Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > GenISys Supplies Layout BEAMER E-Beam Lithography Software to Caltech and Two U.S. National Laboratories

Abstract:
GenISys GmbH, a provider of e-beam direct write software solutions, today announced that three more U.S. research institutions have adopted its advanced e-beam lithography software. These world-class R&D centers' purchase decisions help to secure GenISys' leading market position and to establish a new standard in this emerging technology area.

GenISys Supplies Layout BEAMER E-Beam Lithography Software to Caltech and Two U.S. National Laboratories

LOS GATOS, CA | Posted on March 7th, 2008

Oak Ridge National Laboratory and Argonne National Laboratory - both part of the U.S. Department of Energy's work in the area of nanoscale materials science - have implemented GenISys' Layout BEAMER software for their advanced data preparation needs. Also choosing Layout BEAMER is the California Institute of Technology, which is using e-beam lithography to conduct research in nanophotonics and nanobiotechnology.

These new customers follow the lead of Cornell University's Nanofabrication Facility, which is collaborating with GenISys and JEOL Ltd. to develop direct write e-beam data preparation and electron process correction technologies for nanometer-range structures. Each of these leading-edge research facilities faces the challenge of fabricating nanometer-range structures of ever shrinking dimensions.

Layout BEAMER integrates proximity effect correction (PEC) software specific to e-beam lithography requirements with data-preparation and process simulation and correction, offering an advanced solution at an attractive price. Its user-friendly drag-and-drop interface quickly handles large amounts of layout data while speeding data preparation and providing improved pattern fidelity.

"GenISys is dedicated to offering needed solutions for e-beam direct write. They are responsive and fast in development, and they are providing the support needed for implementing their advanced solutions into our research and our user program," said Scott Retterer, research scientist in the Center for Nanophase Material Science at Oak Ridge National Laboratory.

Caltech, whose Kavli Nanoscience Institute (KNI) celebrated the completion of a new cleanroom on March 4, is using Layout BEAMER as part of a of state-of-the-art process modeling and correction program to explore the limits of e-beam lithography. "We are extremely happy with Layout BEAMER, as it is the optimal software package for this application," said KNI Director Axel Scherer. "Layout BEAMER combines advanced PEC - including correction for beam positioning - with simulation, and these simulations are essential to our nanofabrication competence."

Argonne National Laboratory is using Layout BEAMER to support its mission of creating and characterizing new nanoscale materials and developing advanced instrumentation, including a hard x-ray nanoprobe beamline.

####

About GenISys GmbH
Based in Munich, Germany with offices in Tokyo and Los Gatos, GenISys is a world leader in flexible, high-performance software solutions for the e-beam direct-write market. GenISys combines deep technical expertise in process modeling, correction and optimization with high-caliber software engineering and fast, flexible support. GenISys products give MEMS manufacturers and researchers unparalleled efficiency, ease of use and optimal value in the research and development of new micro-patterning technologies.

GenISys is a registered trademark and Layout BEAMER and Layout LAB are trademarks of GenISys GmbH.

For more information, please click here

Contacts:
Paul DePesa
GenISys GmbH
P: +1 (408) 353-3951
E:
or
Sarah-Lyle Dampoux
Loomis Group
P: +33 (0) 1 58 18 59 30
E:

Copyright © Business Wire 2008

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

'Gyroscope' molecules form crystal that's both solid and full of motion: New type of molecular machine designed by UCLA researchers could have wide-ranging applications in technology and science January 16th, 2018

The nanoscopic structure that locks up our genes January 16th, 2018

New exotic phenomena seen in photonic crystals: Researchers observe, for the first time, topological effects unique to an open system January 12th, 2018

Nanotube fibers in a jiffy: Rice University lab makes short nanotube samples by hand to dramatically cut production time January 11th, 2018

Software

Laboratory Management Web Application Goes Nationwide January 9th, 2018

EC Project Aims at Creating and Commercializing Cyber-Physical-System Solutions November 14th, 2017

Leti Launches Emulator Service to Boost ROI and Speed Time to Market for European Chipmakers: Anchored by Mentor Veloce Emulator Machine, Letis Offer Includes Support for Design, Debug and Analysis of Results August 31st, 2017

Technology Companies Join Forces for TEM Imaging and Analysis August 3rd, 2017

Chip Technology

'Gyroscope' molecules form crystal that's both solid and full of motion: New type of molecular machine designed by UCLA researchers could have wide-ranging applications in technology and science January 16th, 2018

New oxide and semiconductor combination builds new device potential: Researchers integrated oxide two-dimensional electron gases with gallium arsenide and paved the way toward new opto-electrical devices January 10th, 2018

STMicroelectronics Selects GLOBALFOUNDRIES 22FDX to Extend Its FD-SOI Platform and Technology Leadership : GFs FDX technology will enable ST to deliver high-performance, low-power products for next-generation consumer and industrial applications January 9th, 2018

Touchy nanotubes work better when clean: Rice, Swansea scientists show that decontaminating nanotubes can simplify nanoscale devices January 4th, 2018

Announcements

'Gyroscope' molecules form crystal that's both solid and full of motion: New type of molecular machine designed by UCLA researchers could have wide-ranging applications in technology and science January 16th, 2018

The nanoscopic structure that locks up our genes January 16th, 2018

New exotic phenomena seen in photonic crystals: Researchers observe, for the first time, topological effects unique to an open system January 12th, 2018

'Decorated' stem cells could offer targeted heart repair January 11th, 2018

Printing/Lithography/Inkjet/Inks/Bio-printing

Printing Flexible Graphene Supercapacitors December 1st, 2017

Math gets real in strong, lightweight structures: Rice University researchers use 3-D printers to turn century-old theory into complex schwarzites November 16th, 2017

Creation of coherent states in molecules by incoherent electrons October 21st, 2017

Graphene based terahertz absorbers: Printable graphene inks enable ultrafast lasers in the terahertz range September 13th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project