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Home > Press > Detecting smallest contaminations on semiconductors with aid of synchrotron radiation

Abstract:
PTB, together with European partners, is doing research in the field of semiconductor analysis

Detecting smallest contaminations on semiconductors with aid of synchrotron radiation

Germany | Posted on July 10th, 2008

Smaller, more accurate, higher performance and lower priced - that is the formula for success for micro- and nanoelectronics. Miniaturisation plays a crucial economic role to-day and contributes significantly to the key technologies of the 21st century; however, the smaller the structures, the more susceptible they are to minimal contaminations. Within the scope of ANNA, the European cooperation project, the Physikalisch-Technische Bundesanstalt (PTB) is working in its laboratory at the electron storage ring BESSY II in Berlin for the first time, together with external users, at selected measuring sites for the use of synchrotron radiation. The international cooperation under the umbrella of ANNA is to concentrate research competence Europe-wide. In this case, it is a matter of findings on the physical-chemical characteristics of semiconductor surfaces and nanolayers as well as the further development of reference-specimen-free analysis methods for detect-ing the surface contamination and layer characteristics.

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About Physikalisch-Technische Bundesanstalt (PTB)
Url of ANNA :
www.anna-i3.org

Further PTB News:

* Summer School provides metrology at its finest (July 3)
* The significance of mass - New issue of PTB-Mitteilungen (June 30)
* Calibrating network analysers more accurately (June 27)
* The groundhogs have been let loose (June 24)
* PTB puts synchrotron storage ring into operation (June 20)

For more information, please click here

Contacts:
Dr. Burkhard Beckhoff
Department 7.14 X-ray Spectrometry
phone 0049-30-6392 5091

Copyright © Physikalisch-Technische Bundesanstalt (PTB)

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