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Home > Press > Major U.S. Maker of High Performance MEMS Motion Sensors Orders Tegal Endeavor AT™ PVD Tool

Tool Purchase Aimed at Advanced MEMS Accelerometer Fabrication for Consumer Device Markets

Major U.S. Maker of High Performance MEMS Motion Sensors Orders Tegal Endeavor AT™ PVD Tool

San Jose, CA | Posted on June 19th, 2007

Tegal Corporation (Nasdaq: TGAL), a leading designer and manufacturer of plasma etch and deposition systems used in the production of integrated circuits, MEMS, and nanotechnology devices, announced today it received an order for an Endeavor AT™ PVD cluster tool from a preeminent maker of commercial MEMS accelerometers and inertial sensors. The Endeavor system will join the installed base of Tegal plasma etch equipment already in use by this customer to produce 2-axis and 3-axis MEMS accelerometers for the automotive and consumer electronics markets.

"We successfully demonstrated the superior wafer handling and film deposition capabilities of the Endeavor AT™ PVD system for MEMS sensor fabrication, and we are pleased to have been selected for this order on the basis of those results," said Scott Brown, Vice President, North American Sales, of Tegal Corporation. "The Endeavor's versatility in handling thin MEMS wafers, with and without wafer carriers, together with the extendibility of the Endeavor AT™ to even larger and thinner wafers, allows our customer to be confident about their technology roadmap for future generations of advanced MEMS inertial sensors."

The commercial market for MEMS motion sensors is taking a great leap forward this year, with MEMS-enabled functions, such as motion-responsive play on the Wii game system from Nintendo, and the rotating display on the new Apple iPhone, capturing popular attention. Imaginative applications of MEMS sensors, combined with decreasing prices, are expected to produce a whole new range of must-have consumer electronic products, along with creating additional functionality to the billion cell phone handsets expected to ship in each of the next few years.

The Tegal Endeavor AT™ system is a state-of the-art, ultra-high vacuum PVD cluster tool used in production fabs to deposit consistent, high purity films, with low to zero stress values, in an extremely clean process environment. Low stress films are widely utilized in under-bump metallization applications, advanced packaging, power devices, photo masks (including EUV), high-brightness light emitting diodes (HB-LEDs), and in creating electro-acoustic devices for FBARs and RF MEMS. The Endeavor AT™ has an easy-to-use GUI, SECS/GEM communication, reliable low-contact wafer handling, and flexible wafer shape and size capability, that makes it ideal for ultra-clean production environments for both front-side and back-side applications. Optional damage-free soft-etch modules, and a variety of DC, AC, and RF magnetron configurations, are available to sputter the many different dielectric and conductive films used in semiconductor, MEMS, and other electronic device production.


About Tegal Corporation
Tegal provides process and equipment solutions to leading edge suppliers of advanced semiconductor, MEMS, and nanotechnology devices. Incorporating unique, patented etch and deposition technologies, Tegal’s system solutions are backed by over 35 years of advanced development and over 100 patents. Some examples of devices enabled by Tegal technology are energy efficient memories found in portable computers, cellphones, PDAs and RFID applications; megapixel imaging chips used in digital and cellphone cameras; power amplifiers and RF filters for portable handsets and wireless networking gear; and MEMS devices like accelerometers for automotive airbags, microfluidic control devices for ink jet printers; and laboratory-on-a-chip medical test kits. Tegal is an active member of the MEMS Industry Group ( ), and supports MIG’s efforts to promote greater commercial use of MEMS and MEMS-enabled technology.

Safe Harbor Statement

Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.

For more information, please click here

Tegal Corporation
Pavel Laptev, 707-763-5600
Marketing Director – PVD Products
The Blue Shirt Group
Rakesh Mehta, 415-217-7722
Chris Danne, 415-217-7722

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