Nanotechnology Now

Our NanoNews Digest Sponsors



Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Qcept Technologies Teams With CEA-Leti on Advanced Semiconductor Process Development

Abstract:
Qcept's ChemetriQ(R) non-visual defect inspection technology to assist
CEA-Leti in resolving critical yield issues for high-k and low-k
dielectrics, fully silicided metal gates, and other advanced processes

Qcept Technologies Teams With CEA-Leti on Advanced Semiconductor Process Development

Atlanta, GA | Posted on May 29th, 2008

Qcept Technologies Inc., the developer
of a new breed of wafer inspection systems for the semiconductor
manufacturing industry, announced that it has entered into a cooperative
agreement with CEA-Leti, one of the world's leading research organizations
dedicated to the advancement of micro- and nanotechnology. Qcept and
CEA-Leti will investigate potential new techniques for characterizing a
variety of leading-edge semiconductor materials and processes, including
high-k and low-k dielectrics, atomic layer deposition (ALD), fully
silicided (FUSI) metal gates, and advanced cleaning technologies.

Under the terms of the agreement, CEA-Leti is providing its extensive
know-how in advanced semiconductor process development to the partnership.
Qcept, in turn, has installed its ChemetriQ(R) non-visual defect (NVD)
wafer inspection technology in CEA-Leti's development facility in Grenoble,
France, where it is augmenting the organization's existing process
characterization capabilities.

"Advanced materials and processes, such as high-k dielectrics and metal
gates, have the potential to significantly enhance the performance of
future generations of semiconductor devices. However, their complexity can
give rise to new and unique yield problems, which require innovative
inspection methods," stated Adrien Danel, lead research engineer at
CEA-Leti. "This partnership with Qcept can help us to better understand the
yield issues surrounding these materials and processes in order to speed
their development and integration into full-scale manufacturing."

"Leti is at the forefront of many critical areas of semiconductor
research and development," stated Ralph Spicer, vice president of marketing
for Qcept. "Working with CEA-Leti will provide us with a unique opportunity
to have early access to these advanced technologies -- allowing us to
qualify our ChemetriQ solution for some of the industry's most cutting-edge
applications."

Qcept's ChemetriQ platform provides rapid, full-wafer, inline detection
of NVDs, such as organic and inorganic residue, metallic contaminants,
process- induced charging, watermarks and other non-visual residue defects
that are undetectable by optical inspection systems. ChemetriQ accomplishes
this by employing an innovative, non-destructive technology that detects
work function variations on the surface of semiconductor wafers. The
ChemetriQ platform is sensitive to 5E9 atoms/cm2 (one atom out of 200,000
per square centimeter), which exceeds the requirements outlined in the
International Technology Roadmap for Semiconductors (ITRS) for metallic
contamination detection down to the 22-nm node.

About CEA-Leti:

The CEA (French Atomic Energy Commission), a public organization for
technological research, carries out its missions in the domains of energy,
information and health technologies, and defense, building on the
foundations of fundamental research at the highest level. Strengthened by
the competence of its 15,000 researchers and collaborators, it is
recognized internationally and constitutes a strong source of original
ideas for public authorities, institutions and industries in France and
throughout Europe.

Located in Grenoble, France, CEA-Leti (Electronics and Information
Technology Laboratory of the French Atomic Energy Commission) is at the
leading edge of European research in microelectronics, microtechnology and
nanotechnology. It employs close to 1,000 people and deposits approximately
200 patents per year. With 28 start-ups created or in the course of
creation, it is one of the most important partners of the industrial world.
Instigator of the MINATEC(R) pole of innovation, CEA-Leti is also one of
its principal partners, alongside of the INP Grenoble (Grenoble Institute
of Technology) and local authorities. More information can be found at
www.cea.fr.

####

About Qcept Technologies Inc.
Qcept delivers wafer inspection solutions for non-visual defect (NVD)
detection in advanced semiconductor manufacturing. Qcept's ChemetriQ(R)
platform is being adopted in critical processes for inline, non-contact,
full-wafer detection of such NVDs as sub-monolayer organic and metallic
residues, process-induced charging, and other undesired surface non-
uniformities that cannot be detected by conventional optical inspection
equipment. More information can be found at www.qceptech.com.

ChemetriQ is a registered trademark of Qcept Technologies Inc. All
other trademarks are the property of their respective owners.

For more information, please click here

Copyright © PR Newswire Association LLC.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

Australian startup creates world’s first 100% cotton hydrophobic T-Shirts November 26th, 2014

The mysterious 'action at a distance' between liquid containers November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Chip Technology

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Nanometrics Announces Upcoming Investor Events November 19th, 2014

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

Announcements

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

Australian startup creates world’s first 100% cotton hydrophobic T-Shirts November 26th, 2014

The mysterious 'action at a distance' between liquid containers November 26th, 2014

'Giant' charge density disturbances discovered in nanomaterials: Juelich researchers amplify Friedel oscillations in thin metallic films November 26th, 2014

Alliances/Partnerships/Distributorships

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

New research project supports internationalisation in nano-research: Launch of new “Baltic Sea Network” November 22nd, 2014

UO-industry collaboration points to improved nanomaterials: University of Oregon microscope puts spotlight on the surface structure of quantum dots for designing new solar devices November 20th, 2014

A novel method for identifying the body’s ‘noisiest’ networks November 19th, 2014

Research partnerships

SEMATECH to Showcase Innovation and Advances in Manufacturing at SEMICON Japan 2014: SEMATECH experts will share the latest techniques, emerging trends and best practices in advanced manufacturing strategies and methodologies November 26th, 2014

The mysterious 'action at a distance' between liquid containers November 26th, 2014

Lawrence Livermore researchers develop efficient method to produce nanoporous metals November 25th, 2014

Vegetable oil ingredient key to destroying gastric disease bacteria: In mice, therapeutic nanoparticles dampen H. pylori bacteria and inflammation that lead to ulcers and gastric cancer November 25th, 2014

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More












ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE