Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > NIST Develops Test Method for Key Micromechanical Property

Abstract:
Engineers and researchers designing and building new microelectromechanical systems (MEMS) can benefit from a new test method developed at the National Institute of Standards and Technology (NIST) to measure a key mechanical property of such systems: elasticity. The new method determines the "Young's modulus" of thin films not only for MEMS devices but also for semiconductor devices in integrated circuits.

NIST Develops Test Method for Key Micromechanical Property

GAITHERSBURG, MD | Posted on January 9th, 2008

Since 1727, scientists and engineers have used Young's modulus as a measure of the stiffness of a given material. Defined as the ratio of stress (such as the force per unit area pushing on both ends of a beam) to strain (the amount the beam is deflected), Young's modulus allows the behavior of a material under load to be calculated. Young's modulus predicts the length a wire will stretch under tension or the amount of compression that will buckle a thin film. A standard method to determine this important parameter—a necessity to ensure that measurements of Young's modulus made at different locations are comparable—has eluded those who design, manufacture and test MEMS devices, particularly in the semiconductor industry.

A team at NIST recently led the effort to develop SEMI Standard MS4-1107, "Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance." The new standard applies to thin films (such as those found in MEMS materials) that can be imaged using an optical vibrometer or comparable instrument for non-contact measurements of surface motion. In particular, measurements are obtained from resonating beams—comprised of the thin film layer—that oscillate out-of-plane. The frequency at which the maximum amplitude (or velocity) of vibration is achieved is a resonance frequency, which is used to calculate the Young's modulus of the thin film layer. The group also developed a special Web-based "MEMS calculator" ( http://www.eeel.nist.gov/812/test-structures/MEMSCalculator.htm ) that can be used to determine specific thin film properties from data taken with an optical interferometer.

Knowledge of the Young's modulus values and the residual strain (using ASTM International Standard E 2245) for thin film layers can lead to calculations of residual stress, which in turn, enable semiconductor manufacturers to develop circuit design strategies, fabrication systems and post-processing methods that could increase fabrication yield by reducing the frequency of failures from electromigration, stress migration and delamination.

SEMI Standard MS4-1107 is available for purchase from SEMI, an international industry organization serving the advanced manufacturing community, at
http://dom.semi.org/downloads.nsf/standard?openform&did=618EF551D3C0F6798825736300487EED&sid=0 .

####

About NIST
Founded in 1901, NIST is a non-regulatory federal agency within the U.S. Department of Commerce. NIST's mission is to promote U.S. innovation and industrial competitiveness by advancing measurement science, standards, and technology in ways that enhance economic security and improve our quality of life.

For more information, please click here

Contacts:
Michael E. Newman

(301) 975-3025

Copyright © NIST

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

News and information

JPK reports on research of the Mestroni Lab at the University of Colorado Denver which use the JPK NanoWizard® AFM to help in the characterization of cardiomyopathies April 24th, 2018

Organic solar cells reach record efficiency, benchmark for commercialization April 23rd, 2018

Remote-control shoots laser at nano-gold to turn on cancer-killing immune cells April 20th, 2018

New qubit now works without breaks: A universal design for superconducting qubits has been created April 19th, 2018

Thin films

Organic solar cells reach record efficiency, benchmark for commercialization April 23rd, 2018

MEMS

HTA to Present European Strategy for Competitive Micro- and Nanotechnologies & Smart Systems: Special Event in Brussels on April 24 Gathers Research Institutes’ CEOs, European Commissioners and Key European Industrials April 17th, 2018

New approach to measuring stickiness could aid micro-device design March 8th, 2018

MEMS chips get metatlenses: Combining metasurface lenses with MEMS technology could add high-speed scanning and enhance focusing capability of optical systems February 21st, 2018

First Capacitive Transducer with 13nm Gap July 27th, 2017

Chip Technology

New qubit now works without breaks: A universal design for superconducting qubits has been created April 19th, 2018

Salt boosts creation of 2-D materials: Rice University scientists show how salt lowers reaction temperatures to make novel materials April 18th, 2018

When superconductivity disappears in the core of a quantum tube: By replacing the electrons with ultra-cold atoms, a group of physicists has created a perfectly clean material, unveiling new states of matter at the quantum level April 16th, 2018

Nanometrics to Announce First Quarter Financial Results on May 1, 2018 April 10th, 2018

Announcements

JPK reports on research of the Mestroni Lab at the University of Colorado Denver which use the JPK NanoWizard® AFM to help in the characterization of cardiomyopathies April 24th, 2018

Organic solar cells reach record efficiency, benchmark for commercialization April 23rd, 2018

Remote-control shoots laser at nano-gold to turn on cancer-killing immune cells April 20th, 2018

New qubit now works without breaks: A universal design for superconducting qubits has been created April 19th, 2018

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project