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Abstract:
Heidelberg Instruments announced the sale of a µPG101 table top maskless laser patterning system to the Department of Chemical Engineering at the Chulalongkorn University, Thailand. This tool will be used for various researches in the BIOMEMS area.
Heidelberg Instruments to Support BIOMEMS Research at the Chulalongkorn University, Thailand
Thailand | Posted on October 23rd, 2008Heidelberg Instruments announced the sale of a µPG101 table top maskless laser patterning system to the Department of Chemical Engineering at the Chulalongkorn University, Thailand. This tool will be used for various researches in the BIOMEMS area.
The µPG101 is an extremely economical and easy to use Micro Pattern Generator for direct write applications as well as low volume mask making. It is also perfectly suitable for rapid prototyping of 2D and 3D microstructures on substrates up to 4 inches by 4 inches, and is capable of exposing high resolution features with an address grid of 100nm.
The µPG101 maskless lithography system offers a very small footprint of 60cm by 60cm. It presents a highly flexible, out of the box tool which is capable of layer to layer alignment through its integrated camera system.
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About Heidelberg Instruments GmbH
With an installation base of more than 300 systems in over 30 countries, Heidelberg Instruments is a world leader in production of high precision maskless lithography systems. These systems are used for direct writing and photomask production by some of the most prestigious universities and industry leaders in the areas of MEMS, BioMEMS, Nano Technology, ASICS, TFT, Plasma Displays, Micro Optics, and many other related applications.
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Contacts:
Heidelberg Instruments
+496221343073
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