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Home > Press > STS Ships VPX Pegasus to Semefab

-- VPX System to be Used for Demonstrating Volume Production of UK Nano/MEMS Products

STS Ships VPX Pegasus to Semefab

NEWPORT, Wales, UK | Posted on July 17th, 2007

Surface Technology Systems plc(STS) today announced that they have sold a VPX Pegasus system to Semefab, a Scottish-based semiconductor company who specializes in the design and manufacture of silicon IC and MEMS devices.

Semefab, established in 1986, hosts a GBP15 million "open access"
centre offering companies from the UK and overseas access to a fully
integrated micro and nano-technology capability, from product design and
prototyping to product development and testing. The centre is a key part of
the UK Department of Trade and Industry's GBP90m Micro and Nanotechnology
Manufacturing Initiative launched by science minister Lord Sainsbury in
2003, and is designed to provide a platform to bridge the gap between
prototyping and production.

The VPX Pegasus tool provides a production-proven cluster platform
twinned with the Pegasus plasma source which offers the higher silicon etch
rates and cross-wafer uniformity than conventional de-coupled plasma
sources -- important factors in increasing throughput and device yield in
volume production.

Ian McNaught, MEMS Business Manager of Semefab explained, "We chose the
VPX Pegasus to provide us with a market-leading system to demonstrate a
wide range of silicon MEMS devices developed by our customers, and also
offer an effective foundry service. The Pegasus' high etch rate and the
willingness of STS to work closely with the Semefab team are key factors
that shall allow Semefab to offer our customers high quality, cost
effective process development and fabrication."

John Saunders, CEO of Surface Technology Systems plc, stated, "We are
very happy to have this opportunity to work with Semefab to enhance the
UK's presence in Micro and Nanotechnology. We will continue to provide
world-class wafer processing capability for these exciting applications to
all our customers across Europe, America and Asia."


About Surface Technology Systems plc
STS designs and manufactures a range of highly specialized systems
incorporating innovative technology used in the production of
semiconductors and related devices and is a leader in plasma based etch and
deposition technologies for processing non 'mainstream' semiconductor
devices. STS serves a range of applications in several emerging sectors
within the telecommunications, data storage, advanced packaging, MEMS and

STS is the market leader in deep silicon etching for the growing MEMS
market, offering patent-protected technology. In addition, STS has a strong
presence in each of its other served markets and distributes its process
solutions worldwide through an experienced sales and service operation. The
Group currently markets in over 30 countries and has an installed base of
over 900 systems. For more information about STS please see

About Semefab

SEMEFAB is a wafer fabrication foundry with a long and successful
history, and is presently investing in both a fab expansion and new fab
build to fulfil its role as the UK nanotechnology wafer fab node. The
expanded fab 2, and the new build fab 3, are dedicated to MEMS and
nanotechnology devices. The selection of best in class systems such as
Pegasus will enable device companies to work with SEMEFAB to achieve
leading technical and financial performance when fabricating their

Semefab is a member of the Semelab Group which offers a complementary
range of products and services to the electronics industry. For more
information please see

For more information, please click here

Surface Technology Systems plc
Imperial Park
NP10 8UJ
Tel: +44 (0)1633 652 400
Fax: +44 (0)1633 652 405

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