Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Technische Universität Dresden orders Pegasus system for advanced packaging research and development

Abstract:
Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a Pegasus Deep Reactive Ion Etch (DRIE) tool to the Institut für Halbleiter- und Mikrosystemtechnik (IHM, or Semiconductor & Microsystems Technology Laboratory), part of the Technische Universität Dresden.

Technische Universität Dresden orders Pegasus system for advanced packaging research and development

NEWPORT, UK | Posted on March 18th, 2008

The Technische Universität Dresden dates back to the Technische Bildungsanstalt Dresden, founded in 1828 and thus ranks among the oldest technical-academic educational establishments in Germany. The university has about 35,000 students and almost 4,200 permanent employees, and is the largest university in Saxony. The IHM is involved in research into a wide range of semiconductor and microsystems applications, such as chip copper wiring, investigation of high-k materials (in cooperation with Namlab (www.namlab.com) and Qimonda (www.qimonda.com)), fabrication of microfluidic systems and sensors and bumping technologies for chip connection. They will be using STS' DRIE technology in the development of advanced packaging solutions, in particular investigating the use of through-wafer vias for 3D-IC interconnects.

Dr. Christian Wenzel, senior scientist from TU Dresden stated, "IHM chose the Pegasus system for its superior silicon etch capabilities, and over the past decade we have developed a good working relationship with STS. We have consistently experienced excellent customer service, and appreciate that they continue to lead the field in enabling silicon wafer processing."

Eizo Yasui, CEO of STS added, "We are very happy to receive this order from a long-standing customer, which underlines the importance we place on providing market-leading process technologies for 3D-IC packaging applications"

####

About Surface Technology Systems plc (STS)
STS designs and manufactures a range of highly specialised machines incorporating innovative technology used in the production of semiconductors and semiconductor related devices. Semiconductors, which are miniature electronic circuits, are usually associated with memory chips in computers. However, STS serves a range of applications outside this ‘mainstream’ memory chip market in several emerging sectors within the telecommunications, information technology and new micro electromechanical systems industries.

For more information, please click here

Contacts:
Surface Technology Systems plc
Imperial Park
Newport
NP10 8UJ
UK

Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

Copyright © Surface Technology Systems plc (STS)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Ag/ZnO-Nanorods Schottky diodes based UV-PDs are fabricated and tested May 26th, 2017

New metamaterial-enhanced MRI technique tested on humans May 26th, 2017

Controlling 3-D behavior of biological cells using laser holographic techniques May 26th, 2017

Unveiling the quantum necklace: Researchers simulate quantum necklace-like structures in superfluids May 26th, 2017

Academic/Education

MIT Energy Initiative awards 10 seed fund grants for early-stage energy research May 4th, 2017

Bar-Ilan University to set up quantum research center May 1st, 2017

California Research Alliance by BASF establishes more than 25 research projects in three years April 26th, 2017

SUNY Polytechnic Institute Announces Total of 172 Teams Selected to Compete in Solar in Your Community Challenge: Teams from 40 states, plus Washington, DC, 2 Territories, and 4 American Indian Reservations, Will Deploy Solar in Underserved Communities April 20th, 2017

Announcements

Ag/ZnO-Nanorods Schottky diodes based UV-PDs are fabricated and tested May 26th, 2017

New metamaterial-enhanced MRI technique tested on humans May 26th, 2017

Controlling 3-D behavior of biological cells using laser holographic techniques May 26th, 2017

Unveiling the quantum necklace: Researchers simulate quantum necklace-like structures in superfluids May 26th, 2017

Tools

New metamaterial-enhanced MRI technique tested on humans May 26th, 2017

Nanometrics Announces Retirement Plans of CEO Timothy Stultz: Dr. Stultz to Continue as Director May 25th, 2017

Nanomechanics, Inc. to Exhibit at the SEM Conference: Nanoindentation experts will attend and exhibit their instruments at the Conference and Exposition on Experimental and Applied Mechanics in Indianapolis May 25th, 2017

Plasmon-powered upconversion nanocrystals for enhanced bioimaging and polarized emission: Plasmonic gold nanorods brighten lanthanide-doped upconversion superdots for improved multiphoton bioimaging contrast and enable polarization-selective nonlinear emissions for novel nanoscal May 19th, 2017

New-Contracts/Sales/Customers

UnitySC Announces Wafer Thinning Inspection System; Win from Power Semiconductor IDM for Automotive: Leading IDM Selects New 4See Series Automated Defect Inspection Platform for Power Semiconductor Automotive Applications May 11th, 2017

JPK selects compact tensile stage from Deben for their NanoWizard® AFM platform to broaden capabilities for materials characterisation February 22nd, 2017

Cetim Facility Receives Bruker Contour CMM Dimensional Analysis System: New Optical Coordinate Measurement Technology Enables High-Precision 3D Scanning November 16th, 2016

Industrial Nanotech, Inc. Announces Plans to Spin Off New Product Line to Major Paint Compan November 9th, 2016

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project