Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Technische Universität Dresden orders Pegasus system for advanced packaging research and development

Abstract:
Surface Technology Systems plc (STS), a leader in plasma process technologies required in the manufacturing and packaging of micro electromechanical systems (MEMS) and advanced electronic devices, today announced that they have sold a Pegasus Deep Reactive Ion Etch (DRIE) tool to the Institut für Halbleiter- und Mikrosystemtechnik (IHM, or Semiconductor & Microsystems Technology Laboratory), part of the Technische Universität Dresden.

Technische Universität Dresden orders Pegasus system for advanced packaging research and development

NEWPORT, UK | Posted on March 18th, 2008

The Technische Universität Dresden dates back to the Technische Bildungsanstalt Dresden, founded in 1828 and thus ranks among the oldest technical-academic educational establishments in Germany. The university has about 35,000 students and almost 4,200 permanent employees, and is the largest university in Saxony. The IHM is involved in research into a wide range of semiconductor and microsystems applications, such as chip copper wiring, investigation of high-k materials (in cooperation with Namlab (www.namlab.com) and Qimonda (www.qimonda.com)), fabrication of microfluidic systems and sensors and bumping technologies for chip connection. They will be using STS' DRIE technology in the development of advanced packaging solutions, in particular investigating the use of through-wafer vias for 3D-IC interconnects.

Dr. Christian Wenzel, senior scientist from TU Dresden stated, "IHM chose the Pegasus system for its superior silicon etch capabilities, and over the past decade we have developed a good working relationship with STS. We have consistently experienced excellent customer service, and appreciate that they continue to lead the field in enabling silicon wafer processing."

Eizo Yasui, CEO of STS added, "We are very happy to receive this order from a long-standing customer, which underlines the importance we place on providing market-leading process technologies for 3D-IC packaging applications"

####

About Surface Technology Systems plc (STS)
STS designs and manufactures a range of highly specialised machines incorporating innovative technology used in the production of semiconductors and semiconductor related devices. Semiconductors, which are miniature electronic circuits, are usually associated with memory chips in computers. However, STS serves a range of applications outside this ‘mainstream’ memory chip market in several emerging sectors within the telecommunications, information technology and new micro electromechanical systems industries.

For more information, please click here

Contacts:
Surface Technology Systems plc
Imperial Park
Newport
NP10 8UJ
UK

Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

Copyright © Surface Technology Systems plc (STS)

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Academic/Education

The Institute of Applied Physics at the University of Tsukuba near Tokyo in Japan uses Deben's ARM2 detector to better understand catalytic reaction mechanisms June 27th, 2018

Powering the 21st Century with Integrated Photonics: UCSB-Led Team Selected for Demonstration of a Novel Waveguide Platform Which is Transparent Throughout the MWIR and LWIR Spectral Bands June 19th, 2018

SUNY Poly Professor Eric Lifshin Selected for ‘Fellow of the Microanalysis Society’ Position for Significant Contributions to Microanalysis June 13th, 2018

Grand Opening of UC Irvine Materials Research Institute (IMRI) to Spotlight JEOL Center for Nanoscale Solutions: Renowned Materials Scientists to Present at the 1st International Symposium on Advanced Microscopy and Spectroscopy (ISAMS) April 18th, 2018

Announcements

Searching for errors in the quantum world September 21st, 2018

Viral RNA sensing: Optical detection of picomolar concentrations of RNA using switches in plasmonic chirality September 21st, 2018

UT engineers develop first method for controlling nanomotors: Breakthrough for nanotechnology as UT engineers develop first method for switching the mechanical motion of nanomotors September 21st, 2018

Nanobiotix: Update on Head and Neck Phase I/II Trial with NBTXR3 and Other program data presented at ImmunoRad 2018 September 20th, 2018

Tools

Carbon nanodots do an ultrafine job with in vitro lung tissue: New experiments highlight the role of charge and size when it comes to carbon nanodots that mimic the effect of nanoscale pollution particles on the human lung. September 12th, 2018

Terahertz spectroscopy enters the single-molecule regime September 7th, 2018

Mirrorcle Demonstrates MEMS-based Programmable Light Source at CES and PW18 August 30th, 2018

Stress-free ALD from Picosun August 28th, 2018

New-Contracts/Sales/Customers

Nanometrics Delivers 100th: Atlas III System for Advanced Process Control Metrology Atlas III: Systems are qualified and in production for advanced devices in DRAM, 3D-NAND and Foundry/Logic August 2nd, 2018

Picosun’s ALD solutions make quality watches tick July 26th, 2018

Barium ruthenate: A high-yield, easy-to-handle perovskite catalyst for the oxidation of sulfides July 13th, 2018

Oxford Instruments’ 22 Tesla superconducting magnet system commissioned at the UAM, making it the most intense magnetic field available outside a large international facility July 12th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project