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Home > Press > Ultra-Precision XYZ Piezo Nano-Positioning Stage Scans & Positions Faster and More Accurately

The P-733.3CD XYZ nanopositioning scanning stage with an E-761 PCI bus Piezo controller
The P-733.3CD XYZ nanopositioning scanning stage with an E-761 PCI bus Piezo controller

PI (Physik Instrumente) — a leading manufacturer of nanopositioning and piezo-based precision motion-control equipment for nanotechnology, photonics and semiconductor applications — offers a new XYZ nanopositioning / scanning stage, dubbed P-733.3CD. These high-resolution stages are designed for materials research, high resolution microscopy and imaging applications. The parallel-kinematics design (only one common moving platform for XYZ) reduces the moved mass, and enables -- together with the stiff design--higher operating speeds than other piezo scanning stages.

Ultra-Precision XYZ Piezo Nano-Positioning Stage Scans & Positions Faster and More Accurately

Auburn, MA | Posted on August 2nd, 2007

Features & Advantages:
- Travel Ranges of 100 x 100 µm in X/Y and 10 µm in Z
- Direct Metrology with Capacitive Sensors for up to 0.1 Nanometers Resolution
- Parallel Kinematics for Better Multi-Axis Accuracy and Dynamics
- 50 x 50 mm Clear Aperture for Transmitted-Light Applications

Typical Applications: Scanning Microscopy, Nanomanipulation, Metrology / Interferometry, Biotechnology, Semiconductor Testing, Mask / Wafer Positioning, Image Enhancement / Stabilization

More Information:

About P-733.3CD Nanopositioning Scanning Stages
P-733 are fast and highly accurate XYZ nanopositioning and scanning stages. These piezo systems provide a positioning and scanning range of 100x100x10µm together with sub-nanometer precision. The large clear aperture is an advantage in transmitted-light applications. The high-speed Z-axis (sub-millisecond response time) can actively compensate out-of-plane, Z-axis deviation during XY scans.

Capacitive Nano Measuring Sensors Provide Higher Linearity

Capacitive nano-measuring sensors read the platform position directly and without physical contact. This makes them free of friction and hysteresis, and allows very high levels of linearity, up to 99.99% with resolution to 0.1 nanometers. The Parallel Metrology configuration measures all axes against the same fixed reference, providing better precision than serial (individual) metrology.

Parallel Kinematics for High Trajectory Fidelity

In a parallel kinematics multiaxis system, all actuators act directly on the same moving platform. This means symmetrical dynamic properties of the X and Y axes, a prerequisite for fast, high-linearity scanning.


About PI (Physik Instrumente) L.P.
PI is a leading manufacturer of nanopositioning and precision motion-control equipment for photonics, nanotechnology, semiconductor and life science applications. PI has been developing and manufacturing standard & custom precision products with piezoelectric and electromagnetic drives for 35+ years. The company has been ISO 9001 certified since 1994 and provides innovative, high-quality solutions for OEM and research. PI is present worldwide with eight subsidiaries and total staff of 450+.

For more information, please click here

Stefan Vorndran
Dir. Corp. Product Marketing & Communications
PI (Physik Instrumente) L.P.
16 Albert St.
Auburn, MA 01501
Tel: 508-832-3456,
Fax: 508-832-0506

Copyright © PI (Physik Instrumente) L.P.

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