Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Qcept Technologies Teams With CEA-Leti on Advanced Semiconductor Process Development

Abstract:
Qcept's ChemetriQ(R) non-visual defect inspection technology to assist
CEA-Leti in resolving critical yield issues for high-k and low-k
dielectrics, fully silicided metal gates, and other advanced processes

Qcept Technologies Teams With CEA-Leti on Advanced Semiconductor Process Development

Atlanta, GA | Posted on May 29th, 2008

Qcept Technologies Inc., the developer
of a new breed of wafer inspection systems for the semiconductor
manufacturing industry, announced that it has entered into a cooperative
agreement with CEA-Leti, one of the world's leading research organizations
dedicated to the advancement of micro- and nanotechnology. Qcept and
CEA-Leti will investigate potential new techniques for characterizing a
variety of leading-edge semiconductor materials and processes, including
high-k and low-k dielectrics, atomic layer deposition (ALD), fully
silicided (FUSI) metal gates, and advanced cleaning technologies.

Under the terms of the agreement, CEA-Leti is providing its extensive
know-how in advanced semiconductor process development to the partnership.
Qcept, in turn, has installed its ChemetriQ(R) non-visual defect (NVD)
wafer inspection technology in CEA-Leti's development facility in Grenoble,
France, where it is augmenting the organization's existing process
characterization capabilities.

"Advanced materials and processes, such as high-k dielectrics and metal
gates, have the potential to significantly enhance the performance of
future generations of semiconductor devices. However, their complexity can
give rise to new and unique yield problems, which require innovative
inspection methods," stated Adrien Danel, lead research engineer at
CEA-Leti. "This partnership with Qcept can help us to better understand the
yield issues surrounding these materials and processes in order to speed
their development and integration into full-scale manufacturing."

"Leti is at the forefront of many critical areas of semiconductor
research and development," stated Ralph Spicer, vice president of marketing
for Qcept. "Working with CEA-Leti will provide us with a unique opportunity
to have early access to these advanced technologies -- allowing us to
qualify our ChemetriQ solution for some of the industry's most cutting-edge
applications."

Qcept's ChemetriQ platform provides rapid, full-wafer, inline detection
of NVDs, such as organic and inorganic residue, metallic contaminants,
process- induced charging, watermarks and other non-visual residue defects
that are undetectable by optical inspection systems. ChemetriQ accomplishes
this by employing an innovative, non-destructive technology that detects
work function variations on the surface of semiconductor wafers. The
ChemetriQ platform is sensitive to 5E9 atoms/cm2 (one atom out of 200,000
per square centimeter), which exceeds the requirements outlined in the
International Technology Roadmap for Semiconductors (ITRS) for metallic
contamination detection down to the 22-nm node.

About CEA-Leti:

The CEA (French Atomic Energy Commission), a public organization for
technological research, carries out its missions in the domains of energy,
information and health technologies, and defense, building on the
foundations of fundamental research at the highest level. Strengthened by
the competence of its 15,000 researchers and collaborators, it is
recognized internationally and constitutes a strong source of original
ideas for public authorities, institutions and industries in France and
throughout Europe.

Located in Grenoble, France, CEA-Leti (Electronics and Information
Technology Laboratory of the French Atomic Energy Commission) is at the
leading edge of European research in microelectronics, microtechnology and
nanotechnology. It employs close to 1,000 people and deposits approximately
200 patents per year. With 28 start-ups created or in the course of
creation, it is one of the most important partners of the industrial world.
Instigator of the MINATEC(R) pole of innovation, CEA-Leti is also one of
its principal partners, alongside of the INP Grenoble (Grenoble Institute
of Technology) and local authorities. More information can be found at
www.cea.fr.

####

About Qcept Technologies Inc.
Qcept delivers wafer inspection solutions for non-visual defect (NVD)
detection in advanced semiconductor manufacturing. Qcept's ChemetriQ(R)
platform is being adopted in critical processes for inline, non-contact,
full-wafer detection of such NVDs as sub-monolayer organic and metallic
residues, process-induced charging, and other undesired surface non-
uniformities that cannot be detected by conventional optical inspection
equipment. More information can be found at www.qceptech.com.

ChemetriQ is a registered trademark of Qcept Technologies Inc. All
other trademarks are the property of their respective owners.

For more information, please click here

Copyright © PR Newswire Association LLC.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Sirrus's Issued Patent Portfolio Continues To Accelerate July 18th, 2018

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Chip Technology

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Nanometrics to Announce Second Quarter Financial Results on July 31, 2018 July 12th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

GLOBALFOUNDRIES Surpasses $2 Billion in Design Win Revenue on 22FDX Technology : With 50 client designs and growing, 22FDX proves its value as a cost-effective solution for power-sensitive applications July 9th, 2018

Announcements

Sirrus's Issued Patent Portfolio Continues To Accelerate July 18th, 2018

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Tuning into quantum: Scientists unlock signal frequency control of precision atom qubits July 16th, 2018

Alliances/Trade associations/Partnerships/Distributorships

Leti and Oscaro Partner on Letis New Low-Power, Low-Cost Transceiver to Track Parcels July 12th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

Leti & Partners Launch Pilot Program to Assess New Perception Sensors for Autonomous Vehicles July 5th, 2018

Powering the 21st Century with Integrated Photonics: UCSB-Led Team Selected for Demonstration of a Novel Waveguide Platform Which is Transparent Throughout the MWIR and LWIR Spectral Bands June 19th, 2018

Research partnerships

FEFU scientists reported on toxicity of carbon and silicon nanotubes and carbon nanofibers: Nanoparticles with a wide range of applying, including medicine, damage cells of microalgae Heterosigma akashivo badly. July 18th, 2018

In borophene, boundaries are no barrier: Rice U., Northwestern researchers make and test atom-thick boron's unique domains July 17th, 2018

Nano-kirigami: 'Paper-cut' provides model for 3D intelligent nanofabrication July 13th, 2018

Leti and Soitec Launch a New Substrate Innovation Center to Develop Engineered Substrate Solutions: Industry-inclusive hub promotes early collaboration and learning from substrate to system level July 11th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project