Nanotechnology Now

Our NanoNews Digest Sponsors


Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines

Abstract:
Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems, announced today that the Company had shipped a Tegal 200SE ICP deep reactive ion etch (DRIE) system to a leading supplier of substrates and services in the integrated circuit and MEMS sensor markets. The new Tegal DRIE system is currently being installed at the customer's 150mm production foundry.

Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines

Petaluma, CA | Posted on November 11th, 2008

"Tegal is very pleased to have shipped our first Tegal 200SE ICP Silicon Etch System following our acquisition of the Alcatel Micro Machining Systems (AMMS) product lines in September," said Thomas Mika, President and CEO of Tegal Corporation. "We worked very hard to make the sales and qualification process seamless for our customer, who has added Tegal's DRIE system to its existing tool set. The fact that this customer has made the choice for Tegal, after working in MEMS production for many years, is a strong endorsement of the Tegal / AMMS 200SE track record for production-proven performance."

The Tegal 200SE system is a high-density plasma etch tool featuring an inductively coupled plasma etch reactor and magnetic plasma confinement. The tool can run Tegal's patented SHARP - Super High Aspect Ratio Process, achieving etched feature aspect ratios of > 100:1 in production environments. Together with its high reliability, broad process window, and high etch rates, the Tegal 200SE system is a critical enabler for etching the Silicon and SOI substrates found in the MEMS/MOEMS, photovoltaic, bio-tech and hi-voltage markets.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
John Almerico
707-763-5600
Marketing Director - Etch Products
or
The Blueshirt Group
Chris Danne
415-217-7722

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Tiny packages may pack powerful treatment for brain tumors: Nanocarrier provides efficient delivery of chemotherapeutic drug May 23rd, 2016

Two-stage nanoparticle delivery of piperlongumine and TRAIL anti-cancer therapy May 23rd, 2016

Rice de-icer gains anti-icing properties: Dual-function, graphene-based material good for aircraft, extreme environments May 23rd, 2016

Graphene makes rubber more rubbery May 23rd, 2016

MEMS

New research unveils graphene 'moth eyes' to power future smart technologies: New ultra-thin, patterned graphene sheets will be essential in designing future technologies such as 'smart wallpaper' and Internet-of-things applications March 1st, 2016

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

MEMS & Sensors Industry Group Previews “Internet of MEMS & Sensors” at CES 2016 -- Global industry association invites CE OEMS/integrators to conference track on January 7 January 6th, 2016

SITRI and Accelink Announce Cooperative Agreement on Opto-Electronic Communication December 31st, 2015

Chip Technology

Physicists create first metamaterial with rewritable magnetic ordering May 23rd, 2016

Graphene: Progress, not quantum leaps May 23rd, 2016

Researchers demonstrate size quantization of Dirac fermions in graphene: Characterization of high-quality material reveals important details relevant to next generation nanoelectronic devices May 20th, 2016

Graphene: A quantum of current - When current comes in discrete packages: Viennese scientists unravel the quantum properties of the carbon material graphene May 20th, 2016

Sensors

Electronic device detects molecules linked to cancer, Alzheimer's and Parkinson's: An inexpensive portable biosensor has been developed by researchers at Brazil's National Nanotechnology Laboratory with FAPESP's support May 20th, 2016

Making organs transparent to improve nanomedicine (video) May 13th, 2016

Scientists take a major leap toward a 'perfect' quantum metamaterial: Berkeley Lab, UC Berkeley researchers lead study that uses trapped atoms in an artificial crystal of light May 13th, 2016

Quantum sensors for high-precision magnetometry of superconductors May 3rd, 2016

Announcements

Physicists create first metamaterial with rewritable magnetic ordering May 23rd, 2016

Tiny packages may pack powerful treatment for brain tumors: Nanocarrier provides efficient delivery of chemotherapeutic drug May 23rd, 2016

Two-stage nanoparticle delivery of piperlongumine and TRAIL anti-cancer therapy May 23rd, 2016

Rice de-icer gains anti-icing properties: Dual-function, graphene-based material good for aircraft, extreme environments May 23rd, 2016

Tools

More light on cancer: Scientists created nanoparticles to highlight cancer cells May 21st, 2016

Nanotubes are beacons in cancer-imaging technique: Rice University researchers use spectral triangulation to pinpoint location of tumors May 21st, 2016

Carnegie Mellon develops bio-mimicry method for preparing and labeling stem cells: Method allows researchers to prepare mesenchymal stem cells and monitor them using MRI May 19th, 2016

Unveiling the electron's motion in a carbon nanocoil: Development of a precise resistivity measurement system for quasi-one-dimensional nanomaterials using a focused ion beam May 16th, 2016

Acquisitions/Mergers/Splits

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

Entest BioMedical, Inc. in Discussions to Acquire Nanotechnology Delivery System for Cancer Therapy June 3rd, 2015

Evident Thermoelectrics Acquires GMZ Energy: Investment Accelerates Launch Of Evident's Thermoelectric Modules For Waste Heat May 20th, 2015

Keysight Technologies Begins Trading as Independent Company November 3rd, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic