Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Tegal Receives 901ACS Plasma Etch System Order and ACS Upgrade Orders From Leading Maker of Commercial BioMEMS-Based Medical Testing Products

Abstract:
ACS Functionality and Sophistication Provide Winning Combination of UI Features and Software Robustness for Medical Device Production

Tegal Receives 901ACS Plasma Etch System Order and ACS Upgrade Orders From Leading Maker of Commercial BioMEMS-Based Medical Testing Products

PETALUMA, CA | Posted on July 10th, 2008

Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of MEMS, integrated circuits, and nanotechnology devices, announced today that the Company received an order for a Tegal 901ACS plasma etch tool, and additional orders for Tegal 900 Series ACS (Advanced Control System) upgrades, from a leading maker of BioMEMS-based medical testing products. The Tegal 901ACS system will ship this quarter, and will join the customer's existing Tegal 901 systems which, as part of this sales order package, will be upgraded by Tegal to Tegal Advanced Control System units.

"Our customer considered the available options for control system upgrades to Tegal 900 Series plasma etch tools, and chose the Tegal Advanced Control System upgrade for their new, and legacy, Tegal 901 tools," said John Almerico, Marketing Director, Etch Products, Tegal Corporation. "The Tegal 901ACS value proposition, which includes robust, feature-rich control software, a touchscreen user interface, new standards for wafer transport accuracy and repeatability, and Tegal's award-winning reputation for after-sales service and spare parts support, is resulting in more and more wins like this for Tegal, particularly in mission-critical applications like BioMEMS device manufacturing for the medical products market."

The Tegal 901ACS is the latest in a series of capacitively coupled diode plasma etch systems produced by Tegal, the industry pioneer in commercial single-wafer plasma etching. Over 1,500 systems in the 900 Series have been shipped to date, providing reliable and cost-effective support for a wide range of plasma etch processes. The Tegal 900ACS Series is optimized for pad, zero layer, non-selective nitride, backside, and planarization etching, as well as for photoresist descum, oxide, nitride, poly, and compound materials applications for MEMS, HB-LED, TFH, and Optoelectronic device fabrication. The 900ACS and 980ACS Series platforms incorporate a production-proven transport system that can accommodate 75 mm to 200 mm round, square or rectangular substrates.

The ACS upgrade is available exclusively from Tegal as a field or factory retrofit for the existing installed base of Tegal 900 and 980 series systems. The ACS features a fully integrated graphical user interface, parametric data logging, full factory automation support, and throughput enhancements for the wafer-handling system. For information on the 900 series ACS upgrade package, please contact your local Tegal representative, or email .

Tegal will be exhibiting at SEMICON West 2008, in San Francisco, CA, on 15, 16, and 17 July 2008. Please visit us at the Moscone Center, South Hall, Booth #1921.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
John Almerico
707-763-5600
(Marketing Director – Etch Products)
or
The Blueshirt Group
Gina DeBoutez
415-217-7722

Chris Danne
415-217-7722

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ultrathin device harvests electricity from human motion July 23rd, 2017

The July 23 close fly-by of asteroid 2017 BS5 is explored in a Q&A with Dr. John S. Lewis, chief scientist at Deep Space Industries July 23rd, 2017

Scientists announce the quest for high-index materials: All-dielectric nanophotonics: The quest for better materials and fabrication techniques July 22nd, 2017

Pulses of electrons manipulate nanomagnets and store information: Scientists use electron pulses to create and manipulate nanoscale magnetic excitations that can store data July 21st, 2017

MEMS

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017

Engineers shrink microscope to dime-sized device February 17th, 2017

Leti Coordinating Project to Adapt Obstacle-Detection Technology Used in Autonomous Cars for Portable and Wearable Systems: INSPEX to Combine Knowhow of Nine European Organizations to Create Portable and Wearable Spatial-Exploration Systems February 2nd, 2017

Announcements

Ultrathin device harvests electricity from human motion July 23rd, 2017

The July 23 close fly-by of asteroid 2017 BS5 is explored in a Q&A with Dr. John S. Lewis, chief scientist at Deep Space Industries July 23rd, 2017

Scientists announce the quest for high-index materials: All-dielectric nanophotonics: The quest for better materials and fabrication techniques July 22nd, 2017

Pulses of electrons manipulate nanomagnets and store information: Scientists use electron pulses to create and manipulate nanoscale magnetic excitations that can store data July 21st, 2017

Tools

Scientists announce the quest for high-index materials: All-dielectric nanophotonics: The quest for better materials and fabrication techniques July 22nd, 2017

Coupling a nano-trumpet with a quantum dot enables precise position determination July 14th, 2017

Nanometrics to Announce Second Quarter Financial Results on August 1, 2017 July 14th, 2017

Nanometrics Introduces SpectraProbe Analysis Software: Advanced software and algorithms enhancing Nanometrics metrology fleet capabilities fab-wide July 13th, 2017

Events/Classes

Nanometrics to Announce Second Quarter Financial Results on August 1, 2017 July 14th, 2017

Nanometrics Introduces SpectraProbe Analysis Software: Advanced software and algorithms enhancing Nanometrics metrology fleet capabilities fab-wide July 13th, 2017

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Nanometrics to Participate in the 9th Annual CEO Investor Summit 2017: Accredited investor and publishing research analyst event held concurrently with SEMICON West and Intersolar 2017 in San Francisco June 27th, 2017

New-Contracts/Sales/Customers

Probiotics: Novel biosynthetic tool to develop metallic nanoparticles: This research article by Dr. Nida Akhtar et al has been published in Recent Patents on Drug Delivery & Formulation, Volume 11, Issue 1, 2017 July 20th, 2017

Here's a tip: Indented cement shows unique properties: Rice University models reveal nanoindentation can benefit crystals in concrete July 20th, 2017

NMRC, University of Nottingham chooses the Quorum Q150 coater for its reliable and reproducible film thickness when coating samples with iridium June 27th, 2017

Park Systems Introduces Park NX12 for Unsurpassed Affordable High Resolution NanoScale Imaging Required for Advanced Analytical Chemistry, Materials Research, and Multi-User Facility June 5th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project