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AIXTRON AG announced the order of a 2-inch AIXTRON-Nanoinstruments R&D CNT system from the Chemistry Department at Kansas State University, USA. This combined thermal CVD and plasma enhanced CVD tool will be used for the development of sensors and microfluidics based on carbon nanotubes and nanofibers.
Prof. Jun Li, Kansas State University says: "Our research is focused on biosensors and biomedical devices based on carbon nanotubes (CNT) and nanofibers (CNF), and we work with several major companies in this field. The requirements for such devices are well controlled and aligned CNT/F and this new tool enables us exactly to do this. Nanoinstruments technology is already in use by several key players in CNT electronics, and it has a proven track record with its R&D reactors, which has not only demonstrated reproducibility and reliability in the field, but also flexibility for new process development. We are confident that this system will enable us to produce CNT material necessary for incorporation of CNT into next-generation sensor devices."
About AIXTRON AG
AIXTRON is a world leading supplier of Chemical Vapour Deposition (CVD), Atomic Vapor Deposition (AVD) and Atomic Layer Deposition (ALD) equipment to the semiconductor industry, with over 1,500 systems delivered to date. AIXTRON-Nanoinstruments is focused on serving the Nanotechnology market through the manufacture of plasma enhanced CVD systems for carbon nanotubes (CNT) and other nanomaterials. AIXTRON’s nanotube and nanowire track record includes customers such as El-Mul Technologies, Harvard University, MIT, Nanoconduction, Portland State University, Singapore Polytechnic, Santa Clara University, UC San Diego, University of Tuebingen, and Yale University.
The term AVD® is a registered trademark.
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