Nanotechnology Now







Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > IMEC demonstrates 3D stacked integrated circuits

Test-chip taped for assessing design rules and models for 3D-SIC technology.
Test-chip taped for assessing design rules and models for 3D-SIC technology.

Abstract:
IMEC Annual Research Review Meeting - Leuven - Belgium

IMEC demonstrates 3D stacked integrated circuits

Leuven, Belgium | Posted on October 13th, 2008

IMEC, Europe's leading independent nanoelectronics research institute today announced that it has made significant progress with its 3D-SIC (3D stacked IC) technology. IMEC recently demonstrated the first functional 3D integrated circuits obtained by die-to-die stacking using 5µm Cu through-silicon vias (TSV). It will now further develop 3D SIC chips on 200mm and 300mm wafers, integrating test circuits from partners participating in its 3D integration research program.



IMEC reported a first-time demonstration of 3D integrated circuits obtained by die-to-die stacking and using 5µm Cu through-silicon vias (TSV). The dies were realized on 200mm wafers in IMEC's reference 0.13μm CMOS process with an added Cu-TSVs process. For stacking, the top die was thinned down to 25μm and bonded to the landing die by Cu-Cu thermocompression. IMEC is upscaling the process for die-to-wafer bonding and is on track for migrating the process to its 300mm platform.



To evaluate the impact of the 3D SIC flow on the characteristics of the stacked layers, both the top and landing wafers contained CMOS circuits. Extensive tests confirmed that the performance of the circuits does not degrade with adding Cu TSVs and stacking. And to test the integrity and performance of the 3D stack, ring oscillators with varying configurations were made, distributed over the two chip layers and connected with the Cu TSVs. Tested after the TSV and stacking process, these circuits demonstrated the chips excellent integrity.



"With these tests, we have demonstrated that our technology allows designing and fabricating fully functional 3D SIC chips. We are now ready to accept reference test circuits from our industry partners," commented Eric Beyne, IMEC Scientific Director for 3D Technologies, "This will enable the industry to gain early insight and experience with 3D SIC design, using their own designs".

####

About IMEC
IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, offices in the US, China and Taiwan, and representatives in Japan. Its staff of more than 1600 people includes more than 500 industrial residents and guest researchers. In 2007, its revenue (P&L) was EUR 244.5 million.

IMEC’s More Moore research aims at semiconductor scaling towards sub-32nm nodes. With its More than Moore research, IMEC looks into technologies for nomadic embedded systems, wireless autonomous transducer solutions, biomedical electronics, photovoltaics, organic electronics and GaN power electronics.

IMEC’s research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network worldwide position IMEC as a key partner for shaping technologies for future systems.

For more information, please click here

Contacts:
Katrien Marent
Director of External Communications
T: +32 16 28 18 80
Mobile : +32 474 30 28 66

Copyright © IMEC

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

UC research partnership explores how to best harness solar power March 2nd, 2015

Researchers turn unzipped nanotubes into possible alternative for platinum: Aerogel catalyst shows promise for fuel cells March 2nd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

New Hopes for Treatment of Intestine Cancer by Edible Nanodrug March 2nd, 2015

Chip Technology

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

onic Present breakthrough in CMOS-based Transceivers for mm-Wave Radar Systems March 1st, 2015

New nanowire structure absorbs light efficiently: Dual-type nanowire arrays can be used in applications such as LEDs and solar cells February 25th, 2015

SUNY Poly CNSE Researchers and Corporate Partners to Present Forty Papers at Globally Recognized Lithography Conference: SUNY Poly CNSE Research Group Awarded Both ‘Best Research Paper’ and ‘Best Research Poster’ at SPIE Advanced Lithography 2015 forum February 25th, 2015

Nanoelectronics

New nanowire structure absorbs light efficiently: Dual-type nanowire arrays can be used in applications such as LEDs and solar cells February 25th, 2015

Ultra-thin nanowires can trap electron 'twisters' that disrupt superconductors February 24th, 2015

Improved fire detection with new ultra-sensitive, ultraviolet light sensor February 17th, 2015

Nanotechnology facility planned in Lund, Sweden: A production facility for start-ups in the field of nanotechnology may be built in the Science Village in Lund, a world-class research and innovation village that is also home to ESS, the European Spallation Source February 15th, 2015

Discoveries

UC research partnership explores how to best harness solar power March 2nd, 2015

Researchers turn unzipped nanotubes into possible alternative for platinum: Aerogel catalyst shows promise for fuel cells March 2nd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

New Hopes for Treatment of Intestine Cancer by Edible Nanodrug March 2nd, 2015

Announcements

UC research partnership explores how to best harness solar power March 2nd, 2015

Researchers turn unzipped nanotubes into possible alternative for platinum: Aerogel catalyst shows promise for fuel cells March 2nd, 2015

Important step towards quantum computing: Metals at atomic scale March 2nd, 2015

New Hopes for Treatment of Intestine Cancer by Edible Nanodrug March 2nd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2015 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE