Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > SEMATECH Research on Reliability of Workfunction Controlled High-k Metal Gates Recognized by Leading Conference

Abstract:
SEMATECH Technologists to Report Technical Results on New Materials and Device Structures at SSDM 2008 in Japan

SEMATECH Research on Reliability of Workfunction Controlled High-k Metal Gates Recognized by Leading Conference

Tokyo, Japan | Posted on September 30th, 2008

SEMATECH announced today that it has received the Solid State Devices and Materials (SSDM) Best Paper Award for its work on reliability of high-k metal gates. The paper was presented at the International Conference on Solid State Devices and Materials in September 2007 by Chang Yong Kang, research engineer in the Front End Processes Division (FEP), of SEMATECH. The award ceremony took place on September 24 at the Tsukuba International Congress Center during the 2008 International Conference on Solid State Devices and Materials in Ibaraki, Japan.

The paper, entitled "nMOSFET Reliability Improvement attributed to the Interfacial Dipole formed by La Incorporation in HfO2," was co-authored by Paul Kirsch, Dawei Heh, Chadwin Young, Gennadi Bersuker, Byoung Hun Lee, Prassana Sivasubramani, Seung Chul Song, Rino Choi and Raj Jammy of SEMATECH, and Daniel Lichtenwalner, Jesse Jur, and Angus Kingon of North Carolina State University. The paper investigates the reliability of nMOSFETs with lanthanum-doped HfO2 dielectrics, whose device performance and voltage threshold are suitable for future technology nodes applications. The best paper is selected each year by the attendees and the program committee.

"It gives me great pleasure to congratulate our engineers for this prestigious recognition of their success as they continue to address the challenges of integrating new materials and device structures for functionality," said Raj Jammy, vice president of materials and emerging technologies at SEMATECH. "Quality work such as this paper - and those being presented by our technologists this year - is representative of SEMATECH's commitment to provide innovative and practical solutions for continued scaling of semiconductor technologies that can easily be incorporated in real-world manufacturing environments."

Additionally, at this year's conference, engineers from SEMATECH's FEP division delivered five technical papers describing new findings in advanced materials and device structures for continued scaling of semiconductor technologies. The papers outlined SEMATECH's leading-edge research related to high-k/metal gate (HKMG) materials and planar and non-planar CMOS technologies, including:

* Performance and Reliability of High-k/Metal Gate Stacks: Interfacial Layer Defects - examines high-pressure oxygen anneal (HPOA) and high-pressure hydrogen anneal (HPHA) processes applied to MOSFETs with metal electrode/high-k dielectric stacks.
* Mechanisms of Oxygen and Hydrogen Passivation using High Pressure Post-annealing Processes to Enhance the Performance of MOSFETs with Metal Gate/High-k Dielectric - examines results on the performance and reliability of the high-k/metal gate stack transistors and discuss physical properties of the defects affecting these characteristics.
* High Mobility SiGe Channel pMOSFETs Epitaxially Grown on Si (100) Substrates with HfSiO2 High-k Dielectric and Metal Gate - demonstrates high-mobility pMOSFETs on high quality epitaxial SiGe films selectively grown on Si substrates using a CVD system.
* Additive Process Induced Strain (APIS) Technology for Lg = 30nm Band-Edge High-k/Metal Gate nMOSFET - demonstrates that stressor spacer can be used to transfer stress into the channel for short channel devices in band-edge high-k/metal gate MOSFETs.
* Mitigation of CMOS Variability with Metal Gate - examines the variability of polysilicon gate compared to metal gate process.

The International Conference on Solid State Devices and Materials is an annual conference that provides a platform for technical experts to discuss the latest developments in solid-state devices and materials via presentations, seminars and plenary sessions. SEMATECH has been an active contributor to SSDM conferences since 2004. SSDM is one of many industry forums it uses to collaborate with scientists and engineers from corporations, universities and other research institutions, many of whom are research partners.

####

About SEMATECH
For 20 years, SEMATECH® (www.sematech.org) has set global direction, enabled flexible collaboration, and bridged strategic R&D to manufacturing. Today, we continue accelerating the next technology revolution with our nanoelectronics and emerging technology partners.

For more information, please click here

Contacts:
SEMATECH
Austin
Erica McGill
512-956-7446

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Chip Technology

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

Oddball enzyme provides easy path to synthetic biomaterials May 17th, 2017

Racyics Launches ‘makeChip’ Design Service Platform for GLOBALFOUNDRIES’ 22FDX® Technology: Racyics will provide IP and design services as a part of the foundry’s FDXcelerator™ Partner Program May 11th, 2017

Announcements

GLOBALFOUNDRIES and Chengdu Partner to Expand FD-SOI Ecosystem in China: More than $100M investment to establish a center of excellence for FDXTM FD-SOI design May 23rd, 2017

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Graphene-nanotube hybrid boosts lithium metal batteries: Rice University prototypes store 3 times the energy of lithium-ion batteries May 19th, 2017

Events/Classes

Leti Will Demo World’s-first WVGA 10-µm Pitch GaN Microdisplays for Augmented Reality Video at Display Week in Los Angles: Invited Paper also Will Present Leti’s Success with New Augmented Reality Technology That Reduces Pixel Pitch to Less than 5 Microns May 22nd, 2017

Oxford Instruments Asylum Research and Microscopy and Analysis Present the Webinar: “Video-Rate Atomic Force Microscopy Enables New Research Opportunities” May 9th, 2017

Graphene flagship steers towards higher technology readiness level May 4th, 2017

Precision NanoSystems @ CLINAM 2017 May 3rd, 2017

Grants/Sponsored Research/Awards/Scholarships/Gifts/Contests/Honors/Records

Zap! Graphene is bad news for bacteria: Rice, Ben-Gurion universities show laser-induced graphene kills bacteria, resists biofouling May 22nd, 2017

Gas gives laser-induced graphene super properties: Rice University study shows inexpensive material can be superhydrophilic or superhydrophobic May 15th, 2017

Fed grant backs nanofiber development: Rice University joins Department of Energy 'Next Generation Machines' initiative May 10th, 2017

'Hot' electrons don't mind the gap: Rice University scientists find nanogaps in plasmonic gold wires enhance voltage when excited May 8th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project