Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines

Abstract:
Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems, announced today that the Company had shipped a Tegal 200SE ICP deep reactive ion etch (DRIE) system to a leading supplier of substrates and services in the integrated circuit and MEMS sensor markets. The new Tegal DRIE system is currently being installed at the customer's 150mm production foundry.

Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines

Petaluma, CA | Posted on November 11th, 2008

"Tegal is very pleased to have shipped our first Tegal 200SE ICP Silicon Etch System following our acquisition of the Alcatel Micro Machining Systems (AMMS) product lines in September," said Thomas Mika, President and CEO of Tegal Corporation. "We worked very hard to make the sales and qualification process seamless for our customer, who has added Tegal's DRIE system to its existing tool set. The fact that this customer has made the choice for Tegal, after working in MEMS production for many years, is a strong endorsement of the Tegal / AMMS 200SE track record for production-proven performance."

The Tegal 200SE system is a high-density plasma etch tool featuring an inductively coupled plasma etch reactor and magnetic plasma confinement. The tool can run Tegal's patented SHARP - Super High Aspect Ratio Process, achieving etched feature aspect ratios of > 100:1 in production environments. Together with its high reliability, broad process window, and high etch rates, the Tegal 200SE system is a critical enabler for etching the Silicon and SOI substrates found in the MEMS/MOEMS, photovoltaic, bio-tech and hi-voltage markets.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
John Almerico
707-763-5600
Marketing Director - Etch Products
or
The Blueshirt Group
Chris Danne
415-217-7722

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Roll up your screen and stow it away? Tel Aviv University researchers develop molecular backbone of super-slim, bendable digital displays March 30th, 2015

Princess Margaret scientists convert microbubbles to nanoparticles: Harnessing light to advance tumor imaging, provide platform for targeted treatment March 30th, 2015

Wrapping carbon nanotubes in polymers enhances their performance: Scientists at Japan's Kyushu University say polymer-wrapped carbon nanotubes hold much promise in biotechnology and energy applications March 30th, 2015

Tokyo Institute of Technology research: Catalyst redefines rate limitations in ammonia production March 30th, 2015

MEMS

ASIC Development for MEMS Applications: A Platform Approach March 25th, 2015

STMicroelectronics Executive Vice-President Benedetto Vigna Awarded IEEE Frederik Philips Award March 12th, 2015

MIG Takes a Roll-Up-Your-Sleeves Approach with Revamped MEMS/Sensors Technical Event -- MIG welcomes technologists to MEMS Technical Congress, emphasizes working groups and breakout sessions on emerging MEMS & sensors, tech transfer and integration March 6th, 2015

French Institutes IRT Nanoelec and CMP Team up to Offer World’s First Service for Post-process 3D Technologies on Multi-Project-Wafer March 5th, 2015

Chip Technology

Next important step toward quantum computer: Scientists at the University of Bonn have succeeded in linking 2 different quantum systems March 30th, 2015

State-of-the-art online system unveiled to pinpoint metrology software accuracy March 27th, 2015

SUNY POLY CNSE to Host First Ever Northeast Semi Supply Conference (NESCO) Conference Will Connect New and Emerging Innovators in the Northeastern US and Canada with Industry Leaders and Strategic Investors to Discuss Future Growth Opportunities in NYS March 25th, 2015

NXP and GLOBALFOUNDRIES Announce Production of 40nm Embedded Non-Volatile Memory Technology: Co-developed technology to leverage GLOBALFOUNDRIES 40nm process technology platform March 24th, 2015

Sensors

UW scientists build a nanolaser using a single atomic sheet March 24th, 2015

Iranian Researchers Present Model to Determine Dynamic Behavior of Nanostructures March 24th, 2015

Nanodevice Invented in Iran to Detect Hydrogen Sulfide in Oil, Gas Industry March 20th, 2015

LamdaGen Corporation Launches Taiwan Diagnostic Subsidiary March 19th, 2015

Announcements

Princess Margaret scientists convert microbubbles to nanoparticles: Harnessing light to advance tumor imaging, provide platform for targeted treatment March 30th, 2015

Wrapping carbon nanotubes in polymers enhances their performance: Scientists at Japan's Kyushu University say polymer-wrapped carbon nanotubes hold much promise in biotechnology and energy applications March 30th, 2015

Tokyo Institute of Technology research: Catalyst redefines rate limitations in ammonia production March 30th, 2015

Next important step toward quantum computer: Scientists at the University of Bonn have succeeded in linking 2 different quantum systems March 30th, 2015

Tools

'Atomic chicken-wire' is key to faster DNA sequencing March 30th, 2015

LAMDAMAP 2015 hosted by the University March 26th, 2015

FEI Technology Award of the German Neuroscience Society Goes to Benjamin Judkewitz of the University of Berlin: Bi-annual award honors excellence in brain research during the German Neuroscience Society’s Annual Meeting, held 18-21 March 2015 March 26th, 2015

Square ice filling for a graphene sandwich March 26th, 2015

Acquisitions/Mergers/Splits

Keysight Technologies Begins Trading as Independent Company November 3rd, 2014

PEN Inc. Chairman, Scott Rickert, Will Webcast a Live Company Update September 25, 1 PM EDT September 17th, 2014

State University of New York Trustees Unanimously Approve SUNY Polytechnic Institute (SUNY Poly) as New Name for Merged SUNY CNSE / SUNYIT September 9th, 2014

PEN Inc. Announces New Trading Symbol: PENC: Stock Continues Trading on the OTCQB September 3rd, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE