Nanotechnology Now





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > SUSS MicroTec Boosts Nanotechnology with New Toolset for Mask Aligners

160nm wide holes positioned in concentric rings as used for photonics crystals. Printed in Amonil MM S4 on a SUSS MA6 Mask Aligner. Source: FhG/IZM
160nm wide holes positioned in concentric rings as used for photonics crystals. Printed in Amonil MM S4 on a SUSS MA6 Mask Aligner. Source: FhG/IZM

Abstract:
SUSS MicroTec, supplier of innovative solutions for the 3D, MEMS, Advanced Packaging and Nanotechnology markets, has launched an advanced nanotechnology toolset for its Mask Aligners. The new Nano Imprint Lithography (NIL) tool enables SUSS Aligners to print resist thicknesses from less than 100 nanometers to a few hundred microns with a printing resolution down to a few nanometers.

SUSS MicroTec Boosts Nanotechnology with New Toolset for Mask Aligners

Garching, Germany | Posted on March 3rd, 2008

UV-NIL is a low-cost production technology that is based on UV-curing. It has been developed as a cost-effective alternative to high-resolution e-beam lithography to print sub-20 nanometer geometries. UV-NIL applications with promising perspectives include semiconductor, MOEMS, NEMS and optoelectronic technologies.

This toolset can be upgraded on any previously installed SUSS MA6 Mask Aligner with very limited effort. Therefore SUSS MicroTec offers its customers an easy and quick step into the world of Nano.

"Nanotechnology represents a promising new business opportunity for SUSS MicroTec", said Rolf Wolf, General Manager of SUSS MicroTec Lithography division. "With the new UV-NIL tooling for mask aligners, SUSS MicroTec is once again providing market leadership for evolutionary as well as revolutionary innovative processing techniques."

####

About SUSS MicroTec
SUSS MicroTec machines are used by leading semiconductor manufacturers as well as renowned research institutes to make and test state-of-the art microchips and sensors. Many of the products you use in your daily life such as PDA's, GPS systems, cell phones etc. have at sometime been touched by equipment from SUSS MicroTec.

As a global supplier of production and test equipment for the semiconductor and related industries SUSS is especially present in markets including Advanced Packaging, MEMS, Nanotechnology, Compound Semiconductor, Silicon-On-Insulator and 3D Interconnect. Products include precision lithography tools (mask aligners, spin & spray coaters), wafer bonders and test systems.

For more information, please click here

Contacts:

Brigitte Wehrmann
Marketing Communications Manager Lithography Division
SUSS MicroTec Lithography GmbH
Schlei▀heimer Str. 90
D 85748 Garching
Phone:+49 89 32007 237

Copyright © SUSS MicroTec

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Production of Zirconium Carbide Nanoparticles at Low Temperature without Thermal Operations July 5th, 2015

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

New Biosensor Produced in Iran to Detect Effective Drugs in Cancer Treatment July 4th, 2015

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Announcements

Production of Zirconium Carbide Nanoparticles at Low Temperature without Thermal Operations July 5th, 2015

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

New Biosensor Produced in Iran to Detect Effective Drugs in Cancer Treatment July 4th, 2015

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Tools

A 'movie' of ultrafast rotating molecules at a hundred billion per second: A quantum wave-like nature was successfully observed in rotating nitrogen molecules July 4th, 2015

Clues to inner atomic life from subtle light-emission shifts: Hyperfine structure of light absorption by short-lived cadmium atom isotopes reveals characteristics of the nucleus that matter for high precision detection methods July 3rd, 2015

Nanometrics to Announce Second Quarter Financial Results on July 23, 2015 July 2nd, 2015

Ultra-stable JILA microscopy technique tracks tiny objects for hours July 1st, 2015

Photonics/Optics/Lasers

Pioneering Southampton scientist awarded prestigious physics medal July 3rd, 2015

Making new materials with micro-explosions: ANU media release: Scientists have made exotic new materials by creating laser-induced micro-explosions in silicon, the common computer chip material June 29th, 2015

Opening a new route to photonics Berkeley lab researchers find way to control light in densely packed nanowaveguides June 27th, 2015

The quantum spin Hall effect is a fundamental property of light June 25th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More










ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project