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Home > Press > "Introduction to Focused Ion Beam Technology and its Application"

Abstract:
Description: Speaker: Dr. Christine Kranz, School of Chemistry and Biochemistry, Georgia Tech

Topic: "Introduction to Focused Ion Beam Technology and its Application"

Abstract: Within the last decade Focused Ion Beam technology has developed from a routine semiconductor tool into a versatile research instrument for characterization and prototyping. A major step towards the convergence of nanotechnology and nanoscience is the development and utilization of technologies, which allow precise patterning and assembly of features at a nanoscale. Dual beam FIB/SEM technology provides unsurpassed control and resolution during milling, deposition, and characterization at the nanoscale, thereby enabling high-resolution 3-D prototyping, machining, and structuring crucial to the development of next-generation functional nanodevices. An unambiguous advantage of FIB technology is the possibility for maskless milling and deposition processes. Application of FIB technology includes failure analysis, circuit repair and mask repair in microelectronics and TEM sample preparation. Recently, FIB has been also used in fabrication of scanning probe tips, optical devices and sensor technology. Nanostructuring using focused ion beams is governed by different parameters given by the beam profile, by the angle of incidence, by ion species, ion dose, and energy, and by the structural and chemical change of the sample by ion implantation.
Within this presentation an overview of this technology along with novel applications but also limitations will be presented.

"Introduction to Focused Ion Beam Technology and its Application"

Atlanta, GA | Posted on January 8th, 2008

See the schedule of future meetings at: http://www.mirc.gatech.edu/nanomeeting.php

This event is free and lunch is provided, but space is limited. Please RSVP by Monday, January 21st to:

We hope to see you there!

Nano Researchers are invited to Nano @ Tech, a group of graduate and undergraduate students who meet the 2nd and 4th Tuesday of every month at Noon in the Georgia Tech Microelectronics Research Center, Rooms 102A & B to hear distinguished professors discuss their latest research, take lab tours, and participate in K-12 educational outreach in the field of nanotechnology at Georgia Tech and Emory. Pre-registration is required. Students may register to attend and participate in outreach activities. The group is sponsored by the National Science foundation's National Nanotechnology Infrastructure Network (NNIN).

Start Time: 1/22/2008 at 12:00 PM

End Time: 1/22/2008 at 1:00 PM

Where: MiRC, Room 102A
791 Atlantic Drive NW
Atlanta, GA 30332

Directions: On Georgia Tech campus, Between CoC and the Van Leer Building, corner of Ferst and Atlantic Drive

Pricing: Pre-Registered Members: FREE Pre-Registered Non-Members: FREE Cost At Door: FREE

Est. # Attendees: 40

Event URL: http://nano.gatech.edu

Group Phone #: 404-894-5100

####

For more information, please click here

Contacts:
Katie Hutchison
404 894 5100

Copyright © Georgia Tech

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