Nanotechnology Now

Our NanoNews Digest Sponsors

Heifer International

Wikipedia Affiliate Button

Home > Press > 248 nm Lithography to Reach 80 nm Resolution

Abstract:
Industry's Highest KrF NA Will Enable Chip Manufacturers to Reduce Cost of Ownership

248 nm Lithography to Reach 80 nm Resolution

OBERKOCHEN, Germany & SAN FRANCISCO, CA | Posted on July 17th, 2007

Carl Zeiss SMT AG announces at Semicon West 2007 its new lithography optical system Starlith® 1000 for KrF. The new system stands out with a numerical aperture (NA) of 0.93 which will be the highest NA for 248 nm exposure wavelength available in the market. This in turn provides a more cost effective solution for patterning of features down to 80 nm in volume chip production.

"Together with our strategic partner ASML we have investigated customer needs initiating the development of Starlith® 1000. This demonstrates our continuing efforts to offer solutions to the semiconductor industry for cost-effective and highly reliable lithography processes. With Starlith® 1000 the application range of KrF lithography is further extended", Winfried Kaiser points out. The Vice President Product Strategy at Carl Zeiss SMT´s Lithography Optics division continues: This development has only been possible due to our long experience in innovative lens design for lithography and leading-edge manufacturing facilities we have in place at our new production site in Oberkochen, Germany."

With Starlith® 1000 Carl Zeiss SMT now offers a complete product portfolio of leading-edge lithography optics for each of the most advanced exposure wavelenghts/technologies: @ 248 nm/KrF - the new Starlith® 1000; @ 193 nm/ArF dry - the Starlith® 1450 and @ 193 nm immersion/ArF immersion - the Starlith® 1900i.

The Starlith® 1000 system will be part of ASML´s new TWINSCAN™ XT:1000 which will begin shipping in 2008.

####

About Carl Zeiss SMT AG
Carl Zeiss SMT utilizes its globally leading know-how in light, electron and ion-optical technologies to offer its customers in the manufacturing industry and R&D a broad portfolio of products, services and application solutions. The market-leading systems and solutions from Carl Zeiss SMT are used in mutually strengthening fields of application in nanotechnology such as semiconductor technology, materials research and the life sciences. The global customer community is constantly growing. As the innovation leader for lithography optics, as well as optical and particle-beam based inspection, analysis and measuring systems, Carl Zeiss SMT opens up new avenues for its customers in industrial manufacturing environments, quality assurance and industrial and university R&D. Together with its subsidiaries in Germany, England, France and the USA, the international group of companies has approximately 2,400 employees. In fiscal year 2005/06, Carl Zeiss SMT AG generated revenues of over EUR 860 billion. Carl Zeiss SMT AG is a wholly owned subsidiary of Carl Zeiss AG.

For more information, please click here

Contacts:
Press:
Carl Zeiss SMT AG
Public Relations
Markus Wiederspahn, +49 7364 20-2194

Copyright © Business Wire 2007

If you have a comment, please Contact us.

Issuers of news releases, not 7th Wave, Inc. or Nanotechnology Now, are solely responsible for the accuracy of the content.

Bookmark:
Delicious Digg Newsvine Google Yahoo Reddit Magnoliacom Furl Facebook

Related News Press

Chip Technology

Argon is not the 'dope' for metallic hydrogen March 24th, 2017

Scientists discover new 'boat' form of promising semiconductor: GeSe Uncommon form attenuates semiconductor's band gap size March 23rd, 2017

Pulverizing e-waste is green, clean -- and cold: Rice, Indian Institute researchers use cryo-mill to turn circuit boards into separated powders March 21st, 2017

Electro-optical switch transmits data at record-low temperatures: Operating at temperatures near absolute zero, switch could enable significantly faster data processing with lower power consumption March 20th, 2017

Announcements

Cryo-electron microscopy achieves unprecedented resolution using new computational methods March 25th, 2017

Argon is not the 'dope' for metallic hydrogen March 24th, 2017

Promising results obtained with a new electrocatalyst that reduces the need for platinum: Researchers from Aalto University have succeeded in manufacturing electrocatalysts used for storing electric energy with one-hundredth of the amount of platinum that is usually needed March 24th, 2017

Artificial photosynthesis steps into the light: Rice University lab turns transition metals into practical catalyst for solar, other applications March 23rd, 2017

Tools

Cryo-electron microscopy achieves unprecedented resolution using new computational methods March 25th, 2017

Caught on camera -- chemical reactions 'filmed' at the single-molecule level March 22nd, 2017

CRMGroup in Belgium uses a Deben three point bending stage in the development of new steel & coated steel products for automotive and other industrial applications March 21st, 2017

Next-gen steel under the microscope March 18th, 2017

Printing/Lithography/Inkjet/Inks/Bio-printing

Liquid metal nano printing set to revolutionize electronics: Creating integrated circuits just atoms thick February 18th, 2017

New stem cell technique shows promise for bone repair January 25th, 2017

NUS researchers achieve major breakthrough in flexible electronics: New classes of printable electrically conducting polymer materials make better electrodes for plastic electronics and advanced semiconductor devices January 14th, 2017

Nanowire 'inks' enable paper-based printable electronics: Highly conductive films make functional circuits without adding high heat January 4th, 2017

NanoNews-Digest
The latest news from around the world, FREE



  Premium Products
NanoNews-Custom
Only the news you want to read!
 Learn More
NanoTech-Transfer
University Technology Transfer & Patents
 Learn More
NanoStrategies
Full-service, expert consulting
 Learn More











ASP
Nanotechnology Now Featured Books




NNN

The Hunger Project