Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Tegal Receives Advanced Etch System Order From SVTC Technologies for Non-Volatile Memory Development

Abstract:
Tegal and SVTC Collaborating on Novel Etch Processes for Memory and MEMS Applications

Tegal Receives Advanced Etch System Order From SVTC Technologies for Non-Volatile Memory Development

PETALUMA, CA | Posted on June 12th, 2008

Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, announced today that the Company received an order for a Tegal 6500 HRe-™ plasma etch tool from SVTC Technologies, San Jose, California. The Tegal system will ship this quarter, and will be installed in SVTC's 200mm development foundry in San Jose.

SVTC, which operates the leading process development foundry in the U.S., serves the rapidly growing novel memory and transistor market, along with the MEMS/MOEMS, photovoltaics, biotechnology, image sensors and high-voltage markets. Tegal also announced, as part of the plasma etch equipment order, that Tegal and SVTC are working together on process recipe development for these applications.

According to Wilbur Catabay, Vice President of Technology, SVTC, "Tegal's production-proven 6500 platform was the obvious choice for our customers with advanced memory development programs. With the Tegal tool, we can offer even more significant time-to-market advantages for the specialized materials, processes, and integration requirements of advanced memory device development and productization. In addition, the 6500 platform will be important for other customers who need advanced plasma etch capabilities. We see Tegal as our preferred strategic etch supplier for these important applications."

"Tegal is pleased to have our 6500 Series system added to the impressive 8-inch processing tool set SVTC has already assembled," said Vahan Tchakerian, Vice President, Global Sales and Field Operations, Tegal Corporation. "The Tegal 6500 will support SVTC's companies needing specialized metal film etch, including but not limited to applications in non-volatile memory. We also expect to have a good collaboration with SVTC on process development for leading-edge applications in the advanced memory space, along with the other etch markets that SVTC serves."

The Tegal 6500 system is a high-density plasma etch tool featuring the unique HRe-™ capacitively coupled plasma etch reactor, and Tegal's patented dual-frequency RF power technology and magnetic plasma confinement. Together with its on-board photoresist strip module and spin-rinse-dry station, the Tegal system is a critical enabler for etching the metal electrodes and storage cell materials used in advanced memory fabrication, as well as other ferroelectric, magnetic, high-K dielectric, compound semiconductor, and interconnect materials found in the MEMS/MOEMS, photovoltaic, bio-tech and hi-voltage markets.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

Tegal will be exhibiting at SEMICON West 2008, in San Francisco, CA, on 15, 16, and 17 July 2008. Please visit us at the Moscone Center, South Hall, Booth #1921.

About SVTC Technologies

SVTC Technologies enables the development and commercialization of innovative semiconductor-based technologies and products in an accelerated, cost-effective and IP-secure way. Since joining forces with ATDF, SVTC now offers an even more powerful suite of leading-edge equipment and services, including full-scale 8-inch (200mm) and 12-inch (300mm) CMOS and MEMS process capabilities, development support tools and commercialization services. SVTC’s San Jose, Calif., and Austin, Texas, facilities deliver operational excellence and faster time to revenue, allowing customers to create real, manufacturing-ready products for rapidly growing markets such as MEMS/MOEMS, photovoltaics, biotech, novel memory, image sensors and high-voltage applications.

For more information about SVTC Technologies, please visit: /www.svtc.com/.

For more information, please click here

Contacts:
Tegal Corporation
John Almerico
707-763-5600
Marketing Director – Etch Products
or
The Blueshirt Group
Gina DeBoutez
415-217-7722
Chris Danne
415-217-7722

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Color effects from transparent 3D printed nanostructures: New design tool automatically creates nanostructure 3D print templates for user-given colors Scientists present work at prestigious SIGGRAPH conference August 18th, 2018

Novel nanoparticle-based approach detects and treats oral plaque without drugs August 17th, 2018

UVA multidisciplinary engineering team designs technology for smart materials: The invention could lead to devices and manufactured goods, such as fabrics, that can dynamically regulate between thermally insulating and cooling August 17th, 2018

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Chip Technology

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Scientists create antilaser for ultracold atoms condensate August 16th, 2018

Flipping the switch on supramolecular electronics August 14th, 2018

Breaking down the Wiedemann-Franz law: In a study exploring the coupling between heat and particle currents in a gas of strongly interacting atoms, physicists at ETH Zurich find puzzling behaviours August 10th, 2018

Memory Technology

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

A molecular switch at the edge of graphene July 27th, 2018

Magnetic skyrmions: Not the only ones of their class: Jülich researchers discover a new type of magnetic particle-like object for data storage devices of the future June 28th, 2018

Tunable diamond string may hold key to quantum memory: A process similar to guitar tuning improves storage time of quantum memory May 24th, 2018

Announcements

Color effects from transparent 3D printed nanostructures: New design tool automatically creates nanostructure 3D print templates for user-given colors Scientists present work at prestigious SIGGRAPH conference August 18th, 2018

Novel nanoparticle-based approach detects and treats oral plaque without drugs August 17th, 2018

UVA multidisciplinary engineering team designs technology for smart materials: The invention could lead to devices and manufactured goods, such as fabrics, that can dynamically regulate between thermally insulating and cooling August 17th, 2018

Smallest transistor worldwide switches current with a single atom in solid electrolyte: Milestone of energy efficiency in information technology -- Publication in Advanced Materials August 17th, 2018

Tools

Novel nanoparticle-based approach detects and treats oral plaque without drugs August 17th, 2018

Nanometrics Delivers 100th: Atlas III System for Advanced Process Control Metrology Atlas III: Systems are qualified and in production for advanced devices in DRAM, 3D-NAND and Foundry/Logic August 2nd, 2018

Picosun’s ALD solutions make quality watches tick July 26th, 2018

Nanometrics Announces Participation in Upcoming Investor Conferences July 25th, 2018

Events/Classes

Kavli Lectures: New vision of nanomaterial synthesis and light-fueled space travel August 8th, 2018

Nanoscience and the future of healthcare kick off first day of ACS national meeting in Boston: Presidential events highlight safety, diversity and groundbreaking research August 2nd, 2018

Leti & CMP Announce World’s First Multi-Project-Wafer Service with Integrated Silicon OxRAM: Oxide-Based Resistive Ram Memory Platform Development for Backend Memories To Offer Non-Volatility Associated with Embedded Designs August 2nd, 2018

Strategic Materials Conference 2018 Highlights “Materials Shaping the Future of Electronics” July 30th, 2018

New-Contracts/Sales/Customers

Nanometrics Delivers 100th: Atlas III System for Advanced Process Control Metrology Atlas III: Systems are qualified and in production for advanced devices in DRAM, 3D-NAND and Foundry/Logic August 2nd, 2018

Picosun’s ALD solutions make quality watches tick July 26th, 2018

Barium ruthenate: A high-yield, easy-to-handle perovskite catalyst for the oxidation of sulfides July 13th, 2018

Oxford Instruments’ 22 Tesla superconducting magnet system commissioned at the UAM, making it the most intense magnetic field available outside a large international facility July 12th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project