Nanotechnology Now

Our NanoNews Digest Sponsors





Heifer International

Wikipedia Affiliate Button


DHgate

Home > Press > 248 nm Lithography to Reach 80 nm Resolution

Abstract:
Industry's Highest KrF NA Will Enable Chip Manufacturers to Reduce Cost of Ownership

248 nm Lithography to Reach 80 nm Resolution

OBERKOCHEN, Germany & SAN FRANCISCO, CA | Posted on July 17th, 2007

Carl Zeiss SMT AG announces at Semicon West 2007 its new lithography optical system Starlith® 1000 for KrF. The new system stands out with a numerical aperture (NA) of 0.93 which will be the highest NA for 248 nm exposure wavelength available in the market. This in turn provides a more cost effective solution for patterning of features down to 80 nm in volume chip production.

"Together with our strategic partner ASML we have investigated customer needs initiating the development of Starlith® 1000. This demonstrates our continuing efforts to offer solutions to the semiconductor industry for cost-effective and highly reliable lithography processes. With Starlith® 1000 the application range of KrF lithography is further extended", Winfried Kaiser points out. The Vice President Product Strategy at Carl Zeiss SMT´s Lithography Optics division continues: This development has only been possible due to our long experience in innovative lens design for lithography and leading-edge manufacturing facilities we have in place at our new production site in Oberkochen, Germany."

With Starlith® 1000 Carl Zeiss SMT now offers a complete product portfolio of leading-edge lithography optics for each of the most advanced exposure wavelenghts/technologies: @ 248 nm/KrF - the new Starlith® 1000; @ 193 nm/ArF dry - the Starlith® 1450 and @ 193 nm immersion/ArF immersion - the Starlith® 1900i.

The Starlith® 1000 system will be part of ASML´s new TWINSCAN™ XT:1000 which will begin shipping in 2008.

####

About Carl Zeiss SMT AG
Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in the manufacturing industry and R&D a broad portfolio of products, services and application solutions. The market-leading systems and solutions from Carl Zeiss SMT are used in mutually strengthening fields of application in nanotechnology such as semiconductor technology, materials research and the life sciences. The global customer community is constantly growing. As the innovation leader for lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and university R&D. Together with its subsidiaries in Germany, England, France and the USA, the international group of companies has approximately 2,400 employees. In fiscal year 2005/06, Carl Zeiss SMT AG generated revenues of over EUR 860 billion. Carl Zeiss SMT AG is a wholly owned subsidiary of Carl Zeiss AG.

For more information, please click here

Contacts:
Press:
Carl Zeiss SMT AG
Public Relations
Markus Wiederspahn, +49 7364 20-2194

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

This could replace your silicon computer chips: A new semiconductor material made from black phosphorus may be a candidate to replace silicon in future tech July 30th, 2015

March 2016; 6th Int'l Conference on Nanostructures in Iran July 29th, 2015

Meet the high-performance single-molecule diode: Major milestone in molecular electronics scored by Berkeley Lab and Columbia University team July 29th, 2015

Short wavelength plasmons observed in nanotubes: Berkeley Lab researchers create Ludinger liquid plasmons in metallic SWNTs July 28th, 2015

Announcements

Nano Spray Instrument Market 2015 - Global Industry Survey, Analysis, Size, Share, Outlook and Forecast to 2020 July 31st, 2015

Nanocellulose Market 2015 - Global Industry Survey, Analysis, Size, Share, Outlook and Forecast to 2020 July 31st, 2015

Heating and cooling with light leads to ultrafast DNA diagnostics July 31st, 2015

Theoretical Physicists at Freie Universität Berlin Develop New Insights into Interface between Classical and Quantum Worlds July 31st, 2015

Tools

Heating and cooling with light leads to ultrafast DNA diagnostics July 31st, 2015

Take a trip through the brain July 30th, 2015

Publication on Atomic Force Microscopy based nanoscale IR Spectroscopy (AFM-IR) persists as a 2015 top downloaded paper July 29th, 2015

Nanometrics Announces Upcoming Investor Events July 28th, 2015

Printing/Lithography/Inkjet/Inks

Spintronics: Molecules stabilizing magnetism: Organic molecules fixing the magnetic orientation of a cobalt surface/ building block for a compact and low-cost storage technology/ publication in Nature Materials July 25th, 2015

2015 Bulk Graphene Pricing Webinar:The Graphene Council to Host Webinar in Collaboration with Fullerex July 15th, 2015

Leti and EVG Launch INSPIRE, a Lithography Program Aimed At Demonstrating Benefits of Nano-imprint Technology July 15th, 2015

New technology using silver may hold key to electronics advances July 2nd, 2015

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project