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Home > Press > STS Celebrates Order for 100th Pegasus DRIE Module

Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a "Pegasus" Deep Reactive Ion Etch (DRIE) tool to Freescale Semiconductor ( ). This order represents the 100th Pegasus module to be manufactured by STS and their parent company Sumitomo Precision Products Co., Ltd.

STS Celebrates Order for 100th Pegasus DRIE Module

NEWPORT, UK | Posted on July 15th, 2008

Earlier this year, Freescale announced that it had established an advanced MEMS 200mm (8-inch) production line to address growing sensors market demand. The newly added line at Freescale's Oak Hill Fab in Austin, Texas, complements the company's existing 150mm (6-inch) MEMS capacity in Sendai, Japan. Their new Pegasus etch tool will be used in the volume manufacturing of silicon-based MEMS for automotive, industrial, medical and consumer markets.

"We are excited at the advanced etch capability that the Pegasus DRIE platform will provide our fabs as we move into volume manufacturing of advanced MEMS products," Satoru Matsumoto, vice president of fab operations at Freescale, explained. "Freescale is actively developing new applications for deep silicon etching for both MEMS and other advanced product lines, and we believe the Pegasus will help enable these efforts."

Eizo Yasui, CEO of STS added, "STS and SPP are very proud to reach the landmark of 100 Pegasus modules, many of which have been installed on cluster platforms in volume production applications. We have established a worldwide installed base for this product in a relatively short time, proved the Pegasus to be truly production-worthy and gained much experience in addressing the needs of production customers."


About Surface Technology Systems plc
STS designs and manufactures a range of highly specialized systems incorporating innovative technology used in the production of semiconductors and related devices and is a leader in plasma based etch and deposition technologies for processing non 'mainstream' semiconductor devices. STS serves a range of applications in several emerging sectors within the telecommunications, data storage, advanced packaging, MEMS and Nanotechnology.

STS is the market leader in deep silicon etching for the growing MEMS market, offering patent-protected technology. In addition, STS has a strong presence in each of its other served markets and distributes its process solutions worldwide through an experienced sales and service operation. The Group currently markets in over 30 countries and has an installed base of over 900 systems.

For more information about STS please see

About Sumitomo Precision Products Co., Ltd

Sumitomo Precision Products Co., Ltd, headquartered in Amagasaki, Japan, has over the past 90 years expanded from their core field of aerospace products into such diverse areas as heat exchangers and heat-control systems, industrial machinery employing hydraulic control, cryopumps and equipment for semiconductor production, ozone generators for protecting the environment, and their unique motion sensors.

SPP purchased STS in 1995 and floated the company on the London Stock Exchange in 2000, retaining 66% of STS' shares. In 2007, SPP bought back 100% of STS shares and regaining sole ownership. The SPP Group had a turnover of 50,150 million Yen in 2006, and employs over 1200 people worldwide.

About Freescale Semiconductor

Freescale Semiconductor is a global leader in the design and manufacture of embedded semiconductors for the automotive, consumer, industrial, networking and wireless markets. The privately held company is based in Austin, Texas, and has design, research and development, manufacturing or sales operations in more than 30 countries. Freescale is one of the world's largest semiconductor companies with 2007 sales of $5.7 billion (USD).

For more information about Freescale please see

For more information, please click here

Surface Technology Systems plc
Imperial Park
NP10 8UJ

Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

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