nature of nanotechnology research.

UofT now has the technological capability to explore new design and fabrication possibilities on the nanoscale for the next-generation devices - driven by high pattern resolution and placement accuracy" says Dr. Aju Jugessur, Nanolithography Facility Manager / Senior Researcher who is leading and developing this new facility at the University of Toronto.

Applications that will benefit from the flexibility of the EBPG5000plus include: meta-materials and photonic crystals, integrated optical devices, nanophotonic devices, lab-on-chip devices, biosensors for medical applications and nano-patterning for surface functionalization for fpr protein & DNA related biological work. One immediate application plan will be academic mask making, which will allow the University to write masks for internal use according to requirements. ECTI also plans to offer its Electron Beam Lithography services to industrial users.

"The bandwidth of possible uses puts this Gaussian Beam Lithography System on top of the competition", states Erwin Mueller, Vistec's Manager of Service & Technical Support. Vistec's EBPG series is also a global leader for advanced nanolithography applications, particularly in direct writing of premium GaAs communication devices. The extraordinary flexibility of the EBPG5000plus to support a wide range of different applications makes it the ideal system for the manifold needs of the University of Toronto.

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About Vistec Lithography Inc.
Vistec Electron Beam Lithography Group combines the experience and know-how of a globally established technology company fired with passion for innovation and pioneering spirit.

Vistec Electron Beam Lithography Group maintains the close contact with the end users of our products. Such relationships enable us to constantly embed the most innovative technology in our highest productivity solutions. These in turn help our customers to achieve the technical breakthroughs that keep the semiconductor industry on its fast paced roadmap.

For more information, please click here

Contacts:
Vistec Lithography Inc.
125 Monroe Street
Watervliet, NY 12189
USA

phone +1 518 874 3000
telefax +1 518 874 3198

Copyright © Vistec Lithography Inc.

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