Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button


Home > Press > Oerlikon Systems Announces VERSALINE(TM) Sale to Cornell University

Oerlikon Systems recently announced that the Cornell University Nanoscale Science and Technology Facility (CNF) in Ithaca, New York has purchased a VERSALINE™ deep silicon dry etching system.

Oerlikon Systems Announces VERSALINE(TM) Sale to Cornell University

St. Petersburg, FL | Posted on October 30th, 2007

This VERSALINE™ system will bring new processing capability for MEMS device fabrication as well as enabling a broad range of nanoscale science and technology projects. The system incorporates Oerlikon's latest Deep Silicon Etch (DSE®) technology that provides the etching precision and process latitude necessary to create the next generation of nanoscale and MEMS devices.

The Cornell Nanoscale Science & Technology Facility ( ) is a national user facility that provides state-of-the-art resources coupled with expert staff as part of the National Nanofabrication Infrastructure Network (NNIN). This year marks CNF's 30th year in operation. Research at CNF encompasses physical sciences, engineering, and life sciences, and has a strong inter-disciplinary emphasis. Over 700 users per year (50% of them come from outside Cornell) use the fabrication, synthesis, computation, characterization, and integration resources of CNF to build structures, devices and systems from atomic to micron length-scales. Dry etching of silicon is one of the critical processes for research in these areas.

"After an extensive and detailed evaluation of the available deep silicon etch technology, Oerlikon's VERSALINE™ DSE® performance offered the best combination of outstanding process latitude, mask selectivity, and high etch rate we require to meet the needs of our numerous user projects," stated Don Tennant, Directory of Operations at CNF.

Added Vince Genova, CNF's engineer responsible for analyzing the various results, "This state of the art DRIE system also minimized RIE lag, demonstrated high aspect ratio etching, improved sidewall morphology, and eliminated common artifacts encountered in DRIE. We look forward to the tool's arrival later this year."

David Lishan, Principal Scientist at Oerlikon Systems, states, "Our collaborations with Cornell goes back nearly a decade and we are pleased to continue working with Cornell to extend the boundaries of MEMS and nanotechnology. This opportunity is another example of Oerlikon's commitment to advanced research."


About Oerlikon Systems
Oerlikon (SWX:OERL) is among the world's most successful industrial high-tech companies focusing on machine and systems engineering. Oerlikon stands for leading industrial solutions and cutting-edge technology in textile production, thin film coating, propulsion, precision and vacuum technology. As a company with Swiss roots and a 100-year tradition, Oerlikon, with CHF 4.8 billion in sales, over 19,000 employees at 170 locations in 35 countries, has evolved into a global player today.

For more information, please click here

OC Oerlikon Balzers Ltd., St. Petersburg
Sven E. Jarby, Phone 727-577-4999

Corporate Communications
Burkhard Boendel, Phone +41 58 360 96 05 or
Fax +41 58 360 91 93

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press


STMicroelectronics Keynotes on the Next MEMS Wave at MIG Conference Asia September 2nd, 2015

Iranian Scientists Create Best Conditions for Synthesis of Gold Nanolayers July 23rd, 2015

Robust new process forms 3-D shapes from flat sheets of graphene June 23rd, 2015

Slip sliding away: Graphene and diamonds prove a slippery combination June 10th, 2015


Observing the unobservable: Researchers measure electron orbitals of molecules in 3-D October 6th, 2015

Superconductivity trained to promote magnetization: Russian scientist and her colleagues discovered the superconductivity effect, which will help to create future supercomputers October 6th, 2015

Nanoscale photodetector shows promise to improve the capacity of photonic circuits: Researchers at the University of Rochester have fabricated a device in which light can induce a current using a silver nanowire -- an important step toward harnessing light to speed up the next ge October 6th, 2015

Big range of behaviors for tiny graphene pores: Like biological channels, graphene pores are selective for certain types of ions October 6th, 2015


Electron tomography with 3,487 images in 3.5 seconds: High-speed electron tomography sets new standards for 3-D images of the nanoworld October 6th, 2015

Rice news release: Smaller is better for nanotube analysis: Rice University's variance spectroscopy technique advances nanoparticle analysis September 30th, 2015

Flex-ANA workshop at NCSU: Flex-ANA: An Automated System for Nanomechanical Analysis of Soft Materials — October 28 (NCSU, Raleigh, NC, US) September 30th, 2015

Nanosurf at the SYNMarburg 2015 Summer School: Nanosurf at the SYNMarburg 2015 Summer School September 30th, 2015


Harris & Harris Group Portfolio Company, D-Wave Systems, Announces Multi-Year Agreement to Provide Its Technology to Google, NASA and USRA's Quantum Artificial Intelligence Lab October 6th, 2015

CAMECA Helps US Navy LEAP Forward in Materials Design: CAMECA Delivers Local Electrode Atom Probe (LEAP) To US Naval Research Laboratory for Advanced Materials Development September 11th, 2015

Tongfang Global and QD Vision Partner to Bring Wide Color Gamut to Global Television Lines: Color IQTM quantum dots help boost company’s focus on superior color reproduction September 3rd, 2015

Nanolab Technologies LEAPS Forward with High-Performance Analysis Services to the World: Nanolab Orders Advanced Local Electrode Atom Probe (LEAP®) Microscope from CAMECA Unit of AMETEK Materials Analysis Division August 27th, 2015

The latest news from around the world, FREE

  Premium Products
Only the news you want to read!
 Learn More
University Technology Transfer & Patents
 Learn More
Full-service, expert consulting
 Learn More

Nanotechnology Now Featured Books


The Hunger Project

Car Brands
Buy website traffic