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Home > Press > Tiny Ceramic Linear Motor Moves Fast with Nanometer Precision

The N-310  NEXACT® linear actuator
shown with the E-861 Controller
The N-310 NEXACT® linear actuator shown with the E-861 Controller

PI (Physik Instrumente) L.P. — a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for semiconductor, bio-nanotechnology and photonics applications
— introduces the N-310 NEXACT® miniature ceramic linear motor actuator.

Tiny Ceramic Linear Motor Moves Fast with Nanometer Precision

Auburn, MA | Posted on September 20th, 2007

Features & Advantages:
- Very Compact (25x25x12 mm) and Cost-Effective
- Non-Magnetic and Vacuum-Compatible Design, Self-Locking
- 10 N Push/Pull, 20 mm Travel, 10 mm/sec Speed
- Picometer Resolution
- Very Stiff Design, Millisecond Response & High Bandwidth

More Information:

Typical Applications: Laser Tuning, Nanotechnology, Nano-Imprint, Semiconductor & Data-Storage Test & Production Equipment, Nanomanipulation, Bio-Technology.

New Design Bridges the Micro / Nanopositioning Gap, < 1/2 Cubic Inch
NEXACT® is a patented, high-precision linear motor actuator developed to bridge the gap between micro- and nanopositioning devices. At ∏ cubic inch and 50 g (1.7 oz), the new NEXACT® actuator is significantly smaller and more cost effective than its big "brother". This high-force ceramic motor, dubbed NEXLINE® has already won a technology award from the semiconductor community.

Working Principle: Piezo Bending Elements Drive a Ceramic Runner
NEXACT® actuators provide piezo-class resolution (far below one nanometer) and millisecond responsiveness. The new technology combines virtually unlimited travel ranges with high stiffness in a very small package. In operation, piezoceramic bending elements act on the ceramic runner, connected to the moving part of the application. The length of the runner can be chosen as required, force capacity, resolution and velocity depend on the piezo geometry and are also scalable. To move the runner over longer distances the stepping mode is used, whereas for distances smaller than 7µm, the linear (sweep) mode enables high-dynamics positioning with resolutions far below one nanometer. The special drive design reduces the operating voltage to 40 V and below.

Self-Locking, No Wear, Maintenance-Free
In contrast to servo or stepper motor actuators, the piezo stepping elements effect linear motion directly, without the need to transform rotation with gears and leadscrews. Backlash and wear are eliminated and the drive is maintenance-free. NEXACT® actuators exhibit high stiffness and are self-locking when powered down with nanometer position stability, and zero dissipation or servo-dither at rest.


About PI (Physik Instrumente) L.P.
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+.

For more information, please click here

Stefan Vorndran
Dir. Corp. Product Marketing & Communications
PI (Physik Instrumente) L.P.
16 Albert St.
Auburn, MA 01501

Tel: 508-832-3456,
Fax: 508-832-0506

Copyright © PI (Physik Instrumente) L.P.

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