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Home > News > Deposition System processes 6 in. dia or smaller wafers

August 10th, 2007

Deposition System processes 6 in. dia or smaller wafers

Abstract:
Able to process up to 100 wafers, EasyTube 6000 Chemical Vapor Deposition system is available with Atmospheric and Low-Pressure Chemical Vapor Deposition processes for research applications in semiconductor, MEM, nanotechnology, and solar cell markets. Multi-tube horizontal system is equipped with WINPRC real-time software to enable optimization of all process parameters and is designed specifically for research, university, and laboratory markets.

Source:
thomasnet.com

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