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Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale FabricationBILLERICA, MA | Posted on September 13th, 2007
SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard's FAS Center for Nanoscale Systems (CNS) in October. The CNS at Harvard is an open, shared-use facility serving hundreds of researchers each year. It is part of the NSF's National Nanotechnology Infrastructure Network (NNIN). The Elionix ELS-7000 will be used by CNS users to fabricate nanoscale devices for advanced research projects.
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