Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Surrey NanoSystems takes its 'next-generation semiconductor tool' technology to Asian industry at Nanotech 2008

Abstract:
Surrey NanoSystems, a joint venture between the University of Surrey's Advanced Technology Institute and CEVP Ltd, has appointed Duncan Cooper as its Director of Sales and Marketing. With 25 years' experience in semiconductor industry, he brings a wealth of know-how to the young company as its new breed of tools for growing carbon nanotubes (CNTs) at low temperatures moves from R&D labs to commercial fabrication.

Surrey NanoSystems takes its 'next-generation semiconductor tool' technology to Asian industry at Nanotech 2008

UK | Posted on February 4th, 2008

The carbon nanotube and nanomaterials tool innovator Surrey NanoSystems, a joint venture between the University of Surrey's Advanced Technology Institute and CEVP Ltd, is taking its 'next-generation semiconductor tool' message to the Asian semiconductor industry at nanotech 2008.

"There are fundamental barriers to progress in semiconductor integration, because of the need to find viable processes for next-generation interconnect and dielectric applications," says Duncan Cooper of Surrey NanoSystems. Surrey NanoSystems has developed carbon nanotube processes and a nanomaterial deposition tool with the precision and repeatability necessary for these critical applications."

"Our presence at nanotech 2008 gives us an opportunity to meet with leading companies in the field, and we are additionally part of a Japan External Trade Organization (JETRO) programme to establish high-level contacts with key Japanese firms in this field," he adds.

Surrey NanoSystems' NanoGrowth tool for fabricating carbon nanotube and nanomaterial structures has an extremely high degree of precision and repeatability plus the ability to grow materials at low temperatures that are compatible with commercial semiconductor processes.

"The tool's intrinsic modularity allows users to gain automated control over all aspects of nanomaterial synthesis," adds Duncan Cooper. "We are able to discuss the processing techniques and results that the company has gained from our development partnership with the University of Surrey's Advanced Technology Institute, plus a parallel agreement that we have in place with a major laboratory that is helping us with independent test-bed services for our unique processes. We will bring our approach to high volume manufacture in tools aimed at the 32 nm process node and beyond."

The company's first tool is NanoGrowth 1000n, and comes with both CVD (chemical vapour deposition) and PECVD (plasma-enhanced CVD) processing capability. These two techniques provide great processing versatility for users. Among many quality-oriented architectural features are an ultra-high purity gas delivery system and flexible closed-loop control systems that allow users to define target tolerances to achieve a high level of repeatability during all phases of the process. Field-proven carbon nanotube fabrication programmes are provided with the tool in the form of software templates that may be adapted easily by users for their own applications.

A high degree of hardware modularity further extends the capability of the tool's design, as it facilitates easy expansion and configuration to meet current and future fabrication requirements. Among many options are further processing techniques such as ICP (inductively coupled plasma), dual sputter sources for catalyst deposition - including a module for delivery of vapour-phase catalysts like ferrocene - and modules to add process stages for automated pilot production or high throughput. Included in the latter category are an automated wafer transport load/lock system, integrated etching capability, and a PECVD module for deposition of thin-film silicon-based materials.

####

About University of Surrey
The University of Surrey is one of the UK’s leading professional, scientific and technological universities with a world class research profile and a reputation for excellence in teaching and research. Ground-breaking research at the University is bringing direct benefit to all spheres of life – helping industry to maintain its competitive edge and creating improvements in the areas of health, medicine, space science, the environment, communications, defence and social policy. Programmes in science and technology have gained widespread recognition and it also boasts flourishing programmes in dance and music, social sciences, management and languages and law. In addition to the campus on 150 hectares just outside Guildford, Surrey, the University also owns and runs the Surrey Research Park, which provides facilities for 140 companies employing 2,700 staff.

The Sunday Times names Surrey as ‘The University for Jobs' which underlines the university’s growing reputation for providing high quality, relevant degrees.

For more information, please click here

Contacts:
Peter La, Press Office at the University of Surrey, Tel: 01483 689191 or E-mail:

Copyright © University of Surrey

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Nano Ruffles in Brain Matter: Freiburg researchers decipher the role of nanostructures around brain cells in central nervous system function October 31st, 2014

Gold nanoparticle chains confine light to the nanoscale October 31st, 2014

'Nanomotor lithography' answers call for affordable, simpler device manufacturing October 31st, 2014

Device invented at Johns Hopkins provides up-close look at cancer on the move: Microscopic view of metastasis could give insight about how to keep cancer in check October 31st, 2014

Chip Technology

Sussex physicists find simple solution for quantum technology challenge October 28th, 2014

Watching the hidden life of materials: Ultrafast electron diffraction experiments open a new window on the microscopic world October 27th, 2014

Breakthrough in molecular electronics paves the way for DNA-based computer circuits in the future: DNA-based programmable circuits could be more sophisticated, cheaper and simpler to make October 27th, 2014

QuantumWise guides the semiconductor industry towards the atomic scale October 24th, 2014

Announcements

Nano Ruffles in Brain Matter: Freiburg researchers decipher the role of nanostructures around brain cells in central nervous system function October 31st, 2014

Gold nanoparticle chains confine light to the nanoscale October 31st, 2014

'Nanomotor lithography' answers call for affordable, simpler device manufacturing October 31st, 2014

Device invented at Johns Hopkins provides up-close look at cancer on the move: Microscopic view of metastasis could give insight about how to keep cancer in check October 31st, 2014

Appointments/Promotions/New hires/Resignations/Deaths

First Canada Excellence Research Chair gets $10 million from the federal government for oilsands research at the University of Calgary: Federal government announces prestigious research chair to study improving oil production efficiency October 19th, 2014

VDMA photonics steering committee with new members stronger than ever October 14th, 2014

Agar Scientific appoints Paul Balaş as new Technical Sales Manager October 3rd, 2014

PEN Inc. Chairman Scott Rickert Announces Company Vision, Product Priorities and Management Team: Webcast Highlights the Launch of PEN October 3rd, 2014

Events/Classes

New Compact SIMS at 61st AVS | Visit us on Booth 311 October 28th, 2014

Iran to Hold 3rd Int'l Engineering Materials, Metallurgy Conference October 25th, 2014

Iran-Made Respiratory Nano Masks Provided to Hajj Pilgrims October 23rd, 2014

MEMS & Sensors Technology Showcase: Finalists Announced for MEMS Executive Congress US 2014 October 23rd, 2014

Alliances/Partnerships/Distributorships

'Electronic skin' could improve early breast cancer detection October 29th, 2014

European Commission opens the gate towards the implementation of Nanomedicine Translation Hub October 16th, 2014

IRLYNX and CEA-Leti to Streamline New CMOS-based Infrared Sensing Modules Dedicated to Human-activities Characterization October 15th, 2014

New VDMA Association "Electronics, Micro and Nano Technologies" founded: Inaugural Meeting in Frankfurt/Main, Germany October 15th, 2014

NanoNews-Digest
The latest news from around the world, FREE





  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE