Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Research at UAlbany NanoCollege Contributes to More Than 30 Papers at SPIE Advanced Lithography Conference

Abstract:
Represents work conducted at CNSE's Albany NanoTech Complex by researchers from CNSE and its global corporate partners.

Research at UAlbany NanoCollege Contributes to More Than 30 Papers at SPIE Advanced Lithography Conference

Albany, NY | Posted on February 22nd, 2008

More than 30 scientific and technical papers based on research conducted at the College of Nanoscale Science and Engineering ("CNSE") of the University at Albany will be presented next week at one of the world's leading conferences focused on the global nanoelectronics industry.

In all, 31 papers will be presented at the SPIE Advanced Lithography conference in San Jose, CA that represent work performed at CNSE's Albany NanoTech Complex either by CNSE research teams, by the CNSE global corporate partners' research teams resident at Albany NanoTech - including IBM, AMD, International SEMATECH, ASML, Tokyo Electron and Applied Materials - or by joint CNSE and partners' research teams resident at Albany NanoTech.

The papers cover a range of topics and outline innovative research in lithography, which is seen as critical to the manufacturing of future nanoelectronics devices. Included among the technical areas in which new developments are reported are extreme ultraviolet ("EUV") systems, resists and masks; immersion lithography materials and processes; and, optical microlithography.

Dr. Alain E. Kaloyeros, Vice President and Chief Administrative Officer of CNSE, said, "The presentation of more than 30 scientific and technical papers at the SPIE Advanced Lithography conference based on research performed at CNSE's Albany NanoTech Complex further demonstrates the world-class intellectual know-how and unmatched technical capabilities at the UAlbany NanoCollege. The recognized excellence of this truly unique resource for high-tech education, research, development and commercialization is a tribute to the vision, support and investment of New York's elected officials, which have created a pioneering educational paradigm at CNSE and accelerated technology development among the world's leading nanoelectronics companies."

Dr. James G. Ryan, Associate Vice President of Technology and Professor of Nanoscience at CNSE, said, "The scientific and technical papers generated at CNSE's Albany NanoTech by the NanoCollege and our global corporate partners underscore the power of collaboration between academia and industry in fostering innovation. We are confident that the developments reported at SPIE will play an important role in the effort to accelerate the introduction of extreme ultraviolet lithography into manufacturing."

The SPIE conference, being held February 24-29, attracts thousands of attendees and is considered the semiconductor lithography industry's most important technical event.

####

About UAlbany CNSE
The UAlbany CNSE is the first college in the world dedicated to research, development, education, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. In May 2007, it was ranked as the world's number one college for nanotechnology and microtechnology in the Annual College Ranking by Small Times magazine. CNSE's Albany NanoTech complex is the most advanced research enterprise of its kind at any university in the world: a $4.2 billion, 450,000-square-foot complex that attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 65,000 square feet of Class 1 capable cleanrooms. More than 2,000 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech complex, from companies including IBM, AMD, SEMATECH, Toshiba, ASML, Applied Materials, Tokyo Electron, Vistec Lithography and Freescale. An expansion currently underway will increase the size of CNSE's Albany NanoTech complex to over 800,000 square feet, including over 80,000 square feet of Class 1 capable cleanroom space, to house over 2,500 scientists, researchers, engineers, students, and faculty by mid-2009.

For more information, please click here

Contacts:
Steve Janack
Assistant Vice President
Marketing and Communications
Phone: 518-956-7322

Copyright © UAlbany CNSE

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Industrial Nanotech, Inc. to Publish PCAOB Audited Financials July 31st, 2014

Nanostructured metal-oxide catalyst efficiently converts CO2 to methanol: Highly reactive sites at interface of 2 nanoscale components could help overcome hurdle of using CO2 as a starting point in producing useful products July 31st, 2014

Carnegie Mellon Chemists Create Nanofibers Using Unprecedented New Method July 31st, 2014

Pressure probing potential photoelectronic manufacturing compound July 31st, 2014

Announcements

Industrial Nanotech, Inc. to Publish PCAOB Audited Financials July 31st, 2014

Nanostructured metal-oxide catalyst efficiently converts CO2 to methanol: Highly reactive sites at interface of 2 nanoscale components could help overcome hurdle of using CO2 as a starting point in producing useful products July 31st, 2014

Carnegie Mellon Chemists Create Nanofibers Using Unprecedented New Method July 31st, 2014

Pressure probing potential photoelectronic manufacturing compound July 31st, 2014

Events/Classes

Arrowhead to Report Fiscal 2014 Third Quarter Financial Results- Conference Call Scheduled for Tuesday, August 12, 2014 - July 31st, 2014

FLAG-ERA and TNT2014 join efforts: Graphene Networking at its higher level in Barcelona: Encourage the participation in a joint transnational call July 30th, 2014

FEI Unveils New Solutions for Faster Time-to-Analysis in Metals Research July 30th, 2014

WITec to host the 11th Confocal Raman Imaging Symposium from September 29th - October 1st in Ulm, Germany July 28th, 2014

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE