Nanotechnology Now - News Story: Vistec Lands E-beam Litho at German Center

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August 22nd, 2007

Vistec Lands E-beam Litho at German Center

Abstract:
Vistec Lithography Inc. (Watervliet, N.Y.) said it has installed a Vistec VB6 electron-beam lithography system at German nanotechnology research center Forschungszentrum Karlsruhe.

Source:
semiconductor.net

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