Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > New Process Creates 3-D Nanostructures with Magnetic Materials

Working in the trenches: Transmission electron microscopy image of a thin cross section of 160 nanometer trenches shows deposited nickel completely filling the features without voids. (Color added for clarity.)

Credit: NIST
Working in the trenches: Transmission electron microscopy image of a thin cross section of 160 nanometer trenches shows deposited nickel completely filling the features without voids. (Color added for clarity.)

Credit: NIST

Abstract:
Materials scientists at the National Institute of Standards and Technology (NIST) have developed a process to build complex, three-dimensional nanoscale structures of magnetic materials such as nickel or nickel-iron alloys using techniques compatible with standard semiconductor manufacturing. The process, described in a recent paper,* could enable whole new classes of sensors and microelectromechanical (MEMS) devices.

New Process Creates 3-D Nanostructures with Magnetic Materials

GAITHERSBURG, MD | Posted on June 26th, 2008

The NIST team also demonstrated that key process variables are linked to relatively quick and inexpensive electrochemical measurements, pointing the way to a fast and efficient way to optimize the process for new materials.

The NIST process is a variation of a technique called "Damascene metallization" that often is used to create complicated three-dimensional copper interconnections, the "wiring" that links circuit elements across multiple layers in advanced, large-scale integrated circuits. Named after the ancient art of creating designs with metal-in-metal inlays, the process involves etching complex patterns of horizontal trenches and vertical "vias" in the surface of the wafer and then uses an electroplating process to fill them with copper. The high aspect ratio features may range from tens of nanometers to hundreds of microns in width. Once filled, the surface of the disk is ground and polished down to remove the excess copper, leaving behind the trench and via pattern.

The big trick in Damascene metallization is ensuring that the deposited metal completely fills in the deep, narrow trenches without leaving voids. This can be done by adding a chemical to the electrodeposition solution to prevent the metal from building up too quickly on the sides of the trenches and by careful control of the deposition process, but both the chemistry and the process variables turn out to be significantly different for active ferromagnetic materials than for passive materials like copper. In addition to devising a working combination of electrolytes and additives to do Damascene metallization with nickel and a nickel-iron alloy, the NIST team demonstrated straightforward measurements for identifying and optimizing the feature-filling process thereby providing an efficient path for the creation of quality nanoscale ferromagnet structures.

The new process makes it feasible to create complex three-dimensional MEMS devices such as inductors and actuators that combine magnetic alloys with non-magnetic metallizations such as copper interconnects using existing production systems.

* C.H. Lee, J.E. Bonevich, J.E. Davies and T.P. Moffat. Magnetic materials for three-dimensional Damascene metallization: void-free electrodeposition of Ni and Ni70Fe30 using 2-mercapto-5-benzimidazolesulfonic acid. Journal of The Electrochemical Society, 155 (7) D499-D507 (2008).

####

About NIST
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Department of Commerce. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life.

For more information, please click here

Contacts:
Michael Baum

(301) 975-2763

Copyright © NIST

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Pulses of electrons manipulate nanomagnets and store information: Scientists use electron pulses to create and manipulate nanoscale magnetic excitations that can store data July 21st, 2017

The first light atomic nucleus with a second face July 20th, 2017

Semiliquid chains pulled out of a sea of microparticles July 20th, 2017

Harnessing light to drive chemical reactions July 19th, 2017

MEMS

Bosch announces high-performance MEMS acceleration sensors for wearables June 27th, 2017

Smart multi-layered magnetic material acts as an electric switch: New study reveals characteristic of islands of magnetic metals between vacuum gaps, displaying tunnelling electric current March 1st, 2017

Engineers shrink microscope to dime-sized device February 17th, 2017

Leti Coordinating Project to Adapt Obstacle-Detection Technology Used in Autonomous Cars for Portable and Wearable Systems: INSPEX to Combine Knowhow of Nine European Organizations to Create Portable and Wearable Spatial-Exploration Systems February 2nd, 2017

Discoveries

Pulses of electrons manipulate nanomagnets and store information: Scientists use electron pulses to create and manipulate nanoscale magnetic excitations that can store data July 21st, 2017

The first light atomic nucleus with a second face July 20th, 2017

Semiliquid chains pulled out of a sea of microparticles July 20th, 2017

Here's a tip: Indented cement shows unique properties: Rice University models reveal nanoindentation can benefit crystals in concrete July 20th, 2017

Materials/Metamaterials

Carbon displays quantum effects July 13th, 2017

Meniscus-assisted technique produces high efficiency perovskite PV films July 7th, 2017

ANU invention may help to protect astronauts from radiation in space July 3rd, 2017

Brookhaven Scientists Study Role of 'Electrolyte Gating' in Functional Oxide Materials July 3rd, 2017

Announcements

Pulses of electrons manipulate nanomagnets and store information: Scientists use electron pulses to create and manipulate nanoscale magnetic excitations that can store data July 21st, 2017

Probiotics: Novel biosynthetic tool to develop metallic nanoparticles: This research article by Dr. Nida Akhtar et al has been published in Recent Patents on Drug Delivery & Formulation, Volume 11, Issue 1, 2017 July 20th, 2017

The first light atomic nucleus with a second face July 20th, 2017

Semiliquid chains pulled out of a sea of microparticles July 20th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project