Home > News > Battle heats up in mask tool business
July 22nd, 2007
Battle heats up in mask tool business
Another competitive and critical market is mask repair. Mask makers are sometimes hesitant to buy these systems, but they face a harsh reality: there is no "zero defect process" in the mask or fab flow, Rave's Lee said. "At 65-nm and below, you will have to use [repair technologies like] nanomachining," he said.
The mask-repair vendors -- Rave, SII NanoTechnology, Zeiss and others -- continue to battle each other in a small market. In total, vendors will ship some 5-to-8 tools per year. The average selling price for a tool is about $5 million.
Mask repair is fragmented and divided into three technology categories: e-beam, focused-ion beam (FIB) and nanomachining. There is no silver bullet in mask repair. Each technology plays a role in the mask shop.
Rave sells laser-based and nanomachining tools. At Semicon West, the company tipped its new product roadmap, by showing machines for the 45- and 32-nm nodes.
Harris & Harris Group Notes the Receipt of Proceeds From the Sale of Molecular Imprints' Semiconductor Business to Canon April 22nd, 2014
Progress made in developing nanoscale electronics: New research directs charges through single molecules April 21st, 2014
'Exotic' material is like a switch when super thin April 18th, 2014
Scientists open door to better solar cells, superconductors and hard-drives: Research enhances understanding of materials interfaces April 14th, 2014
Nanomaterial Outsmarts Ions April 22nd, 2014
Vacuum Ultraviolet Lamp of the Future Created in Japan: First Solid-State Vacuum UV Phosphor, Described in APL-Materials, Promises Smaller, Safer, Longer Lasting, Low Power Lamps for Industrial Applications April 22nd, 2014
Berkeley Lab Researchers Demonstrate First Size-based Chromatography Technique for the Study of Living Cells April 22nd, 2014
Nanoreporters tell 'sour' oil from 'sweet': Rice University's hydrogen sulfide nanoreporters gather intel on oil before pumping April 22nd, 2014
MRI, on a molecular scale: Researchers develop system that could one day peer into the atomic structure of individual molecules April 20th, 2014
Oxford Instruments Asylum Research Introduces the MFP-3D InfinityTM AFM Featuring Powerful New Capabilities and Stunning High Performance April 18th, 2014
More effective kidney stone treatment, from the macroscopic to the nanoscale April 17th, 2014
Aerotech X-Y ball-screw stage for economical high performance Planar positioning April 16th, 2014