Home > Press > Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication
|The CNS 100kV System built at the Elionix NanoTech Center for delivery to the Harvard campus.|
SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard‚s FAS Center for Nanoscale Systems (CNS) in October.
Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication
BILLERICA, MA | Posted on September 13th, 2007
SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard's FAS Center for Nanoscale Systems (CNS) in October. The CNS at Harvard is an open, shared-use facility serving hundreds of researchers each year. It is part of the NSF's National Nanotechnology Infrastructure Network (NNIN). The Elionix ELS-7000 will be used by CNS users to fabricate nanoscale devices for advanced research projects.
"I am very pleased with the recent orders from Harvard and other major universities in the U.S.," states Seigo Honme, Elionix President. "After having established the highest market share for electron beam lithography systems in Japan and the Far East, I am confident that our teamwork with SEMTech Solutions in North America will find an increasing number of customers who will come to appreciate the high performance of Elionix systems."
Eric Martin, Technical Director for CNS says, "We were very impressed with the performance of the ELS-7000 system. We are also pleased with the commitment from the Elionix team to help us meet our Center's objectives for excellent technical service."
The Elionix ELS-7000 is an ultra high precision electron beam lithography system capable of generating patterns with a line width of less than 8nm. The system provides a stable 1.8nm electron beam using high beam currents at 100kV. Fine line patterns can be drawn using commercially available resists.
About SEMTech Solutions, Inc.
SEMTech Solutions is a leading North American sales and service representation company handling scientific instrumentation. In addition, we are also a leading supplier of refurbished SEMs and SEM services. With a growing customer base of over 100 companies, ranging from start-ups to Fortune 500 industries, we have the electron beam knowledge to meet any demand.
Elionix is a worldwide leading manufacturer of electron beam lithography systems, 3-D surface roughness measurement systems, and other pieces of equipment dedicated to nanotechnology. Located in Tokyo, Japan, Elionix is a privately held company that has spearheaded the development of advanced equipment for next generation technologies for over 30 years.
For more information, please click here
Copyright © SEMTech Solutions, Inc.
If you have a comment, please Contact
Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.
Get ready for NanoDays! March 5th, 2015
NanoTecNexus Launches New App for Learning About Nanotechnology—STEM Education Project Spearheaded by Interns February 26th, 2015
SUNY Poly CNSE Researchers and Corporate Partners to Present Forty Papers at Globally Recognized Lithography Conference: SUNY Poly CNSE Research Group Awarded Both ‘Best Research Paper’ and ‘Best Research Poster’ at SPIE Advanced Lithography 2015 forum February 25th, 2015
KIT Increases Commitment in Asia: DAAD Funds Two New Projects: Strategic Partnerships with Chinese Universities and Communi-cation Technologies Network February 22nd, 2015
The George Washington University Opens Science and Engineering Hall, Largest Building of Its Kind in D.C.: Building Represents Significant Investment in Research Programs and Facilities; Commitment to Solve Global Problems, Improve Lives of Millions March 5th, 2015
Anousheh Ansari Wins the National Space Society's Space Pioneer Award for "Service to the Space Community" March 5th, 2015
Enhanced Graphene Components for Next Generation Racing Yacht March 5th, 2015
Get ready for NanoDays! March 5th, 2015
Keysight Technologies Shifts to Direct Sales of High-Performance Products in North America March 3rd, 2015
Forbidden quantum leaps possible with high-res spectroscopy March 2nd, 2015
International research partnership tricks the light fantastic March 2nd, 2015
Important step towards quantum computing: Metals at atomic scale March 2nd, 2015