Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > STS Celebrates Order for 100th Pegasus DRIE Module

Abstract:
Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a "Pegasus" Deep Reactive Ion Etch (DRIE) tool to Freescale Semiconductor ( www.freescale.com ). This order represents the 100th Pegasus module to be manufactured by STS and their parent company Sumitomo Precision Products Co., Ltd.

STS Celebrates Order for 100th Pegasus DRIE Module

NEWPORT, UK | Posted on July 15th, 2008

Earlier this year, Freescale announced that it had established an advanced MEMS 200mm (8-inch) production line to address growing sensors market demand. The newly added line at Freescale's Oak Hill Fab in Austin, Texas, complements the company's existing 150mm (6-inch) MEMS capacity in Sendai, Japan. Their new Pegasus etch tool will be used in the volume manufacturing of silicon-based MEMS for automotive, industrial, medical and consumer markets.

"We are excited at the advanced etch capability that the Pegasus DRIE platform will provide our fabs as we move into volume manufacturing of advanced MEMS products," Satoru Matsumoto, vice president of fab operations at Freescale, explained. "Freescale is actively developing new applications for deep silicon etching for both MEMS and other advanced product lines, and we believe the Pegasus will help enable these efforts."

Eizo Yasui, CEO of STS added, "STS and SPP are very proud to reach the landmark of 100 Pegasus modules, many of which have been installed on cluster platforms in volume production applications. We have established a worldwide installed base for this product in a relatively short time, proved the Pegasus to be truly production-worthy and gained much experience in addressing the needs of production customers."

####

About Surface Technology Systems plc
STS designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non 'mainstream' semiconductor devices. STS serves a range of applications in several emerging sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.

STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 900 systems.

For more information about STS please see http://www.stsystems.com

About Sumitomo Precision Products Co., Ltd

Sumitomo Precision Products Co., Ltd, headquartered in Amagasaki, Japan, has over the past 90 years expanded from their core field of aerospace products into such diverse areas as heat exchangers and heat-control systems, industrial machinery employing hydraulic control, cryopumps and equipment for semiconductor production, ozone generators for protecting the environment, and their unique motion sensors.

SPP purchased STS in 1995 and floated the company on the London Stock Exchange in 2000, retaining 66% of STS' shares. In 2007, SPP bought back 100% of STS shares and regaining sole ownership. The SPP Group had a turnover of 50,150 million Yen in 2006, and employs over 1200 people worldwide.

About Freescale Semiconductor

Freescale Semiconductor is a global leader in the design and manufacture of embedded semiconductors for the automotive, consumer, industrial, networking and wireless markets. The privately held company is based in Austin, Texas, and has design, research and development, manufacturing or sales operations in more than 30 countries. Freescale is one of the world's largest semiconductor companies with 2007 sales of $5.7 billion (USD).

For more information about Freescale please see www.freescale.com

For more information, please click here

Contacts:
Surface Technology Systems plc
Imperial Park
Newport
NP10 8UJ
UK

Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

Copyright © PR Newswire Association LLC.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

A new product to help combat mouldy walls, thanks to technology developed at the ICN2 December 14th, 2017

Sandia researchers make solid ground toward better lithium-ion battery interfaces: Reducing the traffic jam in batteries December 13th, 2017

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Columbia engineers create artificial graphene in a nanofabricated semiconductor structure: Researchers are the first to observe the electronic structure of graphene in an engineered semiconductor; finding could lead to progress in advanced optoelectronics and data processing December 13th, 2017

MEMS

First Capacitive Transducer with 13nm Gap July 27th, 2017

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017

Engineers shrink microscope to dime-sized device February 17th, 2017

Announcements

A new product to help combat mouldy walls, thanks to technology developed at the ICN2 December 14th, 2017

Sandia researchers make solid ground toward better lithium-ion battery interfaces: Reducing the traffic jam in batteries December 13th, 2017

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Columbia engineers create artificial graphene in a nanofabricated semiconductor structure: Researchers are the first to observe the electronic structure of graphene in an engineered semiconductor; finding could lead to progress in advanced optoelectronics and data processing December 13th, 2017

Tools

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

New-Contracts/Sales/Customers

Solid State Laser manufacturer Lasertel Inc. purchases an Oxford Instruments ICPCVD advanced deposition solution for improved device performance November 3rd, 2017

GLOBALFOUNDRIES and Soitec Enter Into Long-term Supply Agreement on FD-SOI Wafers: Strategic milestone to help guarantee a secure, high-volume supply of FD-SOI technology September 20th, 2017

Probiotics: Novel biosynthetic tool to develop metallic nanoparticles: This research article by Dr. Nida Akhtar et al has been published in Recent Patents on Drug Delivery & Formulation, Volume 11, Issue 1, 2017 July 20th, 2017

Here's a tip: Indented cement shows unique properties: Rice University models reveal nanoindentation can benefit crystals in concrete July 20th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project