Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > KLA-Tencor Launches First Computational Lithography Tool To Address Double-Patterning Challenges

Abstract:
Today KLA-Tencor (NASDAQ:KLAC) introduced the latest version of its industry-leading computational lithography tool, PROLITH™ 11. The new tool enables users for the first time to evaluate current double-patterning schemes and cost-effectively explore alternate solutions to lithography challenges in design, materials and process development. This new computational lithography tool also supports single-pass patterning and immersion technologies.

KLA-Tencor Launches First Computational Lithography Tool To Address Double-Patterning Challenges

San Jose, CA | Posted on July 10th, 2008

"The emergence of double-patterning lithography has challenged circuit designers and chipmakers because of the dramatic increase in lithography complexity and experimental costs," noted Ed Charrier, vice president and general manager of KLA-Tencor's Process Control Information Division. "Computational lithography has become an essential tool for controlling these costs. Among computational lithography tools, PROLITH 11 has the unique ability to allow engineers to explore wide ranges of design, material or process conditions in order to solve a particular problem — without having to spend the resources of a fab."

Double-patterning lithography (DPL) is a method for constructing the small features of advanced devices by dividing the pattern into two interleaved patterns. This means that a double mask set and new photoresist materials are required for DPL layers, amplifying process complexity and cost. With experts predicting the price of a mask set to exceed $4M at the 32nm node, fabs are strongly motivated to thoroughly characterize how a two-pass, double-mask, dual-resist strategy will print on the wafer under the natural range of process conditions, so that the mask designs, materials and process parameters are right the first time.

PROLITH 11 allows engineers to model this complex system with unprecedented precision, and then use the model to optimize the system by exploring the effects of small or large changes in mask design, photoresist properties, and scanner or process parameters on the printed pattern. By using PROLITH 11, fabs avoid time-consuming, expensive experiments on product wafers which delay time to market and result in thousands of scrapped processed wafers.

As one tool in a complete suite of systems from KLA-Tencor designed to address advanced lithography challenges, PROLITH 11 has been shipped to leading chipmakers in the U.S., Japan and Taiwan. The PROLITH platform comprises the most widely used lithography simulation toolset on the market, installed in the development groups of virtually every chipmaker currently producing 65nm and 45nm devices.

PROLITH 11 TECHNOLOGY SUMMARY


Fundamental and Rigorous Calculations





PROLITH 11 is the only lithography simulator to model the topography specific to double patterning and calculate how variability in printing the first layer could affect the second layer.



PROLITH 11 results are based on fundamental optical and kinetic models.



PROLITH can accommodate:


• Complex film stacks


• Embedded substrate topography



PROLITH 11 resist models can be calibrated using data from IC manufactures, resist vendors, research groups and consortia.


Extrapolation of Results for Problem Solving





The PROLITH 11 model can be used to explore:


• New mask designs


• New photoresists


• Different scanner settings


• Different process parameters

Complementary to Full-Chip Simulators

Complementary to full-chip simulators, which are designed to optimize an entire chip in less than 24 hours, PROLITH models a small area of the die in full detail in a few minutes. While the results of full-chip simulators apply to one set of design and process conditions, PROLITH results can be extrapolated significantly from the conditions under which the model was generated, so that various solutions can be explored. PROLITH results can be used to determine the optimum conditions under which full-chip simulators are run.

####

About KLA-Tencor
KLA-Tencor is the world’s leading provider of process control and yield management solutions for the semiconductor and related microelectronics industries. Headquartered in San Jose, California, the Company has sales and service offices around the world. An S&P 500 company, KLA-Tencor is traded on the NASDAQ Global Select Market under the symbol KLAC.

For more information, please click here

Contacts:
KLA-Tencor
Ed Lockwood
408-875-9529 (Investor Relations)
Sr. Director, Investor Relations

Meggan Powers
408-875-8733 (Media Relations)
Sr. Director, Corporate Communications

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Piezoelectricity in a 2-D semiconductor: Berkeley Lab researchers discovery of piezoelectricty in molybdenum disulfide holds promise for future MEMS December 22nd, 2014

Quantum physics just got less complicated December 22nd, 2014

Enzyme Biosensor Used for Rapid Measurement of Drug December 22nd, 2014

Universality of charge order in cuprate superconductors: Charge order has been established in another class of cuprate superconductors, highlighting the importance of the phenomenon as a general property of these high-Tc materials December 22nd, 2014

Chip Technology

Instant-start computers possible with new breakthrough December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

Pb islands in a sea of graphene magnetise the material of the future December 16th, 2014

Stanford team combines logic, memory to build a 'high-rise' chip: Today circuit cards are laid out like single-story towns; Futuristic architecture builds layers of logic and memory into skyscraper chips that would be smaller, faster, cheaper -- and taller December 15th, 2014

Announcements

Piezoelectricity in a 2-D semiconductor: Berkeley Lab researchers discovery of piezoelectricty in molybdenum disulfide holds promise for future MEMS December 22nd, 2014

Quantum physics just got less complicated December 22nd, 2014

Enzyme Biosensor Used for Rapid Measurement of Drug December 22nd, 2014

Universality of charge order in cuprate superconductors: Charge order has been established in another class of cuprate superconductors, highlighting the importance of the phenomenon as a general property of these high-Tc materials December 22nd, 2014

Tools

Atom-thick CCD could capture images: Rice University scientists develop two-dimensional, light-sensitive material December 20th, 2014

Oregon researchers glimpse pathway of sunlight to electricity: Collaboration with Lund University uses modified UO spectroscopy equipment to study 'maze' of connections in photoactive quantum dots December 19th, 2014

Switching to spintronics: Berkeley Lab reports on electric field switching of ferromagnetism at room temp December 17th, 2014

ORNL microscopy pencils patterns in polymers at the nanoscale December 17th, 2014

Printing/Lithography/Inkjet/Inks

Nanoshaping method points to future manufacturing technology December 11th, 2014

New technique allows low-cost creation of 3-D nanostructures December 8th, 2014

SEMATECH Reports Significant Progress in EUV Resist Outgas Testing: Technologists from SEMATECH and JSR demonstrate outgas test results that further enable EUV lithography for high-volume manufacturing readiness December 3rd, 2014

Canatu Launches CNB In-Mold Film for Transparent Touch on 3D Surfaces –in Cars, Household Appliances, Wearables, Portables November 20th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE