Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Tegal Corporation Announces Compact™ 360 NLD™ Beta Site Agreement With Leading High Brightness LED Manufacturer

Abstract:
Nano-Layer Deposition Tool and Processes Will Support Advanced Development for HB-LEDs

Tegal Corporation Announces Compact™ 360 NLD™ Beta Site Agreement With Leading High Brightness LED Manufacturer

PETALUMA, CA | Posted on April 9th, 2008

Tegal Corporation (NASDAQ:TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of LEDs, integrated circuits, MEMS, and nanotechnology devices, today announced that it has signed a beta site agreement to place a Tegal Compact™ 360 NLD™ system in the central process development laboratory of one of the world's foremost LED manufacturers. The Tegal Compact 360 NLD tool will ship in Summer 2008, and will be used for developing and qualifying conformal NLD passivation processes for HB-LED manufacturing.

The beta site agreement provides for Tegal and its NLD customer to continue their cooperation to develop and refine deposition processes for NLD thin films, to further optimize the electrical and physical properties of NLD thin films, and to confirm the applicability of NLD thin film deposition to HB-LED manufacturing. Additionally, Tegal and its customer will collect tool performance and reliability data from the Tegal Compact 360 NLD system as the Tegal NLD tool is exercised in production mode by the customer.

"We are proud to have been selected for this important development effort with the leading company in HB-LEDs," said Thomas Mika, President and CEO of Tegal. "We believe that our NLD technology has wide application in the fast-growing area of HB-LED manufacturing and are pleased to have this opportunity to demonstrate our capabilities in our first beta site for both NLD and the new Compact platform."

About The Tegal Compact™ 360 NLD™

The Tegal Compact 360 NLD cluster tool is a 200mm/300mm-capable bridge tool supporting Tegal's patented Nano-Layer Deposition processes. NLD is a unique, cyclic, MOCVD process for highly conformal coatings that incorporates plasma film treatment with each deposition cycle. Tegal's patented NLD processes offers all the benefits of atomic layer deposition, with the potential for a much higher deposition rate, and system throughput, than ALD. NLD also offers the benefit of utilizing common MOCVD precursor materials that are readily available for a wide variety of metal, metal oxide and metal nitride films. The Tegal Compact platform can accommodate all wafer sizes from 100 to 300mm in one, two or three process module configurations, with a wide variety of front-end\ loadlock options including FOUP and EFEM.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

####

About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of LED, optoelectronic, magnetic data storage, advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits.

For more information, please click here

Contacts:
Tegal Corporation
Thomas Mika (President & CEO), 707-763-5600
or
The Blueshirt Group
Rakesh Mehta
415-217-7722
Chris Danne
415-217-7722

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Surfing a wake of light: Researchers observe and control light wakes for the first time July 6th, 2015

Tel Aviv/Tsinghua University project uses crowd computing to improve water filtration: The research, a product of the new TAU-Tsinghua XIN Center, was conducted by 150,000 volunteers at IBM's World Community Grid July 6th, 2015

Transition from 3 to 2 dimensions increases conduction, MIPT scientists discover July 6th, 2015

A Stretchy Mesh Heater for Sore Muscles July 6th, 2015

Display technology/LEDs/SS Lighting/OLEDs

Surfing a wake of light: Researchers observe and control light wakes for the first time July 6th, 2015

MEMS

Robust new process forms 3-D shapes from flat sheets of graphene June 23rd, 2015

Slip sliding away: Graphene and diamonds prove a slippery combination June 10th, 2015

MEMS Industry Group Hosts Its First MEMS/Sensors Conference Session at Transducers 2015: MIG Speakers Will Explore Technology Transfer, Emerging MEMS/Sensors, Manufacturing Infrastructure and Process Technology, June 23 in Anchorage June 3rd, 2015

Janusz Bryzek Joins MEMS Industry Group to Lead New TSensors Division - New Division will Focus on Accelerating Development of Emerging Ultra-high Volume Sensors Supporting Abundance, mHealth and IoT May 14th, 2015

Announcements

Surfing a wake of light: Researchers observe and control light wakes for the first time July 6th, 2015

Tel Aviv/Tsinghua University project uses crowd computing to improve water filtration: The research, a product of the new TAU-Tsinghua XIN Center, was conducted by 150,000 volunteers at IBM's World Community Grid July 6th, 2015

Transition from 3 to 2 dimensions increases conduction, MIPT scientists discover July 6th, 2015

A Stretchy Mesh Heater for Sore Muscles July 6th, 2015

Tools

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Nanometrics to Announce Second Quarter Financial Results on July 23, 2015 July 2nd, 2015

Ultra-stable JILA microscopy technique tracks tiny objects for hours July 1st, 2015

New-Contracts/Sales/Customers

Oxford Instruments’ TritonXL Cryofree dilution refrigerator selected for the Oxford NQIT Quantum Technology Hub project June 30th, 2015

Centre for Process Innovation pilots Beneq’s breakthrough roll-to-roll ALD system for moisture barrier films June 3rd, 2015

Argonne chooses Beneq’s TFS 500 Atomic Layer Deposition System: Modularity and flexibility make for a natural choice May 14th, 2015

New JEOL E-Beam Lithography System to Enhance Quantum NanoFab Capabilities May 6th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project