Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication

The CNS 100kV System built at the Elionix NanoTech Center for delivery to the Harvard campus.
The CNS 100kV System built at the Elionix NanoTech Center for delivery to the Harvard campus.

Abstract:
SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard‚s FAS Center for Nanoscale Systems (CNS) in October.

Harvard Researchers Select the ELIONIX 100kV Electron Beam Lithography System for Nanoscale Fabrication

BILLERICA, MA | Posted on September 13th, 2007

SEMTech Solutions, Inc., announced that it will deliver an Elionix 100kV Electron Beam Lithography system to Harvard's FAS Center for Nanoscale Systems (CNS) in October. The CNS at Harvard is an open, shared-use facility serving hundreds of researchers each year. It is part of the NSF's National Nanotechnology Infrastructure Network (NNIN). The Elionix ELS-7000 will be used by CNS users to fabricate nanoscale devices for advanced research projects.

"I am very pleased with the recent orders from Harvard and other major universities in the U.S.," states Seigo Honme, Elionix President. "After having established the highest market share for electron beam lithography systems in Japan and the Far East, I am confident that our teamwork with SEMTech Solutions in North America will find an increasing number of customers who will come to appreciate the high performance of Elionix systems."

Eric Martin, Technical Director for CNS says, "We were very impressed with the performance of the ELS-7000 system. We are also pleased with the commitment from the Elionix team to help us meet our Center's objectives for excellent technical service."

The Elionix ELS-7000 is an ultra high precision electron beam lithography system capable of generating patterns with a line width of less than 8nm. The system provides a stable 1.8nm electron beam using high beam currents at 100kV. Fine line patterns can be drawn using commercially available resists.

####

About SEMTech Solutions, Inc.
SEMTech Solutions is a leading North American sales and service representation company handling scientific instrumentation. In addition, we are also a leading supplier of refurbished SEMs and SEM services. With a growing customer base of over 100 companies, ranging from start-ups to Fortune 500 industries, we have the electron beam knowledge to meet any demand.

ELIONIX, Inc.
Elionix is a worldwide leading manufacturer of electron beam lithography systems, 3-D surface roughness measurement systems, and other pieces of equipment dedicated to nanotechnology. Located in Tokyo, Japan, Elionix is a privately held company that has spearheaded the development of advanced equipment for next generation technologies for over 30 years.

For more information, please click here

Contacts:
Gary Brake
Phone: 978-663-9822

Copyright © SEMTech Solutions, Inc.

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Academic/Education

Luleå University of Technology is using the Deben CT5000TEC stage to perform x-ray microtomography experiments with the ZEISS Xradia 510 Versa to understand deformation and strain inside inhomogeneous materials November 7th, 2017

Park Systems Announces the Grand Opening of the Park NanoScience Center at SUNY Polytechnic Institute November 3rd, 2017

Two Scientists Receive Grants to Develop New Materials: Chad Mirkin and Monica Olvera de la Cruz recognized by Sherman Fairchild Foundation August 16th, 2017

Moving at the Speed of Light: University of Arizona selected for high-impact, industrial demonstration of new integrated photonic cryogenic datalink for focal plane arrays: Program is major milestone for AIM Photonics August 10th, 2017

Announcements

A new product to help combat mouldy walls, thanks to technology developed at the ICN2 December 14th, 2017

Sandia researchers make solid ground toward better lithium-ion battery interfaces: Reducing the traffic jam in batteries December 13th, 2017

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Columbia engineers create artificial graphene in a nanofabricated semiconductor structure: Researchers are the first to observe the electronic structure of graphene in an engineered semiconductor; finding could lead to progress in advanced optoelectronics and data processing December 13th, 2017

Tools

Perking up and crimping the 'bristles' of polyelectrolyte brushes December 13th, 2017

Untangling DNA: Researchers filter the entropy out of nanopore measurements December 8th, 2017

JPK Instruments announce partnership with Swiss company, Cytosurge AG. The partnership makes Cytosurge’s FluidFM® technology available on the JPK NanoWizard® AFM platform December 8th, 2017

Researchers advance technique to detect ovarian cancer: Rice, MD Anderson use fluorescent carbon nanotube probes to achieve first in vivo success November 30th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project