Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Veeco’s Insight 3D Atomic Force Microscope Receives Acceptance from Key Semiconductor Customer for OPC Metrology

Abstract:
Also Receives New InSight Order From Leading Korean Semiconductor Manufacturer

Veeco’s Insight 3D Atomic Force Microscope Receives Acceptance from Key Semiconductor Customer for OPC Metrology

PLAINVIEW, NY | Posted on October 1st, 2008

Veeco Instruments Inc. (Nasdaq: VECO), announced today that its new InSight™ 3D Automated Atomic Force Microscope (3DAFM) Platform has been accepted by a key global semiconductor customer for Critical Dimension (CD) Reference Metrology for Optical Proximity Correction (OPC) modeling. The InSight 3DAFM provides highly accurate, non-destructive, high-resolution three-dimensional (3D) measurements of critical 45nm and 32nm semiconductor features, coupled with the speed to qualify as a true fab tool. Veeco also announced that it received a new order for the system from a leading semiconductor device manufacturer based in Korea.

Mark Munch, Ph.D., Executive Vice President, Veeco Metrology, commented, "We are pleased that this customer, one that is known as a leader in Reference Metrology, has accepted the tool for this demanding application. The InSight 3DAFM provides the best available accuracy for OPC Metrology, reducing residual measurement error and improving OPC cycle times. This can significantly improve time to market on advanced semiconductor devices and reduce process development costs. We are also gratified that a key semiconductor device customer has chosen the InSight for a production-based gate CD metrology application at 45nm and below."

"Industry leaders such as Sematech have highlighted the need for improved OPC Metrology due to the limitations of current CD metrology tools," stated Paul Clayton, Vice President, Veeco's Automated AFM Business. "During the beta period, InSight 3DAFM was subject to extensive testing on a variety of OPC related structures such as lines, vias and line and space ends. Our customer's excellent results demonstrated that InSight has the lowest measurement uncertainty of any CD metrology tool."

About InSight 3DAFM

The InSight 3DAFM provides non-destructive, high-resolution three dimensional measurements of critical 45nm and 32nm semiconductor features, coupled with the speed to qualify as a true fab tool. Key applications include CD, sidewall angle and line width roughness on critical layers, including Gate and FinFet structures. The system contains a new high-precision X-Y stage with improved accuracy and a unique pattern recognition system with high-precision laser auto-focus capability. In addition, new AFM control techniques and proprietary probe designs enable improved precision, lower cost per measurement site and smaller feature measurement. Finally, system reliability is significantly enhanced to meet the demands of 45nm production-based metrology. Further information on InSight can be found at www.veeco.com/insight3dafm.

####

About Veeco Instruments Inc.
Veeco Instruments Inc. manufactures enabling solutions for customers in the HB-LED, solar, data storage, semiconductor, scientific research and industrial markets. We have leading technology positions in our three businesses: LED & Solar Process Equipment, Data Storage Process Equipment, and Metrology Instruments. Veeco’s manufacturing and engineering facilities are located in New York, New Jersey, California, Colorado, Arizona, Minnesota and Massachusetts. Global sales and service offices are located throughout the U.S., Europe, Japan and APAC.

To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management's Discussion and Analysis sections of Veeco's Annual Report on Form 10-K for the year ended December 31, 2007 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.

For more information, please click here

Contacts:


Veeco Instruments Inc.
Investor:
Deb Wasser
1-516-677-0200 x 1472
SVP Investor Relations
or
Trade Media:
Fran Brennen
1-516-677-0200 x1222
Senior Director of Marcom

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Fine-tuned molecular orientation is key to more efficient solar cells May 26th, 2015

Researchers find the 'key' to quantum network solution May 25th, 2015

One step closer to a single-molecule device: Columbia Engineering researchers first to create a single-molecule diode -- the ultimate in miniaturization for electronic devices -- with potential for real-world applications May 25th, 2015

DNA Double Helix Does Double Duty in Assembling Arrays of Nanoparticles: Synthetic pieces of biological molecule form framework and glue for making nanoparticle clusters and arrays May 25th, 2015

Imaging

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Aspen Aerogels to Present at the Cowen and Company Technology, Media & Telecom Conference May 21st, 2015

Samtec, Global Provider of Interconnect Systems, Joins IRT Nanoelec Silicon Photonics Program May 21st, 2015

Taking control of light emission: Researchers find a way of tuning light waves by pairing 2 exotic 2-D materials May 20th, 2015

Chip Technology

One step closer to a single-molecule device: Columbia Engineering researchers first to create a single-molecule diode -- the ultimate in miniaturization for electronic devices -- with potential for real-world applications May 25th, 2015

Basel physicists develop efficient method of signal transmission from nanocomponents May 23rd, 2015

Sandia researchers first to measure thermoelectric behavior by 'Tinkertoy' materials May 20th, 2015

Defects can 'Hulk-up' materials: Berkeley lab study shows properly managed damage can boost material thermoelectric performances May 20th, 2015

Announcements

Fine-tuned molecular orientation is key to more efficient solar cells May 26th, 2015

Researchers find the 'key' to quantum network solution May 25th, 2015

One step closer to a single-molecule device: Columbia Engineering researchers first to create a single-molecule diode -- the ultimate in miniaturization for electronic devices -- with potential for real-world applications May 25th, 2015

DNA Double Helix Does Double Duty in Assembling Arrays of Nanoparticles: Synthetic pieces of biological molecule form framework and glue for making nanoparticle clusters and arrays May 25th, 2015

Tools

This Slinky lookalike 'hyperlens' helps us see tiny objects: The photonics advancement could improve early cancer detection, nanoelectronics manufacturing and scientists' ability to observe single molecules May 23rd, 2015

Nanometrics Announces Live Webcast of Upcoming Investor and Analyst Day May 20th, 2015

Taking control of light emission: Researchers find a way of tuning light waves by pairing 2 exotic 2-D materials May 20th, 2015

DELMIC announces a workshop hosted by Phenom World on Integrated CLEM to be held on Wednesday June 24th at the Francis Crick Institute (Lincoln Inn Fields Laboratory). May 19th, 2015

New-Contracts/Sales/Customers

Argonne chooses Beneq’s TFS 500 Atomic Layer Deposition System: Modularity and flexibility make for a natural choice May 14th, 2015

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

FEI Partners With the George Washington University to Equip New Science & Engineering Hall: Suite of new high-performance microscopes will be used for cutting-edge experiments at GW’s new research facility April 29th, 2015

Renishaw Raman systems used to study 2D materials at Boston University, Massachusetts, USA. April 28th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project