Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > UAlbany NanoCollege and IMEC to Collaborate on EUV Lithography; First Experiments to be Performed at CNSE's Albany NanoTech

Abstract:
IBM, ASML researchers will also participate in program designed to advance EUV lithography.

UAlbany NanoCollege and IMEC to Collaborate on EUV Lithography; First Experiments to be Performed at CNSE's Albany NanoTech

Albany, NY | Posted on January 21st, 2008

The world's two leading centers for next-generation nanoelectronics research and development ("R&D") - the College of Nanoscale Science and Engineering ("CNSE") of the University at Albany in Albany, NY and IMEC in Leuven, Belgium - today announced plans to jointly perform extreme ultraviolet lithography ("EUVL") experiments in order to accelerate the introduction of EUVL into manufacturing. The first set of collaborative experiments will be carried out at CNSE's Albany NanoTech Complex, with future joint studies to be conducted at CNSE and IMEC, depending on throughput and/or availability of the tools.

This groundbreaking collaboration between CNSE and IMEC will also involve scientists from IBM and ASML, which has built the world's first full-field EUVL R&D tool, the Alpha Demo Tool ("ADT"). The majority of activities will focus on the advanced imaging capabilities of the EUVL system, with additional effort devoted to the understanding of new materials and various aspects of equipment technology.

The collaboration between CNSE, IMEC, IBM and ASML is expected to further advance the learning on EUVL technology and the associated infrastructure required to support it. Ultimately, this alliance is intended to effectively demonstrate the practical feasibility of EUVL and build confidence in the technology for the 32nm half pitch device node and below.

CNSE Vice President and Chief Administrative Officer Dr. Alain E. Kaloyeros said, "The UAlbany NanoCollege is pleased to partner with IMEC, the leading European R&D organization, and welcome our IMEC colleagues to CNSE's Albany NanoTech Complex, where together with our partners from IBM and ASML, we have a unique opportunity to enable significant advances in EUVL technology that are vital to the manufacturing of future generations of nanoelectronics devices. This pioneering initiative, made possible through the investments of the New York Assembly in the International Venture for Nanoelectronics Technologies (INVENT), further illustrates the success of the vision and leadership of Speaker Silver and the New York Assembly, whose investment and support have been critical in building a globally recognized centerpiece for high-tech research and development in the Empire State."

Luc Van den hove, Executive Vice President and Chief Operating Officer at IMEC said, "EUV lithography is a promising solution to further scale CMOS beyond the 32nm but still major challenges need to be overcome. As a leading nanoelectronics R&D center, IMEC sets up collaborations to enhance further semiconductor development. This collaboration between IMEC and the UAlbany NanoCollege proves again that joint R&D is a major benefit for the semiconductor industry worldwide. We look forward to building a great partnership with the UAlbany NanoCollege to advance the state of the art in nanoscale lithography."

CNSE Associate Vice President of Technology and Professor of Nanoscience Dr. James G. Ryan said, "Faculty, scientists and researchers at CNSE look forward to working with researchers from IMEC, IBM and ASML as part of this unique effort, which further reinforces our commitment to the development and commercialization of EUVL technology. This joint program gives us another opportunity to advance EUVL in support of the needs of our corporate partners and the nanoelectronics industry, and we anticipate a successful and fruitful collaboration."

Kurt Ronse, Lithography Program Director at IMEC added, "We are pleased with this collaboration which is a win-win situation for both IMEC and CNSE and the nanoelectronics industry. Since EUV is still in a development phase, the alpha demo tools have to be upgraded occasionally. By opening our facilities for each others EUV experiments, we can guarantee acceleration of EUV research to our industrial partners."

####

About UAlbany CNSE
The UAlbany CNSE is the first college in the world dedicated to research, development, education, and deployment in the emerging disciplines of nanoscience, nanoengineering, nanobioscience, and nanoeconomics. In May 2007, it was ranked as the world's number one college for nanotechnology and microtechnology in the Annual College Ranking by Small Times magazine. CNSE's Albany NanoTech complex is the most advanced research facility of its kind at any university in the world: a $4.2 billion, 450,000-square-foot complex that attracts corporate partners from around the world and offers students a one-of-a-kind academic experience. The UAlbany NanoCollege houses the only fully-integrated, 300mm wafer, computer chip pilot prototyping and demonstration line within 65,000 square feet of Class 1 capable cleanrooms. More than 2,000 scientists, researchers, engineers, students, and faculty work on site at CNSE's Albany NanoTech complex, from companies including IBM, AMD, SONY, Toshiba, ASML, Applied Materials, Tokyo Electron, and Freescale. An expansion currently underway will increase the size of CNSE's Albany NanoTech complex to over 800,000 square feet, including over 80,000 square feet of Class 1 capable cleanroom space, to house over 2,500 scientists, researchers, engineers, students, and faculty by mid-2009. For more information, visit http://www.cnse.albany.edu/.

About IMEC. IMEC is a world-leading independent research center in nanoelectronics and nanotechnology. Its research focuses on the next generations of chips and systems, and on the enabling technologies for ambient intelligence. IMEC's research bridges the gap between fundamental research at universities and technology development in industry. Its unique balance of processing and system know-how, intellectual property portfolio, state-of-the-art infrastructure and its strong network of companies, universities and research institutes worldwide position IMEC as a key partner for shaping technologies for future systems. IMEC vzw is headquartered in Leuven, Belgium, has a sister company in the Netherlands, IMEC-NL, concentrating on wireless autonomous transducer solutions, and has representatives in the US, China and Japan. Its staff of more than 1500 people includes more than 500 industrial residents and guest researchers. In 2006, its revenue (P&L) was EUR 227 million. Further information on IMEC can be found at http://www.imec.be /.

For more information, please click here

Contacts:
Steve Janack
Assistant Vice President for Marketing and Communications
518-956-7322


IMEC Contact:
Katrien Marent
External Communications Director
IMEC
(phone) +32 16 281 880
(cell) +32 474 30 28 66

Copyright © UAlbany CNSE

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Scientists take key step toward custom-made nanoscale chemical factories: Berkeley Lab researchers part of team that creates new function in tiny protein shell structures February 6th, 2016

Discovery of the specific properties of graphite-based carbon materials February 6th, 2016

Hepatitis virus-like particles as potential cancer treatment February 5th, 2016

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Academic/Education

COD Grad Begins Postdoctoral Fellow at Harvard University: Marsela Jorgolli's Passion for Physics Has Led to a Decade of Academic Research That Continues at Harvard University as a Postdoctoral Fellow February 2nd, 2016

Heriot-Watt's Institute of Photonics & Quantum Sciences uses the Deben Microtest 2 kN tensile stage to characterise ceramics and engineering plastics January 21st, 2016

Multiple uses for the JPK NanoWizard AFM system in the Smart Interfaces in Environmental Nanotechnology Group at the University of Illinois at Urbana-Champaign January 20th, 2016

BioSolar Extends Research Agreement With UCSB for Next Phase of Its Super Battery Technology: Development Effort to Continue Under the Supervision of Nobel Laureate, Dr. Alan Heeger January 13th, 2016

Alliances/Trade associations/Partnerships/Distributorships

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

Imec and Cloudtag Collaborate on High Quality Frictionless Wearables for Lifestyle Coaching: Next-generation health and fitness tracker Cloudtag TrackTM launched at CES 2016 January 7th, 2016

Technical partnership at the top – Oxford Instruments and Zurich Instruments announce a technical collaboration for low temperature physics January 7th, 2016

Production of Graphene Oxide Nanosheets to Economize Fuel Cells January 1st, 2016

Research partnerships

Scientists take key step toward custom-made nanoscale chemical factories: Berkeley Lab researchers part of team that creates new function in tiny protein shell structures February 6th, 2016

Polar vortices observed in ferroelectric: New state of matter holds promise for ultracompact data storage and processing February 4th, 2016

Spin dynamics in an atomically thin semi-conductor February 1st, 2016

Graphene shown to safely interact with neurons in the brain January 31st, 2016

Printing/Lithography/Inkjet/Inks

Teijin to Participate in Nano Tech 2016 January 21st, 2016

New bimetallic alloy nanoparticles for printed electronic circuits: Production of oxidation-resistant copper alloy nanoparticles by electrical explosion of wire for printed electronics January 5th, 2016

Photonic “sintering” may create new solar, electronics manufacturing technologies December 1st, 2015

Screen Printable Functionalised Graphene Ink November 3rd, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic