Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > Oerlikon Systems Announces VERSALINE(TM) Sale to Cornell University

Abstract:
Oerlikon Systems recently announced that the Cornell University Nanoscale Science and Technology Facility (CNF) in Ithaca, New York has purchased a VERSALINE™ deep silicon dry etching system.

Oerlikon Systems Announces VERSALINE(TM) Sale to Cornell University

St. Petersburg, FL | Posted on October 30th, 2007

This VERSALINE™ system will bring new processing capability for MEMS device fabrication as well as enabling a broad range of nanoscale science and technology projects. The system incorporates Oerlikon's latest Deep Silicon Etch (DSE®) technology that provides the etching precision and process latitude necessary to create the next generation of nanoscale and MEMS devices.

The Cornell Nanoscale Science & Technology Facility ( http://www.cnf.cornell.edu ) is a national user facility that provides state-of-the-art resources coupled with expert staff as part of the National Nanofabrication Infrastructure Network (NNIN). This year marks CNF's 30th year in operation. Research at CNF encompasses physical sciences, engineering, and life sciences, and has a strong inter-disciplinary emphasis. Over 700 users per year (50% of them come from outside Cornell) use the fabrication, synthesis, computation, characterization, and integration resources of CNF to build structures, devices and systems from atomic to micron length-scales. Dry etching of silicon is one of the critical processes for research in these areas.

"After an extensive and detailed evaluation of the available deep silicon etch technology, Oerlikon's VERSALINE™ DSE® performance offered the best combination of outstanding process latitude, mask selectivity, and high etch rate we require to meet the needs of our numerous user projects," stated Don Tennant, Directory of Operations at CNF.

Added Vince Genova, CNF's engineer responsible for analyzing the various results, "This state of the art DRIE system also minimized RIE lag, demonstrated high aspect ratio etching, improved sidewall morphology, and eliminated common artifacts encountered in DRIE. We look forward to the tool's arrival later this year."

David Lishan, Principal Scientist at Oerlikon Systems, states, "Our collaborations with Cornell goes back nearly a decade and we are pleased to continue working with Cornell to extend the boundaries of MEMS and nanotechnology. This opportunity is another example of Oerlikon's commitment to advanced research."

####

About Oerlikon Systems
Oerlikon (SWX:OERL) is among the world's most successful industrial high-tech companies focusing on machine and systems engineering. Oerlikon stands for leading industrial solutions and cutting-edge technology in textile production, thin film coating, propulsion, precision and vacuum technology. As a company with Swiss roots and a 100-year tradition, Oerlikon, with CHF 4.8 billion in sales, over 19,000 employees at 170 locations in 35 countries, has evolved into a global player today.

For more information, please click here

Contacts:
OC Oerlikon Balzers Ltd., St. Petersburg
Sven E. Jarby, Phone 727-577-4999

or
Corporate Communications
Burkhard Boendel, Phone +41 58 360 96 05 or
Fax +41 58 360 91 93

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

MEMS

Vesper Collaborates with GLOBALFOUNDRIES to Deliver First Piezoelectric MEMS Microphones: Acoustic sensing company works with top foundry to support mass-market consumer products January 21st, 2016

MEMS & Sensors Industry Group Previews “Internet of MEMS & Sensors” at CES 2016 -- Global industry association invites CE OEMS/integrators to conference track on January 7 January 6th, 2016

SITRI and Accelink Announce Cooperative Agreement on Opto-Electronic Communication December 31st, 2015

Nanodevices at one-hundredth the cost: New techniques for building microelectromechanical systems show promise December 20th, 2015

Announcements

Study reveals how herpes virus tricks the immune system February 5th, 2016

Hepatitis virus-like particles as potential cancer treatment February 5th, 2016

Organic crystals allow creating flexible electronic devices: The researchers from the Faculty of Physics of the Moscow State University have grown organic crystals that allow creating flexible electronic devices February 5th, 2016

Researchers discover new phase of boron nitride and a new way to create pure c-BN February 5th, 2016

Tools

Researchers discover new phase of boron nitride and a new way to create pure c-BN February 5th, 2016

Cornell researchers create first self-assembled superconductor February 1st, 2016

New record in nanoelectronics at ultralow temperatures January 28th, 2016

LC.300 Series Nanopositioning Controller from nPoint January 28th, 2016

New-Contracts/Sales/Customers

Heriot-Watt's Institute of Photonics & Quantum Sciences uses the Deben Microtest 2 kN tensile stage to characterise ceramics and engineering plastics January 21st, 2016

Industrial Nanotech, Inc. Begins Supplying One of World's Largest Pulp and Paper Product Companies with Patented Energy Saving and Protective Coatings for Heat Process Equipment January 4th, 2016

Industrial Nanotech, Inc. Announces Two More Offshore Oil and Gas Platform Projects December 9th, 2015

Nanotech Signs MOU with Leading European Manufacturer to Supply Optical Thin Film to the Banknote Market: Alliance Combines Technology and Production Capacity to Address High Volume Opportunities November 17th, 2015

NanoNews-Digest
The latest news from around the world, FREE




  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







Car Brands
Buy website traffic