Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > IBM and Imago Find a Crucial Difficulty in Semiconductor Device Scaling

Abstract:
In 1959, Nobel Prize winner Richard Feynman presented a talk entitled "There's Plenty of Room at the Bottom." Feynman concluded that there was no physical reason why humans couldn't manipulate atoms. However, if atomic manipulation is achieved the question of observing the new atom positions remains. " How do you know what you have done?"

IBM and Imago Find a Crucial Difficulty in Semiconductor Device Scaling

Madison, WI | Posted on September 6th, 2007

As reported in the Sept. 7, 2007 issue of Science, IBM and Imago have taken a seminal step along the path to achieving Dr. Feynman's vision by observing, for the first time, distributions of individual dopant atoms in semiconductor devices. Atom probe tomography was used to quantify the location and elemental identity of the atoms proximate to defects in silicon. The dopants were implanted into the silicon uniformly and it was always hoped that the distribution of dopant atoms would be uniform. However, the IBM and Imago researchers found that clusters (more properly Cottrell atmospheres) of dopant atoms form around defects after ion implantation and annealing. Furthermore, these atmospheres persist in surrounding dislocation loops even after considerable thermal treatment creating dopant fluctuations that may ultimately limit the scalability of semiconductor devices.

"This is the first time that unambiguous quantitative 3D information regarding the precise location of individual dopant atoms relative to defects has been available", said study co-author and Imago CEO Tom Kelly. "The ability of the Imago LEAP 3000X Si laser assisted atom probe to make this measurement is the fruition of many years of instrumentation and applications development. We now have a powerful new way to probe the atomic positions of dopants in a semiconductor device. This is a critical tool for scientists seeking to answer Professor Feynman's challenge to manipulate matter at the atomic level and hence enable nanotechnology."

Previously, researchers have used secondary ion mass spectrometry (SIMS) and transmission electron microscopy (TEM) to correlate indirectly the presence of dopant atoms with the evolution of defects, and detailed models have been proposed to account for these experimental correlations. However, the atom probe study published in Science reports, for the first time, the location of individual dopant atoms. Said Imago Senior Director of Applications and co-author David Larson, "The Sept. 7 Science article is the most recent in a series of significant scientific advances reported by Imago's customers." Added Dr. Larson, "In addition to producing breakthrough published scientific results, the Imago atom probe is also being applied to various industrial problems. These proprietary results are advancing scientific knowledge, enabling the development of new products, and improving time to market for our customers."

####

About Imago Scientific Instruments
Imago is a world class provider of metrology and analysis equipment serving the microelectronic and general research markets. We are committed to the development of the nanotechnology solutions required as the semiconductor, data storage and advanced materials industries increasingly enter the realm of nanotechnology. Imago provides time-to-market advantages to our customers through leading edge technology in the field of three-dimensional, nanoscale, metrology and analysis equipment. Imago’s manufacturing and engineering facilities are located in Madison, Wisconsin. Global sales and service offices are located throughout the United States, Europe, Japan, and Asia Pacific.

For more information, please click here

Contacts:
Imago Scientific Instruments Corporation
5500 Nobel Drive
Madison, WI 53711 USA
Phone: +1 (608) 274-6880
Toll-free: +1 (877) GO-IMAGO
Fax: +1 (608) 442-0622

Copyright © Imago Scientific Instruments

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Announcements

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

New nano approach could cut dose of leading HIV treatment in half February 24th, 2017

Atom-scale oxidation mechanism of nanoparticles helps develop anti-corrosion materials February 24th, 2017

Atomic force imaging used to study nematodes: KFU bionanotechnology lab (head - Dr. Rawil Fakhrullin) has obtained 3-D images of nematodes' cuticles February 23rd, 2017

Tools

Atomic force imaging used to study nematodes: KFU bionanotechnology lab (head - Dr. Rawil Fakhrullin) has obtained 3-D images of nematodes' cuticles February 23rd, 2017

JPK selects compact tensile stage from Deben for their NanoWizard® AFM platform to broaden capabilities for materials characterisation February 22nd, 2017

Molecular phenomenon discovered by advanced NMR facility: Cutting edge technology has shown a molecule self-assembling into different forms when passing between solution state to solid state, and back again - a curious phenomenon in science - says research by the University of Wa February 22nd, 2017

Strem Chemicals and Dotz Nano Ltd. Sign Distribution Agreement for Graphene Quantum Dots Collaboration February 21st, 2017

Alliances/Trade associations/Partnerships/Distributorships

Strem Chemicals and Dotz Nano Ltd. Sign Distribution Agreement for Graphene Quantum Dots Collaboration February 21st, 2017

Leti Coordinating Project to Adapt Obstacle-Detection Technology Used in Autonomous Cars for Portable and Wearable Systems: INSPEX to Combine Knowhow of Nine European Organizations to Create Portable and Wearable Spatial-Exploration Systems February 2nd, 2017

GLOBALFOUNDRIES Expands Partner Program to Speed Time-to-Market of FDX™ Solutions: Increased support affirms FDXcelerator™ Program’s vital role in promoting broader deployment of GLOBALFOUNDRIES’ FDX™ portfolio December 15th, 2016

Infrared instrumentation leader secures exclusive use of Vantablack coating December 5th, 2016

Research partnerships

Sandia use confined nanoparticles to improve hydrogen storage materials performance: Big changes from a small package for hydrogen storage February 25th, 2017

Molecular phenomenon discovered by advanced NMR facility: Cutting edge technology has shown a molecule self-assembling into different forms when passing between solution state to solid state, and back again - a curious phenomenon in science - says research by the University of Wa February 22nd, 2017

Graphene foam gets big and tough: Rice University's nanotube-reinforced material can be shaped, is highly conductive February 13th, 2017

Cedars-Sinai, UCLA Scientists Use New ‘Blood Biopsies’ With Experimental Device to Speed Cancer Diagnosis and Predict Disease Spread: Leading-Edge Research Is Part of National Cancer Moonshot Initiative February 13th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project