Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Technische Universität Dresden orders Pegasus system for advanced packaging research and development

Abstract:
Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a Pegasus Deep Reactive Ion Etch (DRIE) tool to the Institut für Halbleiter- und Mikrosystemtechnik (IHM, or Semiconductor & Microsystems Technology Laboratory), part of the Technische Universität Dresden.

Technische Universität Dresden orders Pegasus system for advanced packaging research and development

NEWPORT, UK | Posted on March 18th, 2008

The Technische Universität Dresden dates back to the Technische Bildungsanstalt Dresden, founded in 1828 and thus ranks among the oldest technical-academic educational establishments in Germany. The university has about 35,000 students and almost 4,200 permanent employees, and is the largest university in Saxony. The IHM is involved in research into a wide range of semiconductor and microsystems applications, such as chip copper wiring, investigation of high-k materials (in cooperation with Namlab (www.namlab.com) and Qimonda (www.qimonda.com)), fabrication of microfluidic systems and sensors and bumping technologies for chip connection. They will be using STS' DRIE technology in the development of advanced packaging solutions, in particular investigating the use of through-wafer vias for 3D-IC interconnects.

Dr. Christian Wenzel, senior scientist from TU Dresden stated, "IHM chose the Pegasus system for its superior silicon etch capabilities, and over the past decade we have developed a good working relationship with STS. We have consistently experienced excellent customer service, and appreciate that they continue to lead the field in enabling silicon wafer processing."

Eizo Yasui, CEO of STS added, "We are very happy to receive this order from a long-standing customer, which underlines the importance we place on providing market-leading process technologies for 3D-IC packaging applications"

####

About Surface Technology Systems plc (STS)
STS designs and manufactures a range of highly specialised machines incorporating innovative technology used in the production of semiconductors and semiconductor related devices. Semiconductors, which are miniature electronic circuits, are usually associated with memory chips in computers. However, STS serves a range of applications outside this ‘mainstream’ memory chip market in several emerging sectors within the telecommunications, information technology and new micro electromechanical systems industries.

For more information, please click here

Contacts:
Surface Technology Systems plc
Imperial Park
Newport
NP10 8UJ
UK

Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

Copyright © Surface Technology Systems plc (STS)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Atom-scale oxidation mechanism of nanoparticles helps develop anti-corrosion materials February 24th, 2017

Atomic force imaging used to study nematodes: KFU bionanotechnology lab (head - Dr. Rawil Fakhrullin) has obtained 3-D images of nematodes' cuticles February 23rd, 2017

Academic/Education

Nominations Invited for $250,000 Kabiller Prize in Nanoscience: Major international prize recognizes a visionary nanotechnology researcher February 20th, 2017

Oxford Nanoimaging report on how the Nanoimager, a desktop microscope delivering single molecule, super-resolution performance, is being applied at the MRC Centre for Molecular Bacteriology & Infection November 22nd, 2016

The University of Applied Sciences in Upper Austria uses Deben tensile stages as an integral part of their computed tomography research and testing facility October 18th, 2016

Enterprise In Space Partners with Sketchfab and 3D Hubs for NewSpace Education October 13th, 2016

Announcements

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Atom-scale oxidation mechanism of nanoparticles helps develop anti-corrosion materials February 24th, 2017

Atomic force imaging used to study nematodes: KFU bionanotechnology lab (head - Dr. Rawil Fakhrullin) has obtained 3-D images of nematodes' cuticles February 23rd, 2017

Tools

Atomic force imaging used to study nematodes: KFU bionanotechnology lab (head - Dr. Rawil Fakhrullin) has obtained 3-D images of nematodes' cuticles February 23rd, 2017

JPK selects compact tensile stage from Deben for their NanoWizard® AFM platform to broaden capabilities for materials characterisation February 22nd, 2017

Molecular phenomenon discovered by advanced NMR facility: Cutting edge technology has shown a molecule self-assembling into different forms when passing between solution state to solid state, and back again - a curious phenomenon in science - says research by the University of Wa February 22nd, 2017

Strem Chemicals and Dotz Nano Ltd. Sign Distribution Agreement for Graphene Quantum Dots Collaboration February 21st, 2017

New-Contracts/Sales/Customers

JPK selects compact tensile stage from Deben for their NanoWizard® AFM platform to broaden capabilities for materials characterisation February 22nd, 2017

Cetim Facility Receives Bruker Contour CMM Dimensional Analysis System: New Optical Coordinate Measurement Technology Enables High-Precision 3D Scanning November 16th, 2016

Industrial Nanotech, Inc. Announces Plans to Spin Off New Product Line to Major Paint Compan November 9th, 2016

Leti Provides New Low-noise Image Technology to French SME PYXALIS; Will Be Demonstrated at Vision 2016 in Stuttgart November 3rd, 2016

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project