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Carbon nanotube tool developer appoints AxR as its US representativeUK | Posted on November 28th, 2007
Surrey NanoSystems' first carbon nanotube tool, NanoGrowth 1000n, is attracting a lot of interest as it incorporates proven nanomaterial processing recipes developed at the Advanced Technology Institute, which operate at temperatures compatible with commercial semiconductor processes. Precision fabrication and configuration repeatability principles are also at the core of the tool's architecture, which has been developed by engineers with many years of experience of creating thin-film tools for both scientific research and commercial fabrication. Surrey NanoSystems also manufactures a high-end thin film sputtering tool, the Gamma 1000. This features a highly modular architecture, making it very versatile, and the system is often selected for research and development applications.
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