Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines

Abstract:
Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems, announced today that the Company had shipped a Tegal 200SE ICP deep reactive ion etch (DRIE) system to a leading supplier of substrates and services in the integrated circuit and MEMS sensor markets. The new Tegal DRIE system is currently being installed at the customer's 150mm production foundry.

Tegal Ships First Deep Silicon Etch System Following Acquisition of Alcatel Micro Machining System Product Lines

Petaluma, CA | Posted on November 11th, 2008

"Tegal is very pleased to have shipped our first Tegal 200SE ICP Silicon Etch System following our acquisition of the Alcatel Micro Machining Systems (AMMS) product lines in September," said Thomas Mika, President and CEO of Tegal Corporation. "We worked very hard to make the sales and qualification process seamless for our customer, who has added Tegal's DRIE system to its existing tool set. The fact that this customer has made the choice for Tegal, after working in MEMS production for many years, is a strong endorsement of the Tegal / AMMS 200SE track record for production-proven performance."

The Tegal 200SE system is a high-density plasma etch tool featuring an inductively coupled plasma etch reactor and magnetic plasma confinement. The tool can run Tegal's patented SHARP - Super High Aspect Ratio Process, achieving etched feature aspect ratios of > 100:1 in production environments. Together with its high reliability, broad process window, and high etch rates, the Tegal 200SE system is a critical enabler for etching the Silicon and SOI substrates found in the MEMS/MOEMS, photovoltaic, bio-tech and hi-voltage markets.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegalís system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
John Almerico
707-763-5600
Marketing Director - Etch Products
or
The Blueshirt Group
Chris Danne
415-217-7722

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Quantum manipulation power for quantum information processing gets a boost: Improving the efficiency of quantum heat engines involves reducing the number of photons in a cavity, ultimately impacting quantum manipulation power October 14th, 2017

Injecting electrons jolts 2-D structure into new atomic pattern: Berkeley Lab study is first to show potential of energy-efficient next-gen electronic memory October 13th, 2017

The secret to improving liquid crystal's mechanical performance: Better lubricating properties of lamellar liquid crystals could stem from changing the mobility of their structural dislocations by adding nanoparticles October 13th, 2017

MEMS

First Capacitive Transducer with 13nm Gap July 27th, 2017

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017

Engineers shrink microscope to dime-sized device February 17th, 2017

Chip Technology

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Quantum manipulation power for quantum information processing gets a boost: Improving the efficiency of quantum heat engines involves reducing the number of photons in a cavity, ultimately impacting quantum manipulation power October 14th, 2017

Injecting electrons jolts 2-D structure into new atomic pattern: Berkeley Lab study is first to show potential of energy-efficient next-gen electronic memory October 13th, 2017

Rice U. lab surprised by ultraflat magnets: Researchers create atom-thick alloys with unanticipated magnetic properties October 13th, 2017

Sensors

Rice U. study: Vibrating nanoparticles interact: Placing nanodisks in groups can change their vibrational frequencies October 16th, 2017

Single Ďsolitonsí promising for optical technologies October 9th, 2017

Two dimensional materials: Advanced molybdenum selenide near infrared phototransistors September 27th, 2017

Enhancing the sensing capabilities of diamonds with quantum properties: A simple method can give diamonds the special properties needed for quantum applications such as sensing magnetic fields September 24th, 2017

Announcements

Rice U. study: Vibrating nanoparticles interact: Placing nanodisks in groups can change their vibrational frequencies October 16th, 2017

Spin current detection in quantum materials unlocks potential for alternative electronics October 15th, 2017

Quantum manipulation power for quantum information processing gets a boost: Improving the efficiency of quantum heat engines involves reducing the number of photons in a cavity, ultimately impacting quantum manipulation power October 14th, 2017

The secret to improving liquid crystal's mechanical performance: Better lubricating properties of lamellar liquid crystals could stem from changing the mobility of their structural dislocations by adding nanoparticles October 13th, 2017

Tools

Nanometrics Announces Preliminary Results for the Third Quarter of 2017: Quarterly Results Impacted by Delays in Revenue Recognition on Multiple Systems into Japan October 12th, 2017

Seeing the next dimension of computer chips: Researchers image perfectly smooth side-surfaces of 3-D silicon crystals with a scanning tunneling microscope, paving the way for smaller and faster computing devices October 11th, 2017

Quorum announces new customer support and demonstration facilities for users worldwide October 10th, 2017

Graphene forged into three-dimensional shapes September 26th, 2017

Acquisitions/Mergers/Splits

Bruker Announces Acquisition of Nanoindenting Leader Hysitron: Acquisition strengthens Brukerís leading position in nanoanalysis and nanomechanical materials characterization January 24th, 2017

GLOBALFOUNDRIES Completes Acquisition of IBM Microelectronics Business: Transaction adds differentiating technologies, world-class technologists, and intellectual property July 1st, 2015

Entest BioMedical, Inc. in Discussions to Acquire Nanotechnology Delivery System for Cancer Therapy June 3rd, 2015

Evident Thermoelectrics Acquires GMZ Energy: Investment Accelerates Launch Of Evident's Thermoelectric Modules For Waste Heat May 20th, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project