Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


android tablet pc

Home > Press > Oerlikon Systems Announces VERSALINE(TM) Sale to Cornell University

Abstract:
Oerlikon Systems recently announced that the Cornell University Nanoscale Science and Technology Facility (CNF) in Ithaca, New York has purchased a VERSALINE™ deep silicon dry etching system.

Oerlikon Systems Announces VERSALINE(TM) Sale to Cornell University

St. Petersburg, FL | Posted on October 30th, 2007

This VERSALINE™ system will bring new processing capability for MEMS device fabrication as well as enabling a broad range of nanoscale science and technology projects. The system incorporates Oerlikon's latest Deep Silicon Etch (DSE®) technology that provides the etching precision and process latitude necessary to create the next generation of nanoscale and MEMS devices.

The Cornell Nanoscale Science & Technology Facility ( http://www.cnf.cornell.edu ) is a national user facility that provides state-of-the-art resources coupled with expert staff as part of the National Nanofabrication Infrastructure Network (NNIN). This year marks CNF's 30th year in operation. Research at CNF encompasses physical sciences, engineering, and life sciences, and has a strong inter-disciplinary emphasis. Over 700 users per year (50% of them come from outside Cornell) use the fabrication, synthesis, computation, characterization, and integration resources of CNF to build structures, devices and systems from atomic to micron length-scales. Dry etching of silicon is one of the critical processes for research in these areas.

"After an extensive and detailed evaluation of the available deep silicon etch technology, Oerlikon's VERSALINE™ DSE® performance offered the best combination of outstanding process latitude, mask selectivity, and high etch rate we require to meet the needs of our numerous user projects," stated Don Tennant, Directory of Operations at CNF.

Added Vince Genova, CNF's engineer responsible for analyzing the various results, "This state of the art DRIE system also minimized RIE lag, demonstrated high aspect ratio etching, improved sidewall morphology, and eliminated common artifacts encountered in DRIE. We look forward to the tool's arrival later this year."

David Lishan, Principal Scientist at Oerlikon Systems, states, "Our collaborations with Cornell goes back nearly a decade and we are pleased to continue working with Cornell to extend the boundaries of MEMS and nanotechnology. This opportunity is another example of Oerlikon's commitment to advanced research."

####

About Oerlikon Systems
Oerlikon (SWX:OERL) is among the world's most successful industrial high-tech companies focusing on machine and systems engineering. Oerlikon stands for leading industrial solutions and cutting-edge technology in textile production, thin film coating, propulsion, precision and vacuum technology. As a company with Swiss roots and a 100-year tradition, Oerlikon, with CHF 4.8 billion in sales, over 19,000 employees at 170 locations in 35 countries, has evolved into a global player today.

For more information, please click here

Contacts:
OC Oerlikon Balzers Ltd., St. Petersburg
Sven E. Jarby, Phone 727-577-4999

or
Corporate Communications
Burkhard Boendel, Phone +41 58 360 96 05 or
Fax +41 58 360 91 93

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

MEMS

LetiDays Grenoble to Present Multiple Perspectives on Development, Challenges and Markets for the IoT April 14th, 2014

Rainbow-catching waveguide could revolutionize energy technologies: By slowing and absorbing certain wavelengths of light, engineers open new possibilities in solar power, thermal energy recycling and stealth technology March 28th, 2014

Micro systems with big commercial potential featured in SPIE journal: Special section in Journal of Micro/Nanolithography, MEMS, and MOEMS highlights emerging MOEMS technologies March 25th, 2014

Martini Tech Inc. Starts to Offer GaN Deposition Service by MOCVD March 25th, 2014

Announcements

INSCX™ exchange to present Exchange trade reporting mechanism for engineered nanomaterials (NMs) to UK regulation agencies, insurers and upstream/downstream users April 17th, 2014

Transparent Conductive Films and Sensors Are Hot Segments in Printed Electronics: Start-ups in these fields show above-average momentum, while companies working on emissive displays such as OLED are fading, Lux Research says April 17th, 2014

Harris & Harris Group Continues Its Blog Series to Highlight Most Impactful Portfolio Companies With Champions Oncology, Inc. April 17th, 2014

Energy Research Facility Construction Project at Brookhaven Lab Wins U.S. Energy Secretary's Achievement Award April 16th, 2014

Tools

Scientists Capture Ultrafast Snapshots of Light-Driven Superconductivity: X-rays reveal how rapidly vanishing 'charge stripes' may be behind laser-induced high-temperature superconductivity April 16th, 2014

Aerotech X-Y ball-screw stage for economical high performance Planar positioning April 16th, 2014

Malvern reports on the publication of the 1000th peer-reviewed paper to cite NanoSight’s Nanoparticle Tracking Analysis, NTA April 16th, 2014

JPK announces expansion of its global sales and service activities in China and USA April 15th, 2014

New-Contracts/Sales/Customers

Industrial Nanotech, Inc. Lands First Major Order from Pemex, Mexico’s State-Owned Oil and Gas Company April 14th, 2014

TED Selects Nanotech for Branding and Security on 30th Anniversary Conferences: Nanotech and TED collaborate to create a custom security feature using nano-imaging March 17th, 2014

Simon Fraser University Completes Installation of Electron Microscopes from FEI: SFU’s new multi-million-dollar Centre for Soft Materials now offers the most advanced suite of microscopes in Western Canada March 11th, 2014

Arrowhead Receives Regulatory Approval to Begin Phase 2a Trial of Chronic Hepatitis B Candidate ARC-520 March 3rd, 2014

NanoNews-Digest
The latest news from around the world, FREE







  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More














ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project







© Copyright 1999-2014 7th Wave, Inc. All Rights Reserved PRIVACY POLICY :: CONTACT US :: STATS :: SITE MAP :: ADVERTISE