Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Veeco’s Insight 3D Atomic Force Microscope Receives Acceptance from Key Semiconductor Customer for OPC Metrology

Abstract:
Also Receives New InSight Order From Leading Korean Semiconductor Manufacturer

Veeco’s Insight 3D Atomic Force Microscope Receives Acceptance from Key Semiconductor Customer for OPC Metrology

PLAINVIEW, NY | Posted on October 1st, 2008

Veeco Instruments Inc. (Nasdaq: VECO), announced today that its new InSight™ 3D Automated Atomic Force Microscope (3DAFM) Platform has been accepted by a key global semiconductor customer for Critical Dimension (CD) Reference Metrology for Optical Proximity Correction (OPC) modeling. The InSight 3DAFM provides highly accurate, non-destructive, high-resolution three-dimensional (3D) measurements of critical 45nm and 32nm semiconductor features, coupled with the speed to qualify as a true fab tool. Veeco also announced that it received a new order for the system from a leading semiconductor device manufacturer based in Korea.

Mark Munch, Ph.D., Executive Vice President, Veeco Metrology, commented, "We are pleased that this customer, one that is known as a leader in Reference Metrology, has accepted the tool for this demanding application. The InSight 3DAFM provides the best available accuracy for OPC Metrology, reducing residual measurement error and improving OPC cycle times. This can significantly improve time to market on advanced semiconductor devices and reduce process development costs. We are also gratified that a key semiconductor device customer has chosen the InSight for a production-based gate CD metrology application at 45nm and below."

"Industry leaders such as Sematech have highlighted the need for improved OPC Metrology due to the limitations of current CD metrology tools," stated Paul Clayton, Vice President, Veeco's Automated AFM Business. "During the beta period, InSight 3DAFM was subject to extensive testing on a variety of OPC related structures such as lines, vias and line and space ends. Our customer's excellent results demonstrated that InSight has the lowest measurement uncertainty of any CD metrology tool."

About InSight 3DAFM

The InSight 3DAFM provides non-destructive, high-resolution three dimensional measurements of critical 45nm and 32nm semiconductor features, coupled with the speed to qualify as a true fab tool. Key applications include CD, sidewall angle and line width roughness on critical layers, including Gate and FinFet structures. The system contains a new high-precision X-Y stage with improved accuracy and a unique pattern recognition system with high-precision laser auto-focus capability. In addition, new AFM control techniques and proprietary probe designs enable improved precision, lower cost per measurement site and smaller feature measurement. Finally, system reliability is significantly enhanced to meet the demands of 45nm production-based metrology. Further information on InSight can be found at www.veeco.com/insight3dafm.

####

About Veeco Instruments Inc.
Veeco Instruments Inc. manufactures enabling solutions for customers in the HB-LED, solar, data storage, semiconductor, scientific research and industrial markets. We have leading technology positions in our three businesses: LED & Solar Process Equipment, Data Storage Process Equipment, and Metrology Instruments. Veeco’s manufacturing and engineering facilities are located in New York, New Jersey, California, Colorado, Arizona, Minnesota and Massachusetts. Global sales and service offices are located throughout the U.S., Europe, Japan and APAC.

To the extent that this news release discusses expectations or otherwise makes statements about the future, such statements are forward-looking and are subject to a number of risks and uncertainties that could cause actual results to differ materially from the statements made. These factors include the risks discussed in the Business Description and Management's Discussion and Analysis sections of Veeco's Annual Report on Form 10-K for the year ended December 31, 2007 and in our subsequent quarterly reports on Form 10-Q, current reports on Form 8-K and press releases. Veeco does not undertake any obligation to update any forward-looking statements to reflect future events or circumstances after the date of such statements.

For more information, please click here

Contacts:


Veeco Instruments Inc.
Investor:
Deb Wasser
1-516-677-0200 x 1472
SVP Investor Relations
or
Trade Media:
Fran Brennen
1-516-677-0200 x1222
Senior Director of Marcom

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Creating a new kind of metallic glass December 7th, 2017

Imaging

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

Deben reports on a new publication from scientists at La Trobe University in Australia where their CT500 stage is used in micro scanning tomography experiments to better understand ceramic matrix composites under load November 29th, 2017

Chip Technology

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

Leti Integrates Hybrid III-V Silicon Lasers on 200mm Wafers with Standard CMOS Process December 6th, 2017

Leti Breakthroughs Point Way to Significant Improvements in SoC Memories December 6th, 2017

Announcements

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Tools

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

Deben reports on a new publication from scientists at La Trobe University in Australia where their CT500 stage is used in micro scanning tomography experiments to better understand ceramic matrix composites under load November 29th, 2017

New-Contracts/Sales/Customers

Solid State Laser manufacturer Lasertel Inc. purchases an Oxford Instruments ICPCVD advanced deposition solution for improved device performance November 3rd, 2017

GLOBALFOUNDRIES and Soitec Enter Into Long-term Supply Agreement on FD-SOI Wafers: Strategic milestone to help guarantee a secure, high-volume supply of FD-SOI technology September 20th, 2017

Probiotics: Novel biosynthetic tool to develop metallic nanoparticles: This research article by Dr. Nida Akhtar et al has been published in Recent Patents on Drug Delivery & Formulation, Volume 11, Issue 1, 2017 July 20th, 2017

Here's a tip: Indented cement shows unique properties: Rice University models reveal nanoindentation can benefit crystals in concrete July 20th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project