Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > NIST Develops Test Method for Key Micromechanical Property

Abstract:
Engineers and researchers designing and building new microelectromechanical systems (MEMS) can benefit from a new test method developed at the National Institute of Standards and Technology (NIST) to measure a key mechanical property of such systems: elasticity. The new method determines the "Young's modulus" of thin films not only for MEMS devices but also for semiconductor devices in integrated circuits.

NIST Develops Test Method for Key Micromechanical Property

GAITHERSBURG, MD | Posted on January 9th, 2008

Since 1727, scientists and engineers have used Young's modulus as a measure of the stiffness of a given material. Defined as the ratio of stress (such as the force per unit area pushing on both ends of a beam) to strain (the amount the beam is deflected), Young's modulus allows the behavior of a material under load to be calculated. Young's modulus predicts the length a wire will stretch under tension or the amount of compression that will buckle a thin film. A standard method to determine this important parameter—a necessity to ensure that measurements of Young's modulus made at different locations are comparable—has eluded those who design, manufacture and test MEMS devices, particularly in the semiconductor industry.

A team at NIST recently led the effort to develop SEMI Standard MS4-1107, "Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance." The new standard applies to thin films (such as those found in MEMS materials) that can be imaged using an optical vibrometer or comparable instrument for non-contact measurements of surface motion. In particular, measurements are obtained from resonating beams—comprised of the thin film layer—that oscillate out-of-plane. The frequency at which the maximum amplitude (or velocity) of vibration is achieved is a resonance frequency, which is used to calculate the Young's modulus of the thin film layer. The group also developed a special Web-based "MEMS calculator" ( http://www.eeel.nist.gov/812/test-structures/MEMSCalculator.htm ) that can be used to determine specific thin film properties from data taken with an optical interferometer.

Knowledge of the Young's modulus values and the residual strain (using ASTM International Standard E 2245) for thin film layers can lead to calculations of residual stress, which in turn, enable semiconductor manufacturers to develop circuit design strategies, fabrication systems and post-processing methods that could increase fabrication yield by reducing the frequency of failures from electromigration, stress migration and delamination.

SEMI Standard MS4-1107 is available for purchase from SEMI, an international industry organization serving the advanced manufacturing community, at
http://dom.semi.org/downloads.nsf/standard?openform&did=618EF551D3C0F6798825736300487EED&sid=0 .

####

About NIST
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Department of Commerce. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life.

For more information, please click here

Contacts:
Michael E. Newman

(301) 975-3025

Copyright © NIST

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

Chains of nanogold – forged with atomic precision September 23rd, 2016

Tattoo therapy could ease chronic disease: Rice-made nanoparticles tested at Baylor College of Medicine may help control autoimmune diseases September 23rd, 2016

Nanotech Grants Options September 22nd, 2016

Coffee-infused foam removes lead from contaminated water September 21st, 2016

Thin films

Continuous roll-process technology for transferring and packaging flexible LSI August 29th, 2016

Self-cleaning, anti-reflective, microorganism-resistant coatings: Researchers at the UPV/EHU-University of the Basque Country are modifying surface properties of materials to obtain specific properties at a lower cost August 9th, 2016

Scientists find a way of acquiring graphene-like films from salts to boost nanoelectronics: Physicists use supercomputers to find a way of making 'imitation graphene' from salt July 30th, 2016

Cambridge Advanced Imaging Centre praises support film consistency and quality from EM Resolutions July 5th, 2016

MEMS

NIST illuminates transfer of nanoscale motion through microscale machine September 14th, 2016

STMicroelectronics Earns MEMS Manufacturer of the Year Award August 1st, 2016

Integration of novel materials with silicon chips makes new 'smart' devices possible July 25th, 2016

New research unveils graphene 'moth eyes' to power future smart technologies: New ultra-thin, patterned graphene sheets will be essential in designing future technologies such as 'smart wallpaper' and Internet-of-things applications March 1st, 2016

Chip Technology

Mexican scientist in the Netherlands seeks to achieve data transmission ... speed of light September 20th, 2016

Towards Stable Propagation of Light in Nano-Photonic Fibers September 20th, 2016

PHENOMEN is a FET-Open Research Project aiming to lay the foundations a new information technology September 19th, 2016

NIST Patents Single-Photon Detector for Potential Encryption and Sensing Apps September 16th, 2016

Announcements

Chains of nanogold – forged with atomic precision September 23rd, 2016

Tattoo therapy could ease chronic disease: Rice-made nanoparticles tested at Baylor College of Medicine may help control autoimmune diseases September 23rd, 2016

Nanotech Grants Options September 22nd, 2016

Coffee-infused foam removes lead from contaminated water September 21st, 2016

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic