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SEMATECH Names Veteran Technologists to Lead Lithography Division: Bryan Rice and Stefan Wurm named Director and Associate DirectorAlbany, NY and Austin, TX | Posted on September 10th, 2008
Dr. Rice, who most recently served as the immersion program manager, replaces former Director Michael Lercel, who has returned to IBM from his SEMATECH assignment. Rice has been on assignment to SEMATECH from Intel Corporation since 2006. He has led SEMATECH's high index immersion research in the search for high refractive index lens and immersion fluid materials. Additionally, Rice has been instrumental in forming SEMATECH's double exposure program, focusing on the exploration of novel materials for the litho-litho-etch patterning approach.
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