Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Nanometrics Introduces NanoCD Suite

Abstract:
anometrics Incorporated (Nasdaq: NANO), a leading supplier of advanced metrology equipment to the semiconductor industry, today introduced NanoCD Suite. This new product suite is composed of four key optical critical dimension (OCD) metrology solutions: NanoGen; NanoMatch; NanoStation and NanoDiffract. When NanoCD Suite is combined with the company's proven Atlas standalone and 9010 integrated metrology systems, Nanometrics provides a complete OCD solution that can measure and model all 45 nm and smaller devices, including scribe line process control targets and advanced die structures, as well as advanced R&D structures for 32 nm and 22 nm nodes, providing the necessary metrology for critical process control.

Nanometrics Introduces NanoCD Suite

MILPITAS, CA | Posted on January 30th, 2008

The Nanometrics NanoCD Suite is designed to optimize the full capability and connectivity of Nanometrics' Atlas and 9010 systems for OCD metrology. NanoCD offers industry-proven modeling methods, as well as next-generation real-time regression capability, comprehensive offline sensitivity analysis tools, fast library generation and comprehensive GUI and structure input for true multi-variant modeling. The NanoDiffract software delivers these advanced capabilities in intuitive and easy to deploy hardware form factors, which include: the NanoGen, an offline server-based library generation system; the NanoMatch, a high power computing system incorporated within the Atlas or 9010 metrology system for real-time analysis; and the NanoStation, an offline desktop system used for recipe and library generation.

Beyond traditional scatterometry metrology and film analysis, the NanoCD Suite leverages all the data from all process flows and lets the user input that knowledge into the models for accurate and precise structural metrology. The NanoCD Suite can be used to solve critical CD control problems in lithography and etch, as well as demanding next-generation film thickness, CD, erosion, and microstructure control in CVD, CMP, ALD, and Epi process modules

"The NanoCD Suite provides robust run-time analysis for film and CD solutions in the most demanding process, engineering and R&D applications," noted Kevin Heidrich, Nanometrics' senior director of New Business Development. "Each component of the NanoCD suite is highly complementary to each other. When implemented alongside Nanometrics' Atlas standalone and 9010 integrated metrology systems, we can offer a complete turnkey OCD solution for fab-wide deployment."

####

About Nanometrics Incorporated
Nanometrics is a leader in the design, manufacture and marketing of high-performance process control metrology systems used in semiconductor manufacturing. Nanometrics standalone and integrated metrology systems measure various thin film properties, critical dimensions, overlay control and optical, electrical and material properties, including the structural composition of silicon and compound semiconductor devices, during various steps of the manufacturing process. These systems enable semiconductor manufacturers to improve yields, increase productivity and lower their manufacturing costs. The company maintains its headquarters in Milpitas, California, with sales and service offices worldwide. Nanometrics is traded on NASDAQ Global Market under the symbol NANO.

For more information, please click here

Contacts:
Public Relations:
Vincent Mayeda
Loomis Group
909.590.9324


Company Contact:
Kevin Heidrich
Nanometrics
408-545-6000

Copyright © Nanometrics Incorporated

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Chip Technology

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

Leti Integrates Hybrid III-V Silicon Lasers on 200mm Wafers with Standard CMOS Process December 6th, 2017

Leti Breakthroughs Point Way to Significant Improvements in SoC Memories December 6th, 2017

Announcements

UCLA chemists synthesize narrow ribbons of graphene using only light and heat: Tiny structures could be next-generation solution for smaller electronic devices December 8th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

Device makes power conversion more efficient: New design could dramatically cut energy waste in electric vehicles, data centers, and the power grid December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Tools

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

Deben reports on a new publication from scientists at La Trobe University in Australia where their CT500 stage is used in micro scanning tomography experiments to better understand ceramic matrix composites under load November 29th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project