Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Surrey NanoSystems takes its 'next-generation semiconductor tool' technology to Asian industry at Nanotech 2008

Abstract:
Surrey NanoSystems, a joint venture between the University of Surrey's Advanced Technology Institute and CEVP Ltd, has appointed Duncan Cooper as its Director of Sales and Marketing. With 25 years' experience in semiconductor industry, he brings a wealth of know-how to the young company as its new breed of tools for growing carbon nanotubes (CNTs) at low temperatures moves from R&D labs to commercial fabrication.

Surrey NanoSystems takes its 'next-generation semiconductor tool' technology to Asian industry at Nanotech 2008

UK | Posted on February 4th, 2008

The carbon nanotube and nanomaterials tool innovator Surrey NanoSystems, a joint venture between the University of Surrey's Advanced Technology Institute and CEVP Ltd, is taking its 'next-generation semiconductor tool' message to the Asian semiconductor industry at nanotech 2008.

"There are fundamental barriers to progress in semiconductor integration, because of the need to find viable processes for next-generation interconnect and dielectric applications," says Duncan Cooper of Surrey NanoSystems. Surrey NanoSystems has developed carbon nanotube processes and a nanomaterial deposition tool with the precision and repeatability necessary for these critical applications."

"Our presence at nanotech 2008 gives us an opportunity to meet with leading companies in the field, and we are additionally part of a Japan External Trade Organization (JETRO) programme to establish high-level contacts with key Japanese firms in this field," he adds.

Surrey NanoSystems' NanoGrowth tool for fabricating carbon nanotube and nanomaterial structures has an extremely high degree of precision and repeatability plus the ability to grow materials at low temperatures that are compatible with commercial semiconductor processes.

"The tool's intrinsic modularity allows users to gain automated control over all aspects of nanomaterial synthesis," adds Duncan Cooper. "We are able to discuss the processing techniques and results that the company has gained from our development partnership with the University of Surrey's Advanced Technology Institute, plus a parallel agreement that we have in place with a major laboratory that is helping us with independent test-bed services for our unique processes. We will bring our approach to high volume manufacture in tools aimed at the 32 nm process node and beyond."

The company's first tool is NanoGrowth 1000n, and comes with both CVD (chemical vapour deposition) and PECVD (plasma-enhanced CVD) processing capability. These two techniques provide great processing versatility for users. Among many quality-oriented architectural features are an ultra-high purity gas delivery system and flexible closed-loop control systems that allow users to define target tolerances to achieve a high level of repeatability during all phases of the process. Field-proven carbon nanotube fabrication programmes are provided with the tool in the form of software templates that may be adapted easily by users for their own applications.

A high degree of hardware modularity further extends the capability of the tool's design, as it facilitates easy expansion and configuration to meet current and future fabrication requirements. Among many options are further processing techniques such as ICP (inductively coupled plasma), dual sputter sources for catalyst deposition - including a module for delivery of vapour-phase catalysts like ferrocene - and modules to add process stages for automated pilot production or high throughput. Included in the latter category are an automated wafer transport load/lock system, integrated etching capability, and a PECVD module for deposition of thin-film silicon-based materials.

####

About University of Surrey
The University of Surrey is one of the UK’s leading professional, scientific and technological universities with a world class research profile and a reputation for excellence in teaching and research. Ground-breaking research at the University is bringing direct benefit to all spheres of life – helping industry to maintain its competitive edge and creating improvements in the areas of health, medicine, space science, the environment, communications, defence and social policy. Programmes in science and technology have gained widespread recognition and it also boasts flourishing programmes in dance and music, social sciences, management and languages and law. In addition to the campus on 150 hectares just outside Guildford, Surrey, the University also owns and runs the Surrey Research Park, which provides facilities for 140 companies employing 2,700 staff.

The Sunday Times names Surrey as ‘The University for Jobs' which underlines the university’s growing reputation for providing high quality, relevant degrees.

For more information, please click here

Contacts:
Peter La, Press Office at the University of Surrey, Tel: 01483 689191 or E-mail:

Copyright © University of Surrey

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Scientists track chemical and structural evolution of catalytic nanoparticles in 3-D: Up-close, real-time, chemical-sensitive 3-D imaging offers clues for reducing cost/improving performance of catalysts for fuel-cell-powered vehicles and other applications December 8th, 2016

Exotic insulator may hold clue to key mystery of modern physics: Johns Hopkins-led research shows material living between classical and quantum worlds December 8th, 2016

Arrowhead Pharmaceuticals to Webcast Fiscal 2016 Year End Results December 7th, 2016

Journal Nanotechnology Progress International (JONPI), newest edition out December 7th, 2016

Chip Technology

Leti IEDM 2016 Paper Clarifies Correlation between Endurance, Window Margin and Retention in RRAM for First Time: Paper Presented at IEDM 2016 Offers Ways to Reconcile High-cycling Requirements and Instability at High Temperatures in Resistive RAM December 6th, 2016

Tokyo Institute of Technology research: 3D solutions to energy savings in silicon power transistors December 6th, 2016

Physicists decipher electronic properties of materials in work that may change transistors December 6th, 2016

Construction of practical quantum computers radically simplified: Scientists invent ground-breaking new method that puts quantum computers within reach December 5th, 2016

Announcements

Scientists track chemical and structural evolution of catalytic nanoparticles in 3-D: Up-close, real-time, chemical-sensitive 3-D imaging offers clues for reducing cost/improving performance of catalysts for fuel-cell-powered vehicles and other applications December 8th, 2016

Exotic insulator may hold clue to key mystery of modern physics: Johns Hopkins-led research shows material living between classical and quantum worlds December 8th, 2016

Arrowhead Pharmaceuticals to Webcast Fiscal 2016 Year End Results December 7th, 2016

Journal Nanotechnology Progress International (JONPI), newest edition out December 7th, 2016

Appointments/Promotions/New hires/Resignations/Deaths

Dr Barbara Armbruster promoted to Worldwide Sales and Marketing Director for XEI Scientific September 27th, 2016

Dr Barbara Armbruster joins XEI Scientific as Marketing Director June 1st, 2016

Park Systems Global Expansion in AFM Market Includes Appointment of New Executives April 23rd, 2016

GLOBALFOUNDRIES Adds Alain Mutricy as Head of Product Management Group March 3rd, 2016

Events/Classes

Arrowhead Pharmaceuticals to Webcast Fiscal 2016 Year End Results December 7th, 2016

In IEDM 2016 Keynote, Leti CEO Says ‘Hyperconnectivity’, Human-focused Research and the IOT Promise Profound, Positive Changes December 7th, 2016

IEDM: Leti CEO Marie Semeria to Give Opening-day Keynote on Impact of ‘Hyperconnectivity’ and IoT: Speech to Portray Key Role Nonprofit Research and Technology Organizations Play in Making Technology More Efficient and Ensuring Safety and Security November 29th, 2016

Leti and Grenoble Partners Demonstrate World’s 1st Qubit Device Fabricated in CMOS Process: Paper by Leti, Inac and University of Grenoble Alpes Published in Nature Communications November 28th, 2016

Alliances/Trade associations/Partnerships/Distributorships

Infrared instrumentation leader secures exclusive use of Vantablack coating December 5th, 2016

Leti and Grenoble Partners Demonstrate World’s 1st Qubit Device Fabricated in CMOS Process: Paper by Leti, Inac and University of Grenoble Alpes Published in Nature Communications November 28th, 2016

Mechanism for sodium storage in 2-D material: Tin selenide is an effective host for storing sodium ions, making it a promising material for sodium ion batteries October 27th, 2016

Enterprise In Space Partners with Sketchfab and 3D Hubs for NewSpace Education October 13th, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project