Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > SEMATECH Research on Reliability of Workfunction Controlled High-k Metal Gates Recognized by Leading Conference

Abstract:
SEMATECH Technologists to Report Technical Results on New Materials and Device Structures at SSDM 2008 in Japan

SEMATECH Research on Reliability of Workfunction Controlled High-k Metal Gates Recognized by Leading Conference

Tokyo, Japan | Posted on September 30th, 2008

SEMATECH announced today that it has received the Solid State Devices and Materials (SSDM) Best Paper Award for its work on reliability of high-k metal gates. The paper was presented at the International Conference on Solid State Devices and Materials in September 2007 by Chang Yong Kang, research engineer in the Front End Processes Division (FEP), of SEMATECH. The award ceremony took place on September 24 at the Tsukuba International Congress Center during the 2008 International Conference on Solid State Devices and Materials in Ibaraki, Japan.

The paper, entitled "nMOSFET Reliability Improvement attributed to the Interfacial Dipole formed by La Incorporation in HfO2," was co-authored by Paul Kirsch, Dawei Heh, Chadwin Young, Gennadi Bersuker, Byoung Hun Lee, Prassana Sivasubramani, Seung Chul Song, Rino Choi and Raj Jammy of SEMATECH, and Daniel Lichtenwalner, Jesse Jur, and Angus Kingon of North Carolina State University. The paper investigates the reliability of nMOSFETs with lanthanum-doped HfO2 dielectrics, whose device performance and voltage threshold are suitable for future technology nodes applications. The best paper is selected each year by the attendees and the program committee.

"It gives me great pleasure to congratulate our engineers for this prestigious recognition of their success as they continue to address the challenges of integrating new materials and device structures for functionality," said Raj Jammy, vice president of materials and emerging technologies at SEMATECH. "Quality work such as this paper - and those being presented by our technologists this year - is representative of SEMATECH's commitment to provide innovative and practical solutions for continued scaling of semiconductor technologies that can easily be incorporated in real-world manufacturing environments."

Additionally, at this year's conference, engineers from SEMATECH's FEP division delivered five technical papers describing new findings in advanced materials and device structures for continued scaling of semiconductor technologies. The papers outlined SEMATECH's leading-edge research related to high-k/metal gate (HKMG) materials and planar and non-planar CMOS technologies, including:

* Performance and Reliability of High-k/Metal Gate Stacks: Interfacial Layer Defects - examines high-pressure oxygen anneal (HPOA) and high-pressure hydrogen anneal (HPHA) processes applied to MOSFETs with metal electrode/high-k dielectric stacks.
* Mechanisms of Oxygen and Hydrogen Passivation using High Pressure Post-annealing Processes to Enhance the Performance of MOSFETs with Metal Gate/High-k Dielectric - examines results on the performance and reliability of the high-k/metal gate stack transistors and discuss physical properties of the defects affecting these characteristics.
* High Mobility SiGe Channel pMOSFETs Epitaxially Grown on Si (100) Substrates with HfSiO2 High-k Dielectric and Metal Gate - demonstrates high-mobility pMOSFETs on high quality epitaxial SiGe films selectively grown on Si substrates using a CVD system.
* Additive Process Induced Strain (APIS) Technology for Lg = 30nm Band-Edge High-k/Metal Gate nMOSFET - demonstrates that stressor spacer can be used to transfer stress into the channel for short channel devices in band-edge high-k/metal gate MOSFETs.
* Mitigation of CMOS Variability with Metal Gate - examines the variability of polysilicon gate compared to metal gate process.

The International Conference on Solid State Devices and Materials is an annual conference that provides a platform for technical experts to discuss the latest developments in solid-state devices and materials via presentations, seminars and plenary sessions. SEMATECH has been an active contributor to SSDM conferences since 2004. SSDM is one of many industry forums it uses to collaborate with scientists and engineers from corporations, universities and other research institutions, many of whom are research partners.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

For more information, please click here

Contacts:
SEMATECH
Austin
Erica McGill
512-956-7446

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Study finds long-term survival of human neural stem cells transplanted into primate brain April 23rd, 2014

High-Performance, Low-Cost Ultracapacitors Built with Graphene and Carbon Nanotubes: Future devices based on technology could bridge gap between batteries and conventional capacitors in portable electronics and hybrid electric vehicles April 23rd, 2014

Guo Lab Shows Potential of RNA as Heat-resistant Polymer Material for Nanoarchitectures April 23rd, 2014

National Space Society Congratulates SpaceX on the Success of CRS-3 and the First Flight of the Falcon 9R April 22nd, 2014

Chip Technology

Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014

Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014

'Exotic' material is like a switch when super thin April 18th, 2014

Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014

Announcements

Study finds long-term survival of human neural stem cells transplanted into primate brain April 23rd, 2014

High-Performance, Low-Cost Ultracapacitors Built with Graphene and Carbon Nanotubes: Future devices based on technology could bridge gap between batteries and conventional capacitors in portable electronics and hybrid electric vehicles April 23rd, 2014

Guo Lab Shows Potential of RNA as Heat-resistant Polymer Material for Nanoarchitectures April 23rd, 2014

National Space Society Congratulates SpaceX on the Success of CRS-3 and the First Flight of the Falcon 9R April 22nd, 2014

Events/Classes

PETA science consortium to present hazard testing strategy at nanotoxicology meeting: High tech field ripe for use of sophisticated non-animal testing strategies April 22nd, 2014

National Space Society Congratulates SpaceX on the Success of CRS-3 and the First Flight of the Falcon 9R April 22nd, 2014

INSCX™ exchange to present Exchange trade reporting mechanism for engineered nanomaterials (NMs) to UK regulation agencies, insurers and upstream/downstream users April 17th, 2014

'Life Redesigned: The Emergence of Synthetic Biology' Lecture at Brookhaven Lab on Wednesday, April 30: Biomedical Engineer James Collins to Speak for BSA Distinguished Lecture Series April 16th, 2014

Grants/Awards/Scholarships/Gifts/Contests/Honors/Records

National Space Society Congratulates SpaceX on the Success of CRS-3 and the First Flight of the Falcon 9R April 22nd, 2014

Energy Research Facility Construction Project at Brookhaven Lab Wins U.S. Energy Secretary's Achievement Award April 16th, 2014

IDTechEx Printed Electronics Europe 2014 Award Winners April 1st, 2014

Dais Analytic Wins SBIR Grant: Dais Analytic Receives US Army Small Business Innovation Research Grant to Further Its Demonstrated Successes in Cleaning Most Forms of Wastewater March 28th, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE