Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > BASF and Evonik co-develop advanced CMP slurries

Abstract:
Enhanced cost effectiveness and quality of ceria-based slurries to face future challenges

BASF and Evonik co-develop advanced CMP slurries

Germany | Posted on July 3rd, 2008

Evonik Industries AG and BASF have agreed to collaborate on the development of ceria-based slurries for fabricating computer chips. The agreement will leverage BASF's chemical expertise, global marketing and distribution capabilities with Evonik´s leading position in nanomaterials. The resulting slurries are expected to be commercialized in 2009.

Slurries containing nanoscale materials such as ceria are used to polish the silicon dioxide surfaces of wafers to produce highly planar surfaces in a process known as chemical-mechanical polishing, or CMP. The most important processing steps of integrated circuit (IC) fabrication are STI (shallow trench isolation), one of the fastest growing applications requiring CMP slurries, and ILD (inter-layer dielectric).

"With the introduction of smaller node sizes, the requirements of the CMP process have become increasingly critical to IC fabrication. Evonik and BASF believe that this project will enable both parties to stay ahead in the CMP technology and provide next generation solutions and materials for the IC industry," said Dr. Iordanis Savvopoulos, Vice President Technology Solutions in Evonik´s Business Unit Inorganic Materials.

"Chemistry plays an important role in the development of IC products. Combining BASF's extensive background in chemistry and long years of experience in the IC industry with the expertise of Evonik in abrasive particles, we can provide intelligent solutions that meet the increasingly stringent requirements in the market," said Dr. Klemens Mathauer, head of CMP business of BASF's global business unit Electronic Materials.

Evonik´s contribution to the joint development includes various grades of cerium oxide as important fundamental components and formulation know-how for these particles. BASF will contribute its CMP slurry formulation chemistry, production and application know-how, backed by its high-tech laboratories in Europe and Asia.

####

About BASF
BASF is the world’s leading chemical company: The Chemical Company. Its portfolio ranges from oil and gas to chemicals, plastics, performance products, agricultural products and fine chemicals. As a reliable partner BASF helps its customers in virtually all industries to be more successful. With its high-value products and intelligent solutions, BASF plays an important role in finding answers to global challenges such as climate protection, energy efficiency, nutrition and mobility. BASF has more than 95,000 employees and posted sales of almost €58 billion in 2007.

About Evonik
Evonik Industries is the creative industrial group from Germany which operates in three business areas: Chemicals, Energy and Real Estate. Evonik is a global leader in specialty chemicals, an expert in power generation from hard coal and renewable energies, and one of the largest private residential real estate companies in Germany. Our strengths are creativity, specialization, continuous self-renewal, and reliability. Evonik is active in over 100 countries around the world. In its fiscal year 2007 about 43,000 employees generated sales of about €14.4 billion and an operating profit (EBIT) of more than €1.3 billion. Further information on Evonik is available on the Internet at www.evonik.com.

For more information, please click here

Copyright © BASF

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Metal oxide sandwiches: New option to manipulate properties of interfaces February 8th, 2016

Canadian physicists discover new properties of superconductivity February 8th, 2016

Leading bugs to the death chamber: A kinder face of cholesterol February 8th, 2016

From allergens to anodes: Pollen derived battery electrodes February 8th, 2016

Chemistry

Scientists take key step toward custom-made nanoscale chemical factories: Berkeley Lab researchers part of team that creates new function in tiny protein shell structures February 6th, 2016

Discovery of the specific properties of graphite-based carbon materials February 6th, 2016

Nature Materials: Smallest lattice structure worldwide: 3-D lattice with glassy carbon struts and braces of less than 200 nm in diameter has higher specific strength than most solids February 3rd, 2016

Researchers develop completely new kind of polymer: Hybrid polymers could lead to new concepts in self-repairing materials, drug delivery and artificial muscles January 30th, 2016

Chip Technology

Metal oxide sandwiches: New option to manipulate properties of interfaces February 8th, 2016

The iron stepping stones to better wearable tech without semiconductors February 8th, 2016

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Scientists guide gold nanoparticles to form 'diamond' superlattices: DNA scaffolds cage and coax nanoparticles into position to form crystalline arrangements that mimic the atomic structure of diamond February 4th, 2016

Announcements

Metal oxide sandwiches: New option to manipulate properties of interfaces February 8th, 2016

Canadian physicists discover new properties of superconductivity February 8th, 2016

Leading bugs to the death chamber: A kinder face of cholesterol February 8th, 2016

From allergens to anodes: Pollen derived battery electrodes February 8th, 2016

Alliances/Trade associations/Partnerships/Distributorships

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

Imec and Cloudtag Collaborate on High Quality Frictionless Wearables for Lifestyle Coaching: Next-generation health and fitness tracker Cloudtag TrackTM launched at CES 2016 January 7th, 2016

Technical partnership at the top – Oxford Instruments and Zurich Instruments announce a technical collaboration for low temperature physics January 7th, 2016

Production of Graphene Oxide Nanosheets to Economize Fuel Cells January 1st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic